The possibilities of depositing thin layers of silicon dioxide on the surface quartz are investigated as functions of the chemical composition of the initial reagents and the process conditions. It is shown that silicon chloride and alcoholates can be used for deposition.
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The Chemist’s Handbook [in Russian], Khimiya, Leningrad (1971), Vol. 1.
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Translated from Steklo i Keramika, No. 2, pp. 9–11, February, 2009.
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Potelov, V.V. Obtaining thin layers of silicon dioxide on quartz. Glass Ceram 66, 50–52 (2009). https://doi.org/10.1007/s10717-009-9121-y
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DOI: https://doi.org/10.1007/s10717-009-9121-y