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Surface Shape Measurement by Wavelength Scanning Interferometry Using an Electronically Tuned Ti:sapphire Laser

  • OPTICAL SYSTEMS AND TECHNOLOGIES
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Abstract

We developed a high speed and high resolution surface shape measurement system based on wavelength scanning interferometry with an electronically tuned Ti:sapphire laser. This laser emits pulses and the wavelength of each pulse can be tuned arbitrarily within 680 nm and 1056 nm. We also designed a high speed multiport CCD camera as a detector. This camera is synchronized with wavelength scanning of the laser at the frequency of 250 Hz. We could measure the object shape with a height resolution of 3.05 μm at the tuning range from 740.0 nm to 842.3 nm. By simple parabolic curve fitting to the Fourier peak of interference signals from each CCD pixel, the height resolution has been improved to the order of submicrometers.

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References

  1. M. Takeda and H. Yamamoto: Appl. Opt. 34 (1994) 7829.

    Google Scholar 

  2. T. H. Barnes, T. Eiju and K. Matsuda: Optik 103 (1996) 93.

    Google Scholar 

  3. H. J. Tiziani, B. Franze and P. Haible: J. Mod. Opt. 44 (1997) 1485.

    Article  Google Scholar 

  4. M. Kinoshita, M. Takeda, H. Yago, Y. Watanabe and T. Kurokawa: Appl. Opt. 38 (1999) 7063.

    Google Scholar 

  5. S. Kuwamura and I. Yamaguchi: Appl. Opt. 36 (1996) 4473.

    Google Scholar 

  6. I. Yamaguchi, A. Yamamoto and S. Kuwamura: Appl. Opt. 37 (1998) 6721.

    Google Scholar 

  7. A. Yamamoto and I. Yamaguchi: Opt. Laser Technol. 32 (2000) 261.

    Article  Google Scholar 

  8. A. Yamamoto, I. Yamaguchi and M. Yano: Proc. SPIE 3745 (1999) 32.

  9. S. Wada, K. Akagawa and H. Tashiro: Opt. Lett. 21 (1996) 731.

    Google Scholar 

  10. J. Geng, S. Wada, Y. Urata and H. Tashiro: Opt. Lett. 24 (1999) 676.

    Google Scholar 

  11. J. Geng, S. Wada, N. Saito and H. Tashiro: Opt. Lett. 24 (1999) 1635.

    Google Scholar 

  12. J. Kato and I. Yamaguchi: Opt. Rev. 7 (2000) 158.

    Article  Google Scholar 

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Authors and Affiliations

  1. Optical Engineering Laboratory, 2-1, Hirosawa, Wako, Saitama, 351-0198, Japan

    Akihiro Yamamoto & Ichirou Yamaguchi

  2. 3DFD Development team, RIKEN (The Institute of Physical and Chemical Research), 2-1, Hirosawa, Wako, Saitama, 351-0198, Japan

    Akihiro Yamamoto, Chih-Che Kuo, Kei Sunouchi, Satoshi Wada, Ichirou Yamaguchi & Hideo Tashiro

Authors
  1. Akihiro Yamamoto
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  2. Chih-Che Kuo
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  3. Kei Sunouchi
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  4. Satoshi Wada
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  5. Ichirou Yamaguchi
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  6. Hideo Tashiro
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Correspondence to Akihiro Yamamoto.

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Yamamoto, A., Kuo, CC., Sunouchi, K. et al. Surface Shape Measurement by Wavelength Scanning Interferometry Using an Electronically Tuned Ti:sapphire Laser. OPT REV 8, 59–63 (2001). https://doi.org/10.1007/s10043-001-0059-8

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  • DOI: https://doi.org/10.1007/s10043-001-0059-8

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