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A Brief History and State of the Art of Ellipsometry

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Ellipsometry at the Nanoscale

Abstract

Ellipsometry is a nonperturbing optical technique that uses the change in the state of polarization of light upon reflection for the ex-situ and in-situ and real-time characterization of surfaces, interfaces, thin films and nanostructured materials. This chapter identifies the crucial ideas from which the ellipsometry technique derives, provides the key relationships for ellipsometry and presents a brief introduction to the essential ellipsometry configurations and hardware.

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References

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Author information

Authors and Affiliations

  1. Department of Chemistry, University of North Carolina, Chapel Hill, NC, 27599, USA

    Eugene A. Irene

Authors
  1. Eugene A. Irene
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Correspondence to Eugene A. Irene .

Editor information

Editors and Affiliations

  1. CNR Bari, Ist. Metodologie Inorganiche, Università Bari, Via Orabona 4, Bari, 70126, Italy

    Maria Losurdo

  2. Zentrum für Oberflächen- und, Nanoanalytik (ZONA), Universität Linz, Linz, 4040, Austria

    Kurt Hingerl

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Irene, E.A. (2013). A Brief History and State of the Art of Ellipsometry. In: Losurdo, M., Hingerl, K. (eds) Ellipsometry at the Nanoscale. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-33956-1_1

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  • DOI: https://doi.org/10.1007/978-3-642-33956-1_1

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-33955-4

  • Online ISBN: 978-3-642-33956-1

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