Abstract
White light interferometry is a well-known measurement technique commonly used in 3D shape and roughness characterization of engineered and biological objects. In this chapter, the theoretical background of two beam interference is first given. This section highlights the basics of interference, its dependence on temporal and spatial coherence of the source, and how coherence is used in different types of measurement. Next, the basics of fringe formation is discussed, followed by a description of the most common white light interference analysis methods. Frequently used and commercially available white light interferometry systems based on microscopes with interference objectives, namely Michelson, Mirau, and Linnik, are discussed, followed by a description of setups built specially to adapt to chosen sample geometries – as large complex samples, flats or cylinders, immersed objects, and matrixes of small samples. Next is a discussion of the analysis of white light fringes used to measure special features of objects, i.e., thick and thin films, harmonically moving objects, involving surface features that are challenging to measure (dissimilar materials, complicated geometry, etc.). A special case of white light interferometric system that is combined with a spectrometer is also briefly described. Finally, common applications of white light interferometry, those where the technique is used directly or those in which the white light signal is auxiliary, are briefly described.
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References
Abdulhalim I (2001) Theory for double beam interference microscopes with coherence effects and verification using the linnik microscope. J Mod Opt 48:279–302. https://doi.org/10.1080/09500340108232458
Abdulhalim I (2006) Competence between spatial and temporal coherence in full field optical coherence tomography and interference microscopy. J Opt A Pure Appl Opt 8:952. https://doi.org/10.1088/1464-4258/8/11/004
Abdulhalim I (2012) Spatial and temporal coherence effects in interference microscopy and full-field optical coherence tomography. Ann Phys 524:787–804. https://doi.org/10.1080/09500340108232458
Ai C, Caber PJ (1994) Combination of white-light scanning and phase-shifting interferometry for surface profile measurements. US Patent US 5471303A. https://patents.google.com/patent/US5471303A/en. Accessed 20 Jun 2018
Albertazzi AG Jr, Dal Pont A (2005) Fast coherence scanning interferometry for smooth, rough and spherical surfaces. Fringe 2005:605–612
Albertazzi AG, Viotti MR, Miggiorin RM, Dal Pont A (2008) Applications of a white light interferometer for wear measurement of cylinders. Proc SPIE 7064:70640B. https://doi.org/10.1117/12.796058
Balasubramanian N (1982) Optical system for surface topography measurement. US Patent 4,340,306
Baryshev SV, Zinovev AV, Tripa CE, Erck RA, Veryovkin IV (2012) White light interferometry for quantitative surface characterization in ion sputtering experiments. Appl Surf Sci 258:6963–6968. https://doi.org/10.1016/j.apsusc.2012.03.144
Bauer W (2003) Special properties of coherence scanning interferometers for large measurement volumes. J Phys Conf Ser 311:012030. https://doi.org/10.1088/1742-6596/311/1/012030
Beverage JL, de Lega XC, Fay MF (2014) Interferometric microscope with true color imaging. SPIE Proc 9203:92030S. https://doi.org/10.1117/12.2063264
Berwal S, Srivastava V, Dubey VK, Ahmad A, Mehta DS, md. Inam (2014) High-resolution white light interferometry for quantitative phase imaging of human red blood cells using three-chip colour camera. International conference on fibre optics and photonics:M4A.6. https://doi.org/10.1364/PHOTONICS.2014.M4A.6
Bosseboeuf A, Petitgrand S (2003) Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends. J Micromech Microeng 13:S23–S33. https://doi.org/10.1088/0960-1317/13/4/304
