Abstract.
Nanostructured carbon thin films have been grown by deposition of cluster beams produced by a supersonic expansion. Due to separation effects typical of supersonic beams, films with different nanostructures can be grown by the simple intercepting of different regions of the cluster beam with a substrate. Films show a low-density porous structure, which has been characterized by Raman and Brillouin spectroscopy. Film morphology suggests that growth processes are similar to those occurring in a ballistic deposition regime.
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Received: 1 September 1998 / Received in final form: 28 September 1998
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Milani, P., Barborini, E., Piseri, P. et al. Nanostructured carbon films from supersonic cluster beam deposition: structure and morphology. Eur. Phys. J. D 9, 63–68 (1999). https://doi.org/10.1007/s100530050400
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DOI: https://doi.org/10.1007/s100530050400