Skip to main content
SpringerLink
Log in

Impact of an indium oxide/indium-tin oxide mixed structure for GaN-based light-emitting diodes

  • Letters
  • Published:
Optical Review Aims and scope Submit manuscript

Abstract

An interesting GaN-based light emitting diode (LED) using a 50 nm indium oxide (In2O3)/250 nm indium-tin oxide (ITO) mixed structure to replace the commonly used ITO (250 nm) current spreading layer is fabricated and studied. Use of the In2O3 layer could reduce the contact resistance of p-GaN in LEDs. In addition, this highly-resistive In2O3 layer, below the ITO layer could improve the current spreading performance. Experimentally, at room temperature, using this mixed structure, the luminous and EL intensities are enhanced by 17.7 and 17.1%, respectively.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. K. Streubel, N. Linder, R. Wirth, and A. Jaeger: IEEE J. Sel. Top. Quantum Electron. 8 (2002) 321.

    Article  Google Scholar 

  2. R. M. Fletcher, C. P. Kuo, T. D. Osentowski, K. H. Huang, M. C. Craford, and V. M. Robbins: J. Electron. Mater. 20 (1991) 1125.

    Article  ADS  Google Scholar 

  3. J. W. Shi, I. K. Sheu, and C. K. Wang: IEEE Photonics Technol. Lett. 19 (2007) 1368.

    Article  ADS  Google Scholar 

  4. J. M. Hwang, K. F. Lee, and H. L. Hwang: J. Phys. Chem. Solids 69 (2008) 752.

    Article  ADS  Google Scholar 

  5. H. Kim, J. Cho, and J. W. Lee: IEEE J. Quantum Electron. 43 (2007) 625.

    Article  ADS  Google Scholar 

  6. J. Liday, I. Hotovy, and H. Sitter: J. Mater. Sci.: Mater. Electron. 19 (2008) 855.

    Article  Google Scholar 

  7. R. H. Horng, D. S. Wuu, Y. C. Lien, and W. H. Lan: Appl. Phys. Lett. 79 (2001) 2925.

    Article  ADS  Google Scholar 

  8. J. K. Ho, C. S. Jong, C. C. Chiu, C. N. Huang, C. Y. Chen, and K. K. Shih: Appl. Phys. Lett. 74 (1999) 1275.

    Article  ADS  Google Scholar 

  9. W. T. Lim, P. W. Sadik, and D. P. Norton: J. Electron. Mater. 37 (2008) 161.

    Article  ADS  Google Scholar 

  10. K. M. Chang, J. Y. Chu, and C. C. Cheng: IEEE Photonics Technol. Lett. 16 (2004) 1807.

    Article  ADS  Google Scholar 

  11. H. Kim, J. S. Horwitz, G. Kushto, A. Pique, Z. H. Kafafi, and C. M. Gilmore: J. Appl. Phys. 88 (2000) 6021.

    Article  ADS  Google Scholar 

  12. H. Lee, S. W. Cho, and K. Han: Appl. Phys. Lett. 93 (2008) 043308.

    Article  ADS  Google Scholar 

  13. R. Meerheim, R. Nitsche, and K. Leo: Appl. Phys. Lett. 93 (2008) 043310.

    Article  ADS  Google Scholar 

  14. M. C. Wu, J. F. Lin, M. J. Jou, C. M. Chang, and B. J. Lee: IEEE Electron Device Lett. 16 (1995) 482.

    Article  ADS  Google Scholar 

  15. J. S. Jang, D. Kim, and T. Y. Seong: IEEE Photonics Technol. Lett. 18 (2006) 1536.

    Article  ADS  Google Scholar 

  16. X. Guo and E. F. Schubert: J. Appl. Phys. 90 (2001) 4191.

    Article  ADS  Google Scholar 

  17. J. O. Song, H. Kang, D. Nicol, I. T. Ferguson, H. G. Hong, and T. Y. Seong: MRS Fall Symp., 2005.

  18. J. K. Sheu, M. L. Lee, Y. S. Lu, and K. W. Shu: IEEE J. Quantum Electron. 44 (2008) 1211.

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, 1 University Road, Tainan, Taiwan, 70101, Republic of China

    Yi-Jung Liu, Chih-Hung Yen, Chia-Hao Hsu, Kuo-Hui Yu, Li-Yang Chen, Tsung-Han Tsai & Wen-Chau Liu

Authors
  1. Yi-Jung Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Chih-Hung Yen
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Chia-Hao Hsu
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Kuo-Hui Yu
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Li-Yang Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Tsung-Han Tsai
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Wen-Chau Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Wen-Chau Liu.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Liu, YJ., Yen, CH., Hsu, CH. et al. Impact of an indium oxide/indium-tin oxide mixed structure for GaN-based light-emitting diodes. OPT REV 16, 575–577 (2009). https://doi.org/10.1007/s10043-009-0113-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10043-009-0113-5

Keywords

Search

Navigation