The effect of the parameters of laser radiation and the composition of the etching solution on the length of hollow channels formed in quartz glass by a one-stage method of spatially selective liquid etching under the action of a femtosecond laser beam was investigated. Amulti-pass method was proposed, which significantly increased the channel length to 180 μm. Etching solutions that effectively dissolve the fractured layer of the formed channels can be used to obtain deeper and wider channels while maintaining high selectivity.
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References
D. Bischof, M. Kahl, and M. Michler, “Laser-assisted etching of borosilicate glass in potassium hydroxide,” Opt. Mater. Express, 11(4), 1185 – 1195 (2021).
J. Gottmann, M. Hermans, N. Repiev, and J. Ortmann, “Selective laser-induced etching of 3D precision quartz glass components for microfluidic applications — up-scaling of complexity and speed,” Micromachines, 8(4), 110 (2017).
Y. Liao, J. Xu, H. Sun, et al., “Fabrication of microelectrodes deeply embedded in LiNbO3 using a femtosecond laser,” Appl. Surf. Sci., 254(21), 7018 – 7021 (2008).
Z. Liu, J. Xu, Z. Lin, et al., “Fabrication of single-mode circular optofluidic waveguides in fused silica using femtosecond laser microfabrication,” Opt. Laser Technol., 141, 107118 (2021).
J. Lv, B. Hong, Y. Tan, et al., “Mid-infrared waveguiding in three-dimensional microstructured optical waveguides fabricated by femtosecond-laser writing and phosphoric acid etching,” Photon. Res., 8, No. 3, 257 – 262 (2020).
J. Qi, W. Li, W. Chu, et al., “A microfluidic mixer of high throughput fabricated in glass using femtosecond laser micromachining combined with glass bonding,” Micromachines, 11, No. 2, 213 (2020).
J. Qi, Z. Wang, J. Xu, et al., “Femtosecond laser induced selective etching in fused silica: optimization of the inscription conditions with a high-repetition-rate laser source,” Opt. Express, 26(23), 29669 – 29678 (2018).
M. Beresna, M. Gecevièius, M. Lancry, et al., “Broadband anisotropy of femtosecond laser induced nanogratings in fused silica,” Appl. Phys. Lett., 103(13), 131903 (2013).
S. V. Lotarev, S. S. Fedotov, A. I. Kurina, et al., “Ultrafast laser-induced nanogratings in sodium germanate glasses,” Opt. Lett., 44(7), 1564 – 1567 (2019).
S. Richter, “Laser induced nanogratings beyond fused silica-periodic nanostructures in borosilicate glasses and ULE™,” Opt. Mater. Express, 3(8), 1161 – 1166 (2013).
Y. Yu, Y. Chen, J. Chen, et al., “Fabrication of microchannels by space-selective control of phase separation in glass,” Opt. Lett., 41(14), 3371 – 3374 (2016).
A. M. Shakhov, A. A. Astafiev, and V. A. Nadtochenko, “Physicochemical mechanisms of nanostructuring of glass by femtosecond laser pulses with the use of selective etching,” JETP Lett., 109(5), 292 – 297 (2019).
X. W. Cao, Q. D. Chen, H. Fan, et al., “Liquid-assisted femtosecond laser precision-machining of silica,” Nanomaterials, 8(5), 287 (2018).
T. T. Fernandez, M. Sakakura, S. M. Eaton, et al. “Bespoke photonic devices using ultrafast laser driven ion migration in glasses,” Progr. Mater. Sci., 94, 68–113 (2018).
S. Kim, J. Kim, Y. H. Joung, et al., “Optimization of selective laser-induced etching (SLE) for fabrication of 3D glass microfluidic devices with multi-layer micro channels,” Micro Nano Systems Lett., 7(1), 1–7 (2019).
K. Hasse, G. Huber, and C. Kränkel, “Selective etching of fs-laser inscribed high aspect ratio microstructures in YAG,” Opt. Mater. Express, 9(9), 3627–3637 (2019).
G. Spierings, “Wet chemical etching of silicate glasses in hydrofluoric acid based solutions,” J. Mater. Sci., 28(23), 6261–6273 (1993).
C. A. Ross, D. G. MacLachlan, D. Choudhury, and R. R. Thomson, “Optimisation of ultrafast laser assisted etching in fused silica,” Opt. Express, 26(19), 24343–24356 (2018).
K. K. Kwon, H. Kim, T. Kim, and C. N. Chu, “High aspect ratio channel fabrication with near-infrared laser-induced backside wet etching,” J. Mater. Proc. Technol., 278, 116505 (2020).
H. Niino, Y. Kawaguchi, T. Sato, et al., “Laser-induced backside wet etching of silica glass with ns-pulsed DPSS UV laser at the repetition rate of 40 kHz,” J. Phys.: Conf. Ser. (IOP Publishing), 59(1), 115 (2007).
M. Y. Tsvetkov, V. I. Yusupov, N. V. Minaev, et al., “Effects of thermo-plasmonics on laser-induced backside wet etching of silicate glass,” Laser Phys. Lett., 13(10), 106001 (2016).
R. Böhme, D. Hirsch, and K. Zimmer, “Laser etching of transparent materials at a backside surface adsorbed layer,” Appl. Surf. Sci., 252(13), 4763–4767 (2006).
M. Y. Tsvetkov, N. V. Minaev, A. A. Akovantseva, et al., “Thermoplasmonic laser-induced backside wet etching of sapphire,” Quantum Electronics, 49(2), 133 (2019).
J. Long, C. Zhou, et al., “Incubation effect during laser-induced backside wet etching of sapphire using high-repetition-rate near-infrared nanosecond lasers,” Opt. Laser Technol., 109, 61–70 (2019).
The Russian Science Foundation supported this work under RNF Grant No. 20-73-00144.
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Translated from Steklo i Keramika, No. 9, pp. 3 – 8, September, 2021.
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Lipatieva, T.O., Lipatiev, A.S., Kulakova, Y.V. et al. Control of Liquid Laser-Induced Etching of Quartz Glass. Glass Ceram 78, 345–349 (2022). https://doi.org/10.1007/s10717-022-00408-1
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DOI: https://doi.org/10.1007/s10717-022-00408-1