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Microstructure and infrared reflectance modulation properties in DC-sputtered tungsten oxide films

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Abstract

Tungsten oxide (WO3) films were deposited on indium tin oxide glass by reactive DC magnetron sputtering of a tungsten target in an oxygen and argon atmosphere at different substrate temperatures. Infrared reflectance modulation properties of the films were investigated in the wavelength range of 2.5–25 μm. The morphology and structure of the films are strongly dependent on the substrate temperature, and therefore have a great influence on infrared reflectance modulation properties. The charge capacity and diffusion coefficient of H+ ions in WO3 films decrease, and the infrared reflectance modulation and color efficiency first increase and then decrease with increasing the deposition temperature. The values achieve a maximum of 40% and 18.5 cm2 C−1, respectively, at 9 μm and 250 °C.

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References

  1. Deb SK (1969) Appl Opt Suppl 3:192–195

    Google Scholar 

  2. Deb SK (2008) Sol Energy Mater Sol Cells 92:245–258

    Article  CAS  Google Scholar 

  3. Zhang J, Tu JP, Xia XH, Qiao Y, Lu Y (2009) Sol Energy Mater Sol Cells 93:1840–1845

    Article  CAS  Google Scholar 

  4. Zhang J, Wang XL, Xia XH, Gu CD, Zhao ZJ, Tu JP (2010) Electrochim Acta 55:6953–6958

    Article  CAS  Google Scholar 

  5. Xia XH, Tu JP, Zhang J, Xiang JY, Wang XL, Zhao XB (2010) ACS Appl Mater Interfaces 2:186–192

    Article  CAS  Google Scholar 

  6. Patil PS (2001) J Solid State Electrochem 6:284–287

    Google Scholar 

  7. Lampert CM (2004) Mater Today 7:28–35

    Article  CAS  Google Scholar 

  8. Moller MT, Asaftei S, Corr D, Ryan M, Walder L (2004) Adv Mater 16:1558–1562

    Article  Google Scholar 

  9. Granqvist CG (1995) Handbook of inorganic electrochromic materials. Elsevier, Amsterdam

    Google Scholar 

  10. Granqvist CG (2008) Sol Energy Mater Sol Cells 92:203–208

    Article  CAS  Google Scholar 

  11. Xia XH, Tu JP, Zhang J, Wang XL, Zhang WK, Huang H (2008) Nanotechnology 19:465701

    Article  CAS  Google Scholar 

  12. Bueno PR, Gabrielli C, Perrot H (2008) Electrochim Acta 53:5533–5539

    Article  CAS  Google Scholar 

  13. Lusis A, Kleperis J, Pentjuss E (2002) J Solid State Electrochem 7:106–112

    Google Scholar 

  14. Hale JS, Woollam JA (1999) Thin Solid Films 339:174–180

    Article  CAS  Google Scholar 

  15. Franke EB, Trimble CL, Schubert M, Woollam JA, Hale JS (2000) Appl Phys Lett 77:930–932

    Article  CAS  Google Scholar 

  16. Acosta M, Gonzalez D, Riech I (2009) Thin Solid Films 517:5442–5445

    Article  CAS  Google Scholar 

  17. Sato R, Kawamura N, Tokumaru H (2008) Appl Surf Sci 254:7676–7678

    Article  CAS  Google Scholar 

  18. Hutchins MG, Butt NS, Topping AJ, Gallego J, Milne P, Jeffrey D, Brotherston I (2001) Electrochim Acta 46:1983–1988

    Article  CAS  Google Scholar 

  19. Lin SH, Chen FR, Kai JJ (2008) Appl Surf Sci 254:3357–3363

    Article  CAS  Google Scholar 

  20. Xia XH, Tu JP, Zhang J, Huang XH, Wang XL, Zhao XB (2010) Sol Energy Mater Sol Cells 94:386–389

    Article  CAS  Google Scholar 

  21. Bergeron BV, White KC, Boehme JL, Gelb AH, Joshi PB (2008) J Phys Chem C 112:832–838

    Article  CAS  Google Scholar 

  22. Sauvet K, Rougier A, Sauques L (2008) Sol Energy Mater Sol Cells 92:209–215

