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Applying Taguchi methods for solvent-assisted PMMA bonding technique for static and dynamic μ-TAS devices

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Abstract

This work examines numerous significant process parameters in the solvent-assistant Polymethyl methacrylate (PMMA) bonding scheme and presents two Micro-total-analysis System (μ-TAS) devices generated by adopting the optimal bonding parameters. The process parameters considered were heating temperature, applied loading, duration and solution. The effects of selected process parameters on bonding dimensions loss and strength, and subsequent optimal setting of the parameters were accomplished using Taguchi’s scheme. Additionally, two μ-TAS devices were realized using a static paraffin microvalve and a dynamic diffuser micropump. The PMMA chips were carved using a CO2 laser that patterned device microchannels and microchambers. The operation principles, fabrication processes and experimental performance of the devices are discussed. This bonding technique has numerous benefits, including high bonding strength (240 kgf/cm2) and low dimension loss (2–6%). For comparison, this work also demonstrates that the normal stress of this technology is 2–15 times greater than that of other bonding technologies, including hot embossing, anodic bonding, direct bonding and thermal fusion bonding.

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Acknowledgments

The authors would like to thank the National Science Council of the Republic of China, Taiwan, for financially supporting this research under Contract No. NSC 95-2212-E-218-055. National Nano Device Laboratories, Center for Micro/Nano Technology Research and Nanotechnology Research Center in Southern Taiwan University of Technology are also commended for fabrication and measurement support. Dr. W. C. Sue from Department of Mechanical Engineering in Southern Taiwan University of Technology is appreciated for kindly providing technical support on bonding strength measurement.

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  1. Department of Mechanical Engineering, Southern Taiwan University of Technology, Yung Kang City, Tainan County, Taiwan

    Yi-Chu Hsu & Tang-Yuan Chen

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  1. Yi-Chu Hsu
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  2. Tang-Yuan Chen
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Correspondence to Yi-Chu Hsu.

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Hsu, YC., Chen, TY. Applying Taguchi methods for solvent-assisted PMMA bonding technique for static and dynamic μ-TAS devices. Biomed Microdevices 9, 513–522 (2007). https://doi.org/10.1007/s10544-007-9059-1

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