Bouchal P, Čelechovský R, Bouchal Z (2015) Polarization sensitive phase-shifting Mirau interferometry using a liquid crystal variable retarder. Opt Lett 40:4567. https://doi.org/10.1364/OL.40.004567
Brann M, Suter JD, Addleman RS, Larimer C (2017) Monitoring bacterial biofilms with a microfluidic flow chip designed for imaging with white-light interferometry. Biomicrofluidics 11:044113. https://doi.org/10.1063/1.4985773
Brinkmann S, Bodschwinna H, Lemke H-W (2000) Development of robust Gaussian regression filter for three dimensional surface analysis. Proceedings of the 10th international colloquium on surfaces, Chemnitz, Germany
Cai Y, Dong Y, Hoenders BJ (2012) Interdependence between the temporal and spatial longitudinal and transverse degrees of partial coherence and a generalization of the van Cittert–Zernike theorem. J Opt Soc Am A 29:2542–2551. https://doi.org/10.1364/JOSAA.29.002542
Caber PJ (1993) Interferometric profiler for rough surfaces. Appl Opt 32:3438–3441. https://doi.org/10.1364/AO.32.003438
Chen D (2006) High-definition vertical-scan interferometry. US Patent US7605925B1
Chen L-C, Huang Y-T, Nguyen X-L, Chen J-L, Chang C-C (2009) Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm. Opt Laser Eng 47:237–251. https://doi.org/10.1016/j.optlaseng.2008.05.016
Creath K (1997) Sampling requirements for white light interferometry. Fringe’97 proceedings of the 3rd international workshop on automatic processing of fringe patterns, pp 52–59
Davidson M, Kaufman K, Mazor I, Cohen F (1987) An application of interference microscopy to integrated circuit inspection and metrology. Proc SPIE 0775. https://doi.org/10.1117/12.940433
Debnath SK, Kothiyal MP (2005) Optical profiler based on spectrally resolved white light interferometry. Opt Eng 44:013606. https://doi.org/10.1117/1.1828468
Debnath SK, Kothiyal MP, Schmit J, Hariharan P (2006a) Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates. Opt Express 14:4662–4667. https://doi.org/10.1364/OE.14.004662
Debnath SK, Kothiyal MP, Schmit J, Hariharan P (2006b) Spectrally resolved phase-shifting interferometry of transparent thin films: sensitivity of thickness measurements. Appl Opt 45:8636–8640. https://doi.org/10.1364/AO.45.008636
Debnath SK, You J, Kim S-W (2009) Determination of film thickness and surface profile using reflectometry and spectrally resolved phase shifting interferometry. Int J Precis Eng Manuf 10(5–10). https://doi.org/10.1007/s12541-009-0086-0
Deck L, de Groot P (1994) High-speed noncontact profiler based on scanning white-light interferometry. Appl Opt 33:7334–7338. https://doi.org/10.1364/AO.33.007334
Dong JLR (2012) Sensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometry. Appl Opt 51:5668–5675. https://doi.org/10.1364/AO.51.005668
Farr K, George N (1992) Beamsplitter cube for white light interferometry. Opt Eng 31:2191–2196. https://doi.org/10.1117/12.59886
Fay MF, Dresel T (2017) Applications of model-based transparent surface films analysis using coherence-scanning interferometry. Opt Eng 56:111709. https://doi.org/10.1117/12.2238997
Flournoy PA, McClure RW, Wyntjes G (1972) White-light interferometric thickness gauge. Appl Opt 11:1907–1915. https://doi.org/10.1364/AO.11.001907
Gao F, Coupland JM, Petzing J (2006) V-groove measurements using white light interferometry. Photon06, Manchester
Gao F, Leach RK, Petzing J, Coupland J (2008) Surface measurement errors using commercial scanning white light interferometers. Meas Sci Technol 19:015303. https://doi.org/10.1088/0957-0233/19/1/015303
Giraldez MJ, García-Resúa C, Lira M, Real Oliveira ME, Yebra-Pimentel E (2010) White light interferometry to characterize the hydrogel contact lens surface. Ophtalmic Physiol Opt 30:289–297. https://doi.org/10.1111/j.1475-1313.201000712x
Gokhler M, Rosen J (2005a) General configuration for using the longitudinal spatial coherence effect. Opt Commun 252:22–28. https://doi.org/10.1016/j.optcom.2005.04.007
