We studied the effect of ion bombardment on the structure of SOG (spin-on-glass) films. We used IR and Raman spectroscopy and plan-view transmission electron microscopy to study the characteristic features of the structural transformation in organosilicon films when bombarded by nitrogen ions. We show that they are heterogeneous and we establish the presence of inclusions of nanocrystalline graphite.
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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 79, No. 6, pp. 1006–1009, November–December, 2012.
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Vlasukova, L.A., Komarov, F.F., Leontyev, A.V. et al. Raman spectra of heterogeneous nanostructures based on organosilicon films. J Appl Spectrosc 79, 1006–1009 (2013). https://doi.org/10.1007/s10812-013-9705-8
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DOI: https://doi.org/10.1007/s10812-013-9705-8