Abstract
To minimize the power consumption of the piezoelectric micropumps utilized in the microfluidics field, suitable models are required to enable the optimization of the lead zirconate titanate (PZT) actuator driving circuits. The recent research shows that the electromechanical parameters of piezoelectric materials can be obtained from Butterworth Van-Dyke (BVD) model. The current study presents a novel time-domain measurement technique for extracting the parameters of a BVD electrical model describing a PZT actuator of the micropump excited by a square pulse with a relatively high voltage and low frequency. The validity of the BVD model is evaluated by using MATLAB software to solve the ordinary differential equations of the electrical model and then comparing the numerical results obtained for the current response of the PZT actuator with the experimentally-observed results. The BVD model has been found to be valid for this specific application of piezo actuators. A good agreement is observed between the two sets of result, and thus the validity of the BVD model and the proposed time-domain measurement technique is confirmed.
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Abbreviations
- v 1 :
-
applied driving voltage
- v 2 :
-
output voltage
- A :
-
the lowest voltage intensity of driving source
- N :
-
peak-to-peak voltage of driving source
- τ 1 :
-
rising time constant of driving source
- \( i_{{C_{0} }} (t) \) :
-
current passing through the capacitor branch
- i s (t):
-
current passing through the RLC branch
- i L (t):
-
output current
- t c :
-
the critical time
- \( v_{{C_{1} }} \) :
-
voltage difference across the C 1
- ω d :
-
under-damping resonant frequency
- α :
-
damping coefficient
- B 1 :
-
the cosine coefficient of homogeneous solution of \( v_{{C_{1} }} (t) \)
- B 2 :
-
the sine coefficient of homogeneous solution of \( v_{{C_{1} }} (t) \)
- a :
-
the constant of specific solution of \( v_{{C_{1} }} (t) \)
- b :
-
the exponential coefficient of specific solution of \( v_{{C_{1} }} (t) \)
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Acknowledgments
This study was supported by the National Science Council of Taiwan under Grant No. NSC 95-2622-E-006-039-CC3. The authors would like to thank the Center for Micro/Nano Science and Technology and the National Nano Device Laboratories, both of Tainan, Taiwan, for their provision of technical support and the access provided to major items of equipment. Additionally, the authors wish to make it known that the current study made use of Shared Facilities supported by the Program of Top 100 Universities Advancement sponsored by the Ministry of Education, Taiwan.
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Appendix: Procedure of solving the RLC branch
Appendix: Procedure of solving the RLC branch
Applying the KVL to this simplified circuit, the RLC series circuit, it can be shown that
where R ′ = R 1 + R L , \( v_{{C_{1} }} \) is the voltage difference across C 1, and A, N and τ 1 represent the minimum voltage intensity, the peak-to-peak voltage and the rising time constant, respectively, of the amplified square pulse voltage (v 1). Since \( i_{s} = C_{1} ({{{\text{d}}v_{{C_{1} }} }}/{{{\text{d}}t}}), \) and given the assumption of an initial condition\( v_{{C_{1} }} (0) = A, \) Eq. 34 can be rewritten in the form of the following second-order differential equation:
in which the general solution of \( v_{{C_{1} }} \) has the form
The homogeneous term in Eq. 34 is given by
with
and
where α is the damping coefficient, ω d is the damped angular frequency and T is the damped period. Note that the value of ω d can be easily determined from the experimental data and is discussed in Sect. 3.2. However, α, B 1 and B 2 are all unknowns with constant values.
The particular term in Eq. 34 has the form
where a and b are constants and unknown.
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Jang, LS., Kan, WH., Chen, MK. et al. Parameter extraction from BVD electrical model of PZT actuator of micropumps using time-domain measurement technique. Microfluid Nanofluid 7, 559 (2009). https://doi.org/10.1007/s10404-009-0416-7
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DOI: https://doi.org/10.1007/s10404-009-0416-7