Gokhler M, Rosen J (2005b) Synthesis of a multiple-peak spatial degree of coherence for imaging through absorbing media. Appl Opt 44:2921–2927. https://doi.org/10.1364/AO.44.002921
Gomez C, Su R, Thompson A, DiSciacca J, Lawes S, Leach RK (2017) Optimization of surface measurement for metal additive manufacturing using coherence scanning interferometry. Opt Eng 56:111714. https://doi.org/10.1117/1.OE.56.11.111714
de Groot P, Deck L (1993) Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms. Opt Lett 18:1462–1464. https://doi.org/10.1364/OL.18.001462
de Groot P, Deck L (1995) Surface profiling by analysis of white-light Interferograms in the spatial frequency domain. J Mod Opt 42:389–401. https://doi.org/10.1080/09500349514550341
de Groot P, de Lega XC, Kramer J, Turzhitsky M (2002) Determination of fringe order in white-light interference microscopy. Appl Opt 41:4571–4578. https://doi.org/10.1364/AO.41.004571
de Groot P, de Lega XC (2003) Valve cone measurement using white light interference microscopy in a spherical measurement geometry. Opt Eng 42:1232–1237. https://doi.org/10.1117/1.1565350
de Groot P, de Lega XC (2004) Signal modeling for low-coherence height-scanning interference microscopy. Appl Opt 43:4821–4830. https://doi.org/10.1364/AO.43.004821
de Groot P (2005) Generating fringe-free images from phase-shifted interferometry data. Appl Opt 44:7062–7069. https://doi.org/10.1364/AO.44.007062
de Groot P (2006) Stroboscopic white-light interference microscopy. Appl Opt 45:5840–5844. https://doi.org/10.1364/AO.45.005840
de Groot P, de Lega XC (2007a) Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry. Opt Lett 32:1638–1640. https://doi.org/10.1364/OL.32.001638
de Groot P, de Lega X (2007b) Triangulation methods and systems for profiling surfaces through a thin film coating. US Patent 7,292,346, 2007. https://patents.google.com/patent/US7292346B2/en. Accessed 19 Jun 2018
de Groot P (2008) Method and system for analyzing low-coherence interferometry signals for information about thin film structures. US Patent 7,321,431. https://patents.google.com/patent/US20060262321. Accessed 12 Jun 2018
de Groot P, de Lega X, Liesener J, Darwin M (2008) Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling. Opt Express 16:3970–3975. https://doi.org/10.1364/OE.16.003970
de Groot P, Biegen J (2015) A new class of wide-field objectives for 3D interference microscopy. Proc SPIE 9525:95250N. https://doi.org/10.1117/12.2183628
de Groot P (2015) Interference microscopy for surface structure analysis. In: Yoshizawa T (ed) Handbook of optical metrology principles and applications, second edition. CRC Press, Boca Raton, pp 791–828
de Groot P (2016) The meaning and measure of vertical resolution in surface metrology. 5th international conference on surface metrology, Poznań, Poland, pp 1–4
Guo T, Li F, Chen J, Fu X, Hu X (2016) Multi-wavelength phase-shifting interferometry for micro-structures measurement based on color image processing in white light interference. Opt Lasers Eng 82:41–47. https://doi.org/10.1016/j.optlaseng.2016.02.003
Han S, Novak E, Wissinger J, Guenther BW, Browne T, Yanine E, Schurig M, Herron JD, McCloy C, Li X, Krell MB, Harris J (2005) Surface profiler for fixed through-glass measurement. Proc SPIE 5716:189–197. https://doi.org/10.1117/12.597080
Hanhijärvi K, Kassamakov I, Heikkinen V, Aaltonen J, Sainiemi L, Grigoras K, Franssila S, Hæggström E (2012) Stroboscopic supercontinuum white-light interferometer for MEMS characterization. Opt Lett 37:1703–1705. https://doi.org/10.1364/OL.37.001703
Hanhijärvi K, Kassamakov I, Aaltonen J, Heikkinen V, Sainiemi L, Franssila S, Hæggström E (2013) Through-silicon stroboscopic characterization of an oscillating MEMS thermal actuator using supercontinuum interferometry. IEEE/ASME Trans Mechatron 18:1418–1420. https://doi.org/10.1109/TMECH.2012.2235080
