Abstract
We present novel hybrid microfabrication methods for microelectrode arrays that combine microwire assembly, microelectromechanical systems (MEMS) manufacturing techniques and precision tool-based micromachining. This combination enables hybrid microfabrication to produce complex geometries and structures, increase material selection, and improve integration. A 32-channel shank microelectrode array was fabricated to highlight the hybrid microfabrication techniques. The electrode shank was 130 μm at its narrowest, had a 127 μm thickness and had iridium oxide electrode sites that were 25 μm in diameter with 150 μm spacing. Techniques used to fabricate this electrode include microassembly of insulated gold wires into a micromold, micromolding the microelectrode shank, post molding machining, sacrificial release of the microelectrode and electrodeposition of iridium oxide onto the microelectrode sites. Electrode site position accuracy was shown to have a standard deviation of less than 4 μm. Acute in vivo recordings with the 32-channel shank microelectrode array demonstrated comparable performance to that obtained with commercial microelectrode arrays. This new approach to microelectrode array fabrication will enable new microelectrodes, such as multi-sided arrays, drug eluding electrodes and biodegradable shanks.
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Acknowledgments
We wish to thank Spencer Chang for his help with the electrode fabrication and CNC operations and Richard Chang for his expertise and assistance in SEM sample preparation. We are grateful to Prof. Reginald Penner and Keith Donavan for providing access to their potentiostat and assisting with the impedance measurements. We appreciate the helpful comments and insightful suggestions provided by the reviewers. Hybrid microfabrication and related devices are patent pending. We gratefully acknowledge support from the Broadcom Foundation and the National Institute on Deafness and Other Communication Disorders contract N263-2009-00024C.
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Merlo, M.W., Snyder, R.L., Middlebrooks, J.C. et al. Microelectrode arrays fabricated using a novel hybrid microfabrication method. Biomed Microdevices 14, 193–205 (2012). https://doi.org/10.1007/s10544-011-9597-4
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DOI: https://doi.org/10.1007/s10544-011-9597-4