    Article  CAS  Google Scholar 

  23. Deepa M, Srivastava AK, Sharma SN, Govind, Shivaprasad SM (2008) Appl Surf Sci 254:2342–2352

    Article  CAS  Google Scholar 

  24. Ozkan E, Lee SH, Tracy CE, Pitts JR, Deb SK (2003) Sol Energy Mater Sol Cells 79:439–448

    Article  CAS  Google Scholar 

  25. Liao CC, Chen FR, Kai JJ (2007) Sol Energy Mater Sol Cells 91:1258–1266

    Article  CAS  Google Scholar 

  26. Hechavarria L, Hu H, Miranda M, Nicho ME (2009) J Solid State Electrochem 13:687–695

    Article  CAS  Google Scholar 

  27. Bathe SR, Patil PS (2008) Solid State Ionics 179:314–323

    Article  CAS  Google Scholar 

  28. Deepa M, Kar M, Agnihotry SA (2004) Thin Solid Films 468:32–42

    Article  CAS  Google Scholar 

  29. Zayim EO, Liu P, Lee SH, Tracy CE, Turner JA, Pitts JR, Deb SK (2003) Solid State Ionics 165:65–72

    Article  Google Scholar 

  30. Guéry C, Choquet C, Dujeancourt F, Tarascon JM, Lassègues JC (1997) J Solid State Electrochem 1:199–207

    Article  Google Scholar 

  31. Leftheriotis G, Papaefthimiou S, Yianoulis P (2004) Sol Energy Mater Sol Cells 83:115–124

    Article  CAS  Google Scholar 

  32. Lee DH, Vuong KD, Condrate RA Sr, Wang XW (1996) Mater Lett 28:179–182

    Article  CAS  Google Scholar 

  33. Shigesato Y, Hayashi Y, Masui A, Haranou T (1991) Jpn J Appl Phys 30:814–819

    Article  CAS  Google Scholar 

  34. Larsson AL, Solis J, Niklasson GA (2007) Sol Energy Mater Sol Cells 91:1248–1252

    Article  CAS  Google Scholar 

  35. Larsson AL, Niklasson GA (2004) Mater Lett 58:2517–2520

    Article  CAS  Google Scholar 

  36. Lethy KJ, Panda S, Beena D, Vinodkumar R, Sathe V, Pillai VPM (2009) J Phys D Appl Phys 42:185407

    Article  Google Scholar 

  37. Shigesato Y (1991) J Appl Phys 30:1457–1462

    Article  CAS  Google Scholar 

  38. Leftheriotis G, Papaefthimiou S, Yianoulis P (2007) Solid State Ionics 178:259–263

    Article  CAS  Google Scholar 

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Acknowledgement

This work was supported by Zhejiang University K.P. Chao’s High Technology Development Foundation (grant no. 2008ZD001).

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Authors and Affiliations

  1. State Key Laboratory of Silicon Materials and Department of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China

    Jun Zhang, Xiu-li Wang, Xin-hui Xia & Jiang-ping Tu

  2. Key Laboratory of Infrared and Low Temperature Plasma of Anhui Province, Hefei Electronic Engineering Institute, Hefei, 230037, China

    Yuan Lu & Ya Qiao

Authors
  1. Jun Zhang
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  2. Xiu-li Wang
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  3. Yuan Lu
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  4. Ya Qiao
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  5. Xin-hui Xia
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  6. Jiang-ping Tu
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Correspondence to Xiu-li Wang or Jiang-ping Tu.

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Zhang, J., Wang, Xl., Lu, Y. et al. Microstructure and infrared reflectance modulation properties in DC-sputtered tungsten oxide films. J Solid State Electrochem 15, 2213–2219 (2011). https://doi.org/10.1007/s10008-010-1224-4

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  • DOI: https://doi.org/10.1007/s10008-010-1224-4

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