Harasaki A, Schmit J, Wyant JC (2000) Improved vertical-scanning interferometry. Appl Opt 39:2107–2115. https://doi.org/10.1364/AO.39.002107
Harasaki A, Wyant JC (2000) Fringe modulation skewing effect in white-light vertical scanning interferometry. Appl Opt 39:2101–2106. https://doi.org/10.1364/AO.39.002101
Harasaki A, Schmit J, Wyant JC (2001) Offset of coherent envelope position due to phase change on reflection. Appl Opt 40:2102–2106. https://doi.org/10.1364/AO.40.002102
Hariharan P, Oreb BF, Eiju T (1987) Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm. Appl Opt 26:2504–2506. https://doi.org/10.1364/AO.26.002504
Hariharan P (1995) Achromatic retarders using quartz and mica. Meas Sci Technol 6:1078–1079. https://doi.org/10.1088/0957-0233/6/7/036
Hariharan P (1996) Achromatic phase-shifting for white-light interferometry. Appl Opt 35:6823–6824. https://doi.org/10.1364/AO.35.006823
Hariharan P, Roy M (1996) Interferometric surface profiling with white light: effects of surface films. J Mod Opt 43:1797–1800. https://doi.org/10.1080/09500349608232850
Haruna M, Ohmi M, Mitsuyama T, Tajiri H, Maruyama H, Hashimoto M (1998) Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry. Opt Lett 23:966–968. https://doi.org/10.1364/OL.23.000966
Häusler G, Herrmann JM (1993) Physical limits of 3D sensing. Proc SPIE 1822. https://doi.org/10.1117/12.141937
Häusler G, Neumann J (1993) Coherence radar: an accurate 3D sensor for rough surfaces. Proc SPIE 1822. https://doi.org/10.1117/12.141943
Häusler G, Lindner MW (1998) “Coherence radar” and “spectral radar”—new tools for dermatological diagnosis. J Biomed Opt 3:21–31. https://doi.org/10.1117/1.429899
Heikkinen V, Kassamakov I, Paulin T, Nolvi A, Hæggström E (2013) Stroboscopic scanning white light interferometry at 2.7 MHz with 1.6 μm coherence length using a non-phosphor LED source. Opt Express 21:5247–5254. https://doi.org/10.1364/OE.21.005247
Heikkinen V, Kassamakov I, Seppä J, Paulin T, Nolvi A, Lassila A, Hæggström E (2015) Traceable methods for vertical scale characterization of dynamic stroboscopic scanning white-light interferometer measurements. Opt Express 54:10397–10403. https://doi.org/10.1364/OE.54.010397
Helen SS, Kothiyal MP, Sirohi RS (2001) Analysis of spectrally resolved white light Interferograms: use of a phase shifting technique. Opt Eng 40:1329–1336. https://doi.org/10.1117/1.1383997
Hirabayashi A, Ogawa H, Kitagawa K (2002) Fast surface profiler by white-light interferometry by use of a new algorithm based on sampling theory. Appl Opt 41:4876–4883. https://doi.org/10.1364/AO.41.004876
Hlubina P, Luňáček J, Ciprian D, Chlebus R (2008) Dispersion error of a beam splitter cube in white-light spectral interferometry. Opto-Electron Rev 16:439–443. https://doi.org/10.2478/s11772-008-0040-1
Hu X, Deng S, Wang W, Hu X (2009) Long-working-distance Linnik microscopic interferometry for measuring the surface profile of microstructures. J Vac Sci Technol B 27:1403. https://doi.org/10.1116/1.3046154
Ikonen E, Riski K (1993) Gauge block interferometer based on one stabilised laser and a whitelight source. Metrologia 30:95–104. https://doi.org/10.1088/0026-1394/30/2/006
ISO – International Organization for Standarization (2010) ISO/CD TS 16610-31:2010, geometrical product specifications (GPS) – filtration – part 31: robust profile filters: Gaussian regression filters. https://www.iso.org/standard/42972.html. Accessed 18 Jun 2018
ISO – International Organization for Standarization (2012) ISO/DIS 25178–2:2012 geometrical product specification (GPS) – surface texture: areal – part 2 terms. Definitions and surface texture parameters. https://www.iso.org/standard/42785.html. Accessed 18 Jun 2018
Kang M-G, Lee S-Y, Kim S-W (1999) Self-compensation of PZT errors in white light scanning interferometry. J Opt Soc Korea 3:35–40
