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REFLECTIVE INFRARED ELLIPSOMETRY OF PLASTIC FILMS

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Abstract

High resolution reflective ellipsometry is used to study freely suspended plastic films. We determine room temperature optical constants in the infrared for a variety of plastics using ellipsometry. The films are typically 6 to 100 μm thick and measurements are performed from near infrared to long wave-IR. The setup includes modeling software to fit the ellipsometric data to a generalized oscillator model. The films studied include acrylics, fluoropolymers, and variations of polyethylene, polystyrene, and polyvinyl chloride (PVC) among others. We are able to determine in-plane and out-of-plane optical constants. Transmission spectra from FTIR measurements are plotted and compared with ellipsometry results.

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Authors and Affiliations

  1. College of Optics and Photonics: CREOL & FPCE, University of Central Florida, Orlando, FL, 32816-2700, USA

    William R. Folks, Sidhartha K. Pandey & Glenn Boreman

  2. J.A. Woollam Company, Inc., Lincoln, NE, 68508, USA

    Greg Pribil

  3. Microcontinuum Corporation, Cambridge, MA, 02138, USA

    Dennis Slafer & Monis Manning

Authors
  1. William R. Folks
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  2. Sidhartha K. Pandey
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  3. Greg Pribil
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  4. Dennis Slafer
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  5. Monis Manning
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  6. Glenn Boreman
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Corresponding author

Correspondence to William R. Folks.

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Folks, W.R., Pandey, S.K., Pribil, G. et al. REFLECTIVE INFRARED ELLIPSOMETRY OF PLASTIC FILMS. Int J Infrared Milli Waves 27, 1553–1571 (2006). https://doi.org/10.1007/s10762-006-9150-3

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  • DOI: https://doi.org/10.1007/s10762-006-9150-3

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