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Resolution improvement in vertical-cavity-surface-emitting-laser diode interferometry based on linear least-squares estimation of phase gradients of phase-locked fringes

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Abstract

A frequency scanning interferometer using a vertical-cavity-surface-emitting-laser diode (VCSEL) capable of wide-frequency scanning has been constructed for precise distance measurements. The frequency scanning velocity of the VCSEL has been stabilized by the phase-locked loop technique, which enables us to precisely determine the phase gradient of the scanned interference fringe by linear least-squares fitting. In our test measurements, the absolute lengths from 8 to 14mm have been measured with a resolution of nearly sub-micrometer. Compared with a conventional frequency scanning interferometer using a Fabry-Perot laser diode, the resolution of length measurement has been improved by two orders of magnitude.

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Authors and Affiliations

  1. Division of Applied Physics, Graduate School of Engineering, Hokkaido University, N13W8, Kita-ku, Sapporo, 060-8628, Japan

    Seiichi Kakuma & Yasuhiko Katase

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  1. Seiichi Kakuma
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  2. Yasuhiko Katase
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Correspondence to Seiichi Kakuma.

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Kakuma, S., Katase, Y. Resolution improvement in vertical-cavity-surface-emitting-laser diode interferometry based on linear least-squares estimation of phase gradients of phase-locked fringes. OPT REV 17, 481–485 (2010). https://doi.org/10.1007/s10043-010-0087-3

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  • DOI: https://doi.org/10.1007/s10043-010-0087-3

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