Kassamakov I (2008) Stroboscopic white light interferometry for dynamic characterization of capacitive pressure sensors. J Acoust Soc Am 123:3286. https://doi.org/10.1121/1.2933663
Kim S, Kim G (1999) Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry. Appl Opt 38:5968–5973. https://doi.org/10.1364/AO.38.005968
Kim J, Kim K, Pahk HJ (2017) Thickness measurement of a transparent thin film using phase change in white-light phase-shift interferometry. Curr Opt Photon 1:505–513
Kimborough B, Millerd J, Wyant J, Hayes J (2006) Low coherence vibration insensitive Fizeau interferometer. Proc SPIE 6292:62920F. https://doi.org/10.1117/12.682956
Kino GS, Chim SSC (1990) Mirau correlation microscope. Appl Opt 29:3775–3783. https://doi.org/10.1364/AO.29.003775
Kitagawa K (2014) Surface and thickness profile measurement of a transparent film by three-wavelength vertical scanning interferometry. Opt Lett 39:4172–4175. https://doi.org/10.1364/OL.39.004172
Koch A, Ulrich R (1990) Fiber-optic displacement sensor with 0.02 μm resolution by white-light interferometry. Sens. Actuators A Phys 201–207(1990):25. https://doi.org/10.1016/0924-4247(90)87032-E
Koudelka PD, Burge JH (2004) Fabrication of cube beamsplitter for white light interferometry. Proc SPIE 5252:17–25. https://doi.org/10.1117/12.513440
Kujawińska M, Józwik M, Styk A, Zeitner U, Royset A, Beer S, Moosburger R, Gorecki C, Gastinger K (2010) Design, technology and signal processing for DOE-based microinterferometer array applied in new generation M(O)EMS test equipment. Proc SPIE 7791:779103–779101. https://doi.org/10.1117/12.862170
Küchel MF (2004) Zygo’s new method to reduce intrinsic noise in interferometers. https://www.zygo.com/library/papers/optatec2004.pdf. Accessed 13 Jun 2018
Larkin KG (1996a) Efficient nonlinear algorithm for envelope detection in white light interferometry. JOSA 13:832–843. https://doi.org/10.1364/JOSAA.13.000832
Larkin KG (1996b) Efficient demodulator for bandpass sampled AM signals. Electron Lett 32:101–102. https://doi.org/10.1049/el:19960081
Lee BS, Strand TC (1990) Profilometry with a coherence scanning microscope. Appl Opt 29:3784–3788. https://doi.org/10.1364/AO.29.003784
de Lega XC, de Groot P (2008a) Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler. Proc SPIE 6995:69950P. https://doi.org/10.1117/12.782836
de Lega XC, de Groot P (2008b) Transparent film profiling and analysis by interference microscopy. Proc SPIE 7064:70640I. https://doi.org/10.1117/12.794936
Lehmann P (2003) Optical versus tactile geometry measurement – alternatives or counterparts. Proc SPIE 5144:183–196. https://doi.org/10.1117/12.508360
Li Y, Kästner M, Reithmeier E (2017) Vibration-insensitive low coherence interferometer (LCI) for the measurement of technical surfaces. Measurement 104:36–42. https://doi.org/10.1016/j.optlaseng.2016.02.003
Lindner MW (2002) White-light interferometry via an endoscope. Proc SPIE 4777. https://doi.org/10.1117/12.472208
Lindner M, Thominet V (2005) Optical measuring device. US Patent US 6970253 2005. https://patents.google.com/patent/US6970253. Accessed 20 Jun 2018
Linnik VP (1933) Ein apparat fur mikroskopisch-interferometrische untersuchung reflektierender objekte (mikrointerferometer). Akademiya Nauk SSSR Doklady 21:18–23
Liżewski K, Tomczewski S, Kozacki T, Kostencka J (2014) High-precision topography measurement through accurate in-focus plane detection with hybrid digital holographic microscope and white light interferometer module. Appl Opt 53:2446–2454. https://doi.org/10.1364/AO.53.002446
Lyakin DV, Ryabukho VP (2013) Longitudinal correlation properties of an optical field with broad angular and frequency spectra and their manifestation in interference microscopy. Quantum Electron 43:949. https://doi.org/10.1070/QE2013v043n10ABEH015187
Lyulko OV, Randers-Pehrson G, Brenner DJ (2013) Simultaneous immersion Mirau interferometry. Rev Sci Instrum 84:053701. https://doi.org/10.1063/1.4803181
