Abstract
The prediction and characterization of multilength-scale tribological phenomena is challenging, yet essential for the advancement of micro- and nanomachine technology. Here, we consider theoretical underpinnings of multiasperity friction, review various approaches to measure micro- and nanoscale friction and discuss the effect of monolayer coatings to reduce friction and wear. We then overview a theoretical framework known as rate-and-state friction (GlossaryTerm
RSF
), in which friction is considered to be a continuous function of velocity and interface state. A microscale test platform that is used to measure friction over multiple decades of velocity and normal load is presented and results are reported. Using the RSF framework, we quantitatively predict and validate the transition from stick-slip to steady sliding, enabling the creation of a microscale kinetic phase diagram. Next, we take a brief look at continued progress in spinning micromachine motor technology. Finally, we discuss wear- and tribopolymer-related phenomena in micro- and nanoswitches, which are promising devices to complement transistors due to their low on resistance and steep subthreshold swing. We anticipate great progress towards reliable, contacting micro- and nanomachines by linking theory and experiment to nano- and microscale tribological phenomena and by improving the testing, materials and processing methods used to characterize these phenomena.Access this chapter
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Acknowledgements
This work was partially supported by NSF CMMI Grants 1030322, 1030278 and 1334572. SSS was supported by the NSF Graduate Research Fellowship Program. Many of the MEMS devices discussed were fabricated by Sandia National Laboratories, Albuquerque, NM, USA. Certain commercial equipment, instruments, or materials are identified in this chapter in order to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the materials or equipment identified are necessarily the best available for the purpose.
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de Boer, M.P., Shroff, S.S., DelRio, F.W., Ashurst, W.R. (2017). Friction and Wear in Micro- and Nanomachines. In: Bhushan, B. (eds) Springer Handbook of Nanotechnology. Springer Handbooks. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-54357-3_39
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