Abstract
A small bandwidth of periodic multilayers at wavelengths 2.4–4.4 nm presents problems for the spectral matching of mirrors. This leads to low throughput of a Schwarzschild microscope and its sensitivity to technological errors in layer thickness. We consider two cures for these difficulties: aperiodic coatings and a lateral gradient of layer thickness. Our design of aperiodic multilayers maximizes the throughput of a microscope made at a fixed level of technology. The method includes a new merit function, fast procedure for its minimization, linkage between multilayers and an equation for a lateral gradient of layer thickness. Computation is performed for Sc/Cr coatings at 398 eV. It shows that the aperiodicity makes optics stable to technological errors, while the lateral gradient increases throughput, but enhances sensitivity to the errors. The best results are obtained for aperiodic mirrors with a lateral gradient of thickness, which assure both high microscope throughput and stability to the errors.
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References
D. W. Berreman: Appl. Opt. 30 (1991) 1741.
K. Murakami, T. Oshino, H. Nakamura, M. Ohtani, and H. Nagata: Appl. Opt. 32 (1993) 7057.
M. Yamamoto, Y. Hotta, and M. Sato: Thin Solid Films 433 (2003) 224.
Y. Adachi, H. Umetsu, S. Kubota, T. Hatano, and M. Yamamoto: The 7th Int. Conf. Physics of X-Ray Multilayer Structures, Rusutsu Resort, Japan, 2004.
J. Kirz and S. R. Williams: Ultramicroscopy 47 (1992) 55.
G. Schmahl, D. Rudolph, B. Niemann, P. Guttman, J. Thieme, G. Schneider, M. Diehl, and T. Wilhein: Optik 93 (1993) 66.
D. Rudolph, G. Schmahl, B. Niemann, M. Diehl, J. Thieme, T. Wilhein, C. David, and K. Michelmann: in X-ray Microscopy IV, ed. V. V. Aristov and A. I. Erko (Bogorodskii Pechatnik, Chernogolovka, Moscow region, 1994) p. 381.
S. Nakayama, K. Haramura, G. M. Zeng, H. Daido, M. Nakatsuka, S. Nakai, N. Katakura, H. Nagata, and H. Aritome: Jpn. J. Appl. Phys. 33 (1994) L1280.
G. A. Johansson, A. Holmberg, H. M. Hertz, and M. Berlund: Rev. Sci. Instrum. 73 (2002) 1193.
A. K. Head: Proc. Phys. Soc. (London) 70 (1957) 945.
I. A. Artioukov and K. M. Krymski: Preprint of Lebedev Physical Institute N 30 (1998).
K. Sakano and M. Yamamoto: Proc. SPIE 3767 (1999) 238.
F. Eriksson, G. A. Johansson, H. M. Hertz, E. M. Gullikson, U. Kreissig, and J. Birch: Opt. Lett. 28 (2003) 2494.
J. B. Kortright and J. H. Underwood: Proc. SPIE 1343 (1990) 97.
K. D. Joensen, P. Voutov, A. Szenttgyorgyi, J. Roll, P. Gorenstein, P. Høghøj, and F. E. Christensen: Appl. Opt. 34 (1995) 7935.
A. V. Vinogradov and R. M. Fechtchenko: Nucl. Instrum. Methods Phys. Res., Sect. A 448 (2000) 142.
I. V. Kozhevnikov, I. N. Bukreeva, and E. Ziegler: Nucl. Instrum. Methods Phys. Res., Sect. A 460 (2001) 424.
D. S. Burenkov, Yu. A. Uspenskii, I. A. Artioukov, and A. V. Vinogradov: Quantum Electron. 35 (2005) 195.
Yu, A. Uspenskii, J. F. Seely, N. L. Popov, A. V. Vinogradov, Yu. P. Pershin, and V. V. Kondratenko: J. Opt. Soc. Am. A 21 (2004) 298.
M. Yamamoto and T. Namioka: Appl. Opt. 31 (1992) 1622.
B. L. Henke, E. M. Gullikson, and J. C. Davis: At. Data Nucl. Data Tables 54 (1993) 181.
I. A. Artioukov, R. M. Fechtchenko, A. L. Udovskii, Yu. A. Uspenskii, and A. V. Vinogradov: Nucl. Instrum. Methods Phys. Res., Sect. A 517 (2004) 372.
I. A. Artioukov, A. V. Vinogradov, Yu. S. Kas'yanov, and S. V. Savel'ev: Quantum Electron. 34 (2004) 691.
S. S. Andreev, H. Ch. Mertins, Yu. Yu. Platonov, N. N. Salashchenko, F. Schäfers, E. A. Shamov, and L. A. Shmaenok: Nucl. Instrum. Methods Phys. Res., Sect. A 448 (2000) 133.
I. A. Artioukov, Ye. Bugaev, O. Yu. Devizenko, R. M. Fechtchenko, Yu. S. Kasyanov, V. V. Kondratenko, S. A. Romanova, S. V. Saveliev, F. Schäfers, T. Feigl, Yu. A. Uspenskii, and A. V. Vinogradov: Proc. SPIE 5919 (2005) 59190E.
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Uspenskii, Y., Burenkov, D., Hatano, T. et al. Optimal Design of Multilayer Mirrors for Water-Window Microscope Optics. OPT REV 14, 64–73 (2007). https://doi.org/10.1007/s10043-007-0064-7
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DOI: https://doi.org/10.1007/s10043-007-0064-7