Ma S, Quan C, Zhu R, Tay CJ, Chen L (2011) Surface profile measurement in white-light scanning interferometry using a three-chip color CCD. Appl Opt 50:2246–2254. https://doi.org/10.1364/AO.50.002246
Machleidt T, Kollhoff D, Dathe O, Kapusi O, Nestler R, Franke K-H (2012) Application of color cameras for 3D surface measurements with white light interferometers. 14th SpectroNet collaboration forum AM in Jena
Malacara D (2007) Optical shop testing, 3rd edn. Wiley, Hoboken
Mansfield D (2006) The distorted helix: thin film extraction from scanning white light interferometry. Proc SPIE 6186:61860O. https://doi.org/10.1117/12.664036
Mandel L, Wolf E (1995) Optical coherence and quantum optics, 1st edn. Cambridge University Press, Cambridge
Mirau AH (1949) Interferometer. US Patent 2,612,074. https://patents.google.com/patent/US2612074. Accessed 12 Jun 2018
Mun JI, Jo T, Kim T, Pahk HJ (2015) Residual vibration reduction of white-light scanning interferometry by input shaping. Opt Express 23:464–470. https://doi.org/10.1364/OE.23.000464
Muralikrishnan B, Raja J (2009) Computational surface and roundness metrology. Springer-Verlag, London
Niehues J, Lehmann P, Xie W (2012) Low coherent Linnik interferometer optimized for use in nano-measuring machines. Meas Sci Technol 23:125002. https://doi.org/10.1088/0957-0233/23/12/125002
Novotny S, Durairaj V, Shavrin I, Lipiäinen L, Kokkonen K, Kaivola M, Ludvigsen H (2014) Picosecond supercontinuum light source for stroboscopic white-light interferometry with freely adjustable pulse repetition rate. Opt Express 22:13625–13633. https://doi.org/10.1364/OE.22.013625
Olszak A, Schmit J (2003) High-stability white-light interferometry with reference signal for real-time correction of scanning errors. Opt Eng 42:54–59. https://doi.org/10.1117/1.1523942
Palmer JM (1993) Getting intense about intensity. Metrologia 30:371–372. https://doi.org/10.1088/0026-1394/30/4/030
Park M-C, Kim S-W (2001) Compensation of phase change on reflection in white-light interferometry for step height measurement. Opt Lett 26:420–422. https://doi.org/10.1364/OL.26.000420
Pavliček P, Soubusta J (2003) Theoretical measurement uncertainty of white-light interferometry on rough surfaces. Appl Opt 42:1809–1813. https://doi.org/10.1364/AO.42.001809
Pavliček P, Soubusta J (2004) Measurement of the influence of dispersion on white-light interferometry. Appl Opt 43:766–770. https://doi.org/10.1364/AO.43.000766
Pavliček P, Halouzka M, Duan Z, Takeda M (2009) Spatial coherence profilometry on tilted surfaces. Appl Opt 48:H40–H47. https://doi.org/10.1364/AO.48.000H40
Petitgrand S, Yahiaoui R, Danaie K, Bosseboeuf A, Gilles J (2001) 3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope. Opt Laser Eng 36:77–101. https://doi.org/10.1016/S0143-8166(01)00040-9
Pfärtner A, Schwider J (2001) Dispersion error in white-light Linnik interferometers and its applications for evaluation procedures. Appl Opt 40(34):6223–6228. https://doi.org/10.1364/AO.40.006223
Pförtner A, Schwider J (2003) Red-green-blue interferometer for the metrology of discontinuous structures. Appl Opt 42:667–673. https://doi.org/10.1364/AO.42.000667
Rao Y-J, Jackson DA (1996) Recent progress in fibre optic low-coherence interferometry. Meas Sci Technol 7:981–999. https://doi.org/10.1088/0957-0233/7/7/001
Recknagel R, Notni G (1998) Analysis of white light interferograms using wavelet methods. Opt Commun 148:122–128. https://doi.org/10.1016/S0030-4018(97)00644-5
Reolon D, Jacquot M, Verrier I, Brun G, Veillas C (2006) Broadband supercontinuum interferometer for high-resolution profilometry. Opt Express 14:128–137. https://doi.org/10.1364/OPEX.14.000128
Rhee H-G, Lee Y-W, Vorburger TV, Reneger TB (2006) Surface topography measurement and analysis for bullet and casing signature identification. Korean J Opt Photon 17:47–53. https://doi.org/10.3807/KJOP.2006.17.1.047
