The principles of creating fine metal figures in the surface layer of glass with resolution 10 ìm using the methods of contact and explosive photolithography are presented. It is shown that this technology can be used in the production of metal photomasks, for micro- and opto-electronics without the laborious operations currently used, as well as letter and number images of any size and configuration.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
M. M. Shul’ts and O. V. Mazurin, Contemporary Ideas about the Structure and Properties of Glass [in Russian], Nauka, Leningrad (1988).
W. M. Moreau, Microlithography [Russian translation], Mir, Moscow (1990), Vols. 1 and 2.
E. N. Gudymovich and O. S. Ivanov, “Method of creating a metal figure in the surface layer of glass, Patent No. 2456655, July 20, 2012,” Byull. Izobr. Polezn. Modeli, No. 20 (2012).
Author information
Authors and Affiliations
Corresponding author
Additional information
Translated from Steklo i Keramika, No. 1, pp. 11 – 13, January, 2015.
Rights and permissions
About this article
Cite this article
Gudymovich, E.N. Creating Metal Figures in the Surface Layer of Glass. Glass Ceram 72, 10–12 (2015). https://doi.org/10.1007/s10717-015-9711-9
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10717-015-9711-9