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A high-order closed-loop ΣΔ interface for micro-machined accelerometer sensor

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Abstract

This paper presents a closed-loop interface for micro-machined accelerometer sensor based on a force-feedback sigma-delta loop. A high-order closed-loop accelerometer interface circuit is investigated, and a time-shared multiplexing electrostatic feedback technique is used to eliminate feedthrough between feedback signals and pick-up charge signals. A low noise capacitance detection circuit is proposed with correlated-double-sampling technique to eliminate the 1/f noise and offset of operational amplifier. The interface is fabricated in a standard 0.5 μm CMOS process and the active circuit area is about 13 mm2. The chip consumes 20 mW from a 5 V supply with a sampling clock of 250 kHz. The average noise floor of the digital accelerometer is about −115 dBV/Hz1/2 over a 1.5 kHz bandwidth. Corresponding to a sensitivity of 302 mV/g, the measured resolution of the accelerometer system is about 6 μg/Hz1/2. The nonlinearity is 0.085 %. The figure of merit shows that the proposed sigma-delta interface achieves a good performance.

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Acknowledgments

This work was supported by National Natural Science Foundation of China (Project 61204121) and National Hi-Tech Research and Development Program of China (863 Program) (Grant No. 2013AA041107). The author would like to thank Peking University for providing the sensor.

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Authors and Affiliations

  1. MEMS Center, Harbin Institute of Technology, Harbin, 150001, China

    Honglin Xu, Xiaowei Liu, Qiang Fu & Bingjun Lv

  2. Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Harbin, 15001, China

    Xiaowei Liu

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  1. Honglin Xu
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  2. Xiaowei Liu
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  3. Qiang Fu
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  4. Bingjun Lv
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Correspondence to Honglin Xu.

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Xu, H., Liu, X., Fu, Q. et al. A high-order closed-loop ΣΔ interface for micro-machined accelerometer sensor. Analog Integr Circ Sig Process 82, 401–410 (2015). https://doi.org/10.1007/s10470-014-0436-4

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  • DOI: https://doi.org/10.1007/s10470-014-0436-4

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