Rosen J, Takeda M (2000) Longitudinal spatial coherence applied for surface profilometry. Appl Opt 39:4107–4111. https://doi.org/10.1364/AO.39.004107
Roy M, Cooper I, Moore P, Sheppard CJR, Hariharan P (2005) White-light interference microscopy: effects of multiple reflections within a surface film. Opt Express 13:164–170. https://doi.org/10.1364/OPEX.13.000164
Ryabukho V, Lyakin D, Lobachev M (2004) Influence of longitudinal spatial coherence on the signal of a scanning interferometer. Opt Lett 29:667–669. https://doi.org/10.1364/OL.29.000667
Safrani A, Abdulhalim I (2011) Spatial coherence effect on layer thickness determination in narrowband full-field optical coherence tomography. Appl Opt 50:3021–3027. https://doi.org/10.1364/AO.50.003021
Safrani A, Abdulhalim I (2012) Ultrahigh-resolution full-field optical coherence tomography using spatial coherence gating and quasi-monochromatic illumination. Opt Lett 37:458–460. https://doi.org/10.1364/OL.37.000458
Saleh BEA, Teich MC (2007) Fundamentals of photonics, 2nd edn. Wiley, Hoboken
Salsbury C, Olszak A (2017) Spectrally controlled interferometry. Appl Opt 56:7781–7788. https://doi.org/10.1364/AO.56.007781
Sandoz P, Tribillon G, Perrin H (1996) High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light Interferograms. J Mod Opt 43:701–708. https://doi.org/10.1080/09500349608232777
Sandoz P (1997) Wavelet transform as a processing tool in white-light interferometry. Opt Lett 22:1065–1067. https://doi.org/10.1364/OL.22.001065
Schmit J, Olszak A (2002) High-precision shape measurement by white-light interferometry with real-time scanner error correction. Appl Opt 41:5943–5950. https://doi.org/10.1364/AO.41.005943
Schmit J (2003) High speed measurements using optical profiler. Proc SPIE 5144:46–56. https://doi.org/10.1117/12.501035
Schmit J, Unruh P, Tavrov AV, Kerwien N, Osten W, Tiziani H (2003) Coherence effects in narrow trench measurements using white light interferometry. Frontiers in Optics, OSA Technical Digest, MT41. https://doi.org/10.1364/FIO.2003.MT41
Schmit J, Hariharan P (2007) Improved polarization Mirau interference microscope. Opt Eng 46:077007. https://doi.org/10.1117/1.2751166
Schmit J, Han S, Novak E (2009) Ball bearing measurement with white light interferometry. Proc SPIE 7389:73890P. https://doi.org/10.1117/12.828113
Schmit J (2013) White-light interference 3D microscopes. In: Harding K (ed) Handbook of optical dimensional metrology. Taylor & Francis, Boca Raton, pp 395–418
Schmit J, Novak M, Bui S (2015) 3D interferometric microscope: color visualization of engineered surfaces for industrial applications. Proc SPIE 9576:957607. https://doi.org/10.1117/12.2190352
Schmit J (2015) 3D white light interference microscope with specialized illumination for better sample imaging and observation. In: Jabłoński R, Brezina T (eds) Advanced mechatronics solutions. Springer, Cham, pp 553–558
Schreiber H, Bruning JH (2007) Phase shifting interferometry. Ch. In: Malacara D (ed) Optical shop testing., 3rd edn, vol 14. Wiley, Hoboken, pp 547–666
Schulz LG (1951) The effect of phase changes in white light interferometry. J Opt Soc Am 41:261–264. https://doi.org/10.1364/JOSA.41.000261
Schwider J, Burow R, Elssner K-E, Grzanna J, Spolarczyk R, Merkel K (1983) Digital wave-front measuring interferometry: some systematic error sources. Appl Opt 22:3421–3432. https://doi.org/10.1364/AO.22.003421
Schwider J, Zhou L (1994) Dispersive interferometric profilometer. Opt Lett 19:995–997. https://doi.org/10.1364/OL.19.000995
Shavrin I, Lipiäinen L, Kokkonen K, Novotny S, Kaivola M, Ludvigsen H (2013) Stroboscopic white-light interferometry of vibrating microstructures. Opt Express 21:16901–16907. https://doi.org/10.1364/OE.21.016901
Stout KJ (ed) (2000) Development of methods for the characterisation of roughness in three dimension. Penton Press, London
