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Determination of Surface Density of Thin Manganese Films Using Reference Samples of Elements with Similar Atomic Numbers

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Journal of Applied Spectroscopy Aims and scope

The feasibility of an approach based on reference samples of elements with similar atomic numbers is considered for x-ray fluorescence determination of the surface density of manganese thin films. This diagnostic technique is found to provide sufficient accuracy in surface density measurements.

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References

  1. K. Hirokawa, M. Suzuki, and H. Goto, Z. Аnal. Chem., 199, No. 2, 89–94 (1964).

    Article  Google Scholar 

  2. H. Dahl and G. Schulz, Z. Angew. Phys., 29, No. 2, 117–121 (1970).

    Google Scholar 

  3. V. I. Bykov and I. G. Shveitser, Including the Effect of Substrates on X-Ray Spectral Fluorescence Analysis of Unsaturated Layers, deposited in VINITI April 9, 1984, No. 2129-84, Moscow (1984).

  4. N. I. Mashin, I. A. Bacherikova, E. A. Chernyaeva, A. N. Tumanova, and A. A. Ershov, Zh. Prikl. Spektrosk., 79, No. 6, 857–861 (2012).

    Google Scholar 

  5. F. E. Naumtsev, V. F. Volkov, and N. F. Losev, Zav. Lab., 54, No. 4, 30–33 (1988).

    Google Scholar 

  6. K. Nygård, K. Hämäläinen, S. Mannien, P. Jalas, and J.-P. Ruottinen, X-Ray Spectrom., 33, 354–359 (2004).

    Article  Google Scholar 

  7. P. Jonnard, H. Maury, and J.-M. Andre, X-Ray Spectrom., 36, 72–75 (2007).

    Article  Google Scholar 

  8. M. Karimi, H. Bothe, N. Amiri, and V. Ahadnejad, X-Ray Spectrom., 37, 551–554 (2008).

    Article  Google Scholar 

  9. M. Karimi, N. Amiri, and A. Shabani, X-Ray Spectrom., 38, 234–238 (2009).

    Article  Google Scholar 

  10. M. Wendt, Phys. Status Solidi (a), 16, 115–120 (1973).

  11. V. R. Darashkevich, M. V. Lyubivaya, and B. A. Malyukov, Zav. Lab., 43, No. 9, 1079–1082 (1977).

    Google Scholar 

  12. W. Hoffmeister and M. Zvegel, Thin Solid Films, 3, No. 1, 35–40 (1969)

    Article  ADS  Google Scholar 

  13. B. A. Malyukov, D. D. Spivakov, O. S. Sotnikova, and M. V. Vorob’eva, Zav. Lab., 52, No. 4, 21–23 (1986).

    Google Scholar 

  14. V. R. Darashkevich, B. A. Malyukov, and G. M. Turovskaya, ZhAKh, 34, Issue 1, 138–141 (1979).

    Google Scholar 

  15. M. A. Blokhin and I. G. Shveitser, X-ray Spectroscopy Handbook [in Russian], Nauka, Moscow (1982), pp. 38–40.

    Google Scholar 

  16. V. R. Darashkevich and B. A. Malyukov, Zav. Lab., 46, No. 6, 512–513 (1980).

    Google Scholar 

  17. E. E. Belyaeva, A. V. Ershov, N. I. Mashin, and N. K. Rudnevskii, ZhAKh, 53, No. 6, 638–640 (1998).

    Google Scholar 

  18. A. S. Berezin and O. R. Mochalkina, Technology and Design of Integrated Circuits [in Russian], Radio i Svyaz’, Moscow (1983), pp. 84–86.

    Google Scholar 

  19. V. P. Afonin, N. I. Komyak, V. P. Nikolaev, and R. I. Plotnikov, X-ray Fluorescence Analysis [in Russian], Nauka, Novosibirsk (1991), pp. 129–131.

    Google Scholar 

  20. N. I. Mashin, N. K. Rudnevskii, Yu. S. Kalinin, A. N. Mashin, Zav. Lab., 56, No. 12, 34–36 (1990).

    Google Scholar 

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Correspondence to N. I. Mashin.

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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 82, No. 1, pp. 76–80, January–February, 2015.

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Mashin, N.I., Chernjaeva, E.A., Tumanova, A.N. et al. Determination of Surface Density of Thin Manganese Films Using Reference Samples of Elements with Similar Atomic Numbers. J Appl Spectrosc 82, 72–75 (2015). https://doi.org/10.1007/s10812-015-0066-3

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  • DOI: https://doi.org/10.1007/s10812-015-0066-3

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