Styk A, Lambelet P, Royset A, Kujawińska M, Gastinger K (2010) Smart pixel camera based singnal processing in an interferometric test stadion for massive paralel inspection of MEMS and MOEMS. Proc SPIE 7387:73870M-1/10. https://doi.org/10.1117/12.871522
Sun C, Yu L, Sun Y, Yu Q (2005) Scanning white-light interferometer for measurement of the thickness of a transparent oil film on water. Appl Opt 44:5202–5205. https://doi.org/10.1364/AO.44.005202
Takeda M, Yamamoto H (1994) Fourier-transform speckle Profilometry: three-dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces. Appl Opt 33:7829–7837. https://doi.org/10.1364/AO.33.007829
Tapilouw AM, Chen LC, Jen YJ, Lin ST, Yeh SL (2013) Orthogonal polarization Mirau interferometer using reflective-type waveplate. Opt Lett 38:2502–2504. https://doi.org/10.1364/OL.38.002502
Tavrov A, Schmit J, Kerwien N, Osten W, Tiziani H (2005) Diffraction-induced coherence levels. Appl Opt 44:2202–2212. https://doi.org/10.1364/AO.44.002202
Tereschenko S, Lehmann P, Zellmer L, Brueckner-Foit A (2016) Passive vibration compensation in scanning white-light interferometry. Appl Opt 55:6172–6182. https://doi.org/10.1364/AO.55.006172
Tomczewski S, Pakuła A, Van Erps J, Thienpont H, Sałbut L (2013) Low-coherence interferometry with polynomial interpolation on compute unified device architecture-enabled graphics processing units. Opt Eng 52:094105. https://doi.org/10.1117/1.OE.52.9.094105
Upputuri PK, Gong L, Wang H, Pramanik M, Mohan Nandigana K, Kothiyal MP (2014) Measurement of large discontinuities using single white light interferogram. Opt Express 22:27373–27380. https://doi.org/10.1364/OE.22.027373
Wan DS (2009) Measurement of thin films using Fourier amplitude. US Patent 7,612,891. https://patents.google.com/patent/US7612891B2/en. Accessed 12 Jun 2018
Wang W, Kozaki H, Rosen J, Takeda M (2002) Synthesis of longitudinal coherence functions by spatial modulation of an extended light source: a new interpretation and experimental verifications. Appl Opt 41:1962–1971. https://doi.org/10.1364/AO.41.001962
Wang D, Liang R (2016) Simultaneous polarization Mirau interferometer based on pixelated polarization camera. Opt Lett 41:41–44. https://doi.org/10.1364/OL.41.000041
Wiersma JT, Wyant JC (2013) Vibration insensitive extended range interference microscopy. Appl Opt 52:5957–5961. https://doi.org/10.1364/AO.52.005957
Wiesner B, Hybl O, Häusler G (2012) Improved white-light interferometry on rough surfaces by statistically independent speckle patterns. Appl Opt 51:751–757. https://doi.org/10.1364/AO.51.000751
Wyant JC, Schmit J (1998) Large field of view, high spatial resolution, surface measurements. Int J Mach Tools Manufact 38:691–698
Xu Z, Shilpiekandula V, Youceftoumi K, Yoon SF (2009) White-light scanning interferometer for absolute nano-scale gap thickness measurement. Opt Express 17:15104–15117. https://doi.org/10.1364/OE.17.015104
Yamada R., Itoh M, Tian RL, Tsai M, Yatagai T (1994) Broad-band light-wave correlation topography using wavelet transform. Technical abstract, ICO topical meeting, Kyoto
Yatagai T (1994) Recent progress in white light interferometry. Proc SPIE 2340:338–345. https://doi.org/10.1117/12.195930
Yoshino H, Abbas A, Kaminski PM, Smith R, Walls JM, Mansfield D (2017) Measurement of thin film interfacial surface roughness by coherence scanning interferometry. J Appl Phys 121:105303. https://doi.org/10.1063/1.4978066
Zuluaga AF, Richards-Kortum R (1999) Spatially resolved spectral interferometry for determination of subsurface structure. Opt Lett 24:519–521. https://doi.org/10.1364/OL.24.000519
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Schmit, J., Pakuła, A. (2018). White Light Interferometry. In: Ida, N., Meyendorf, N. (eds) Handbook of Advanced Non-Destructive Evaluation. Springer, Cham. https://doi.org/10.1007/978-3-319-30050-4_42-1
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