Abstract
Multiphase jet machining (MJM) is a recently developed surface texturing method based on which a mixture of abrasives and water is accelerated by compressed air to remove material from substrates. Considering the high divergence of the jet, masks are needed for MJM to obtain the desired features and dimensions. To investigate the pattern transfer accuracy, masks were prepared from a 304 stainless steel sheet using laser machining. The fundamental parameters of MJM as well as the effects of the mask opening width and thickness on the processing of the structures were studied and experimentally optimized. The use of wax to fix the mask on the substrate is proposed to avoid the frosted area around the machining structures. Overall, the optimized process MJM parameters can be used to fabricate various surface textures with the desired accuracy and dimensions.
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References
Wang XL, Adachi K, Otsuka K, Kato K (2006) Optimization of the surface texture for silicon carbide sliding in water. Appl Surf Sci 253(3):1282–1286
Shi LP, Wang XY, Su X, Wei H, Wang XL (2015) Comparison of the performances of mechanical gas seals textured with micro-grooves and micro-dimples. J Tribol 138(2):88–90
Wang XY, Shi LP, Dai QW, Huang W, Wang XL (2018) Multi-objective optimization on dimple shapes for gas face seals. Tribol Int 123:216–223
Etsion I (2005) State of the art in laser surface texturing. Trans ASME J Tribol 127(1):761–762
Coblas DG, Fatu A, Maoui A, Hajjam M (2015) Manufacturing textured surfaces: State of art and recent developments. Proc IME J J Eng Tribol 229(1):3–29
Qian SQ, Zhu D, Qu NS, Li HS, Yan DS (2010) Generating micro-dimples array on the hard chrome-coated surface by modified through mask electrochemical micromachining. Int J Adv Manuf Technol 47(9-12):1121–1127
Wu X, Li L, He N (2017) Investigation on the burr formation mechanism in micro cutting. Precis Eng 47:191–196
Chae J, Park SS, Freiheit T (2006) Investigation of micro-cutting operations. Int J Mach Tool Manu 46(3):313–332
Zhang T, Liu ZQ, Xu CH (2013) Influence of size effect on burr formation in micro cutting. Int J Adv Manuf Technol 68(9-12):1911–1917
Belloy E, Thurre S, Walckiers E, Sayah A, Gijs MAM (2000) The introduction of powder blasting for sensor and microsystem applications. Sensors Actuators A Phys 84(3):330–337
Haghbin N, Spelt JK, Papini M (2015) Abrasive waterjet micro-machining of channels in metals: comparison between machining in air and submerged in water. Int J Mach Tool Manu 88:108–117
Park DS, Cho MW, Lee H, Cho WS (2004) Micro-grooving of glass using micro-abrasive jet machining. J Mater Process Technol 146(2):234–240
Haghbin N, Ahmadzadeh F, Papini M (2018) Masked micro-channel machining in aluminum alloy and borosilicate glass using abrasive water jet micro-machining. J Manuf Process 35:307–316
Wang FC, Xu QW, Feng DC, Guo CW (2017) Experiment study on performance of abrasive slurry jet with or without high polymer in stainless steel machining. Int J Adv Manuf Technol 95(1):1–8
Tsai FC, Yan BH, Kuan CY, Huang FY (2008) A Taguchi and experimental investigation into the optimal processing conditions for the abrasive jet polishing of SKD61 mold steel. Int J Mach Tool Manu 48(7):932–945
Sobczak R, Prazmo J, Perec A, Chmielik I (2016) Dust free surface treatment parameters of the three-phase jet, generated in the sandbot device. MM Sci J 01:872–876
Su X, Shi LP, Huang W, Wang XL (2016) A multi-phase micro-abrasive jet machining technique for the surface texturing of mechanical seals. Int J Adv Manuf Technol 86(5-8):1–8
Shi LP, Fang Y, Dai QW, Huang W, Wang XL (2017) Surface texturing on SiC by multiphase jet machining with microdiamond abrasives. Mater Manuf Process 33(13):1415–1421
Miller DS (2004) Micromachining with abrasive waterjets. J Mater Process Technol 149(1):37–42
Papini M, Ciampini D, Krajac T, Spelt JK (2003) Computer modelling of interference effects in erosion testing: effect of plume shape. Wear 255(1):85–97
Haghbin N, Ahmadzadeh F, Spelt JK, Papini M (2016) High pressure abrasive slurry jet micro-machining using slurry entrainment. Int J Adv Manuf Technol 84(5-8):1031–1043
Zhang L, Kuriyagawa T, Yasutomi U, Zhao J (2005) Investigation into micro abrasive intermittent jet machining. Int J Mach Tool Manu 45(7-8):873–879
Wensink H, Jansen HV, Berenschot JW, Elwenspoek MC (2000) Mask materials for powder blasting. J Micromech Microeng 10(2):175–180
Saragih AS, Ko TJ (2009) A thick SU-8 mask for microabrasive jet machining on glass. Int J Adv Manuf Technol 41(7-8):734–740
Ghobeity A, Krajac T, Burzynski T, Papini M, Spelt JK (2008) Surface evolution models in abrasive jet micromachining. Wear 264(3):185–198
Nouhi A, Lari MRS, Spelt JK, Papini M (2015) Implementation of a shadow mask for direct writing in abrasive jet micro-machining. J Mater Process Technol 223:232–239
Ghobeity A, Papini M, Spelt JK (2009) An analytical model of the effect of particle size distribution on the surface profile evolution in abrasive jet micromachining. J Mater Process Technol 209(20):6067–6077
Wensink H, Elwenspoek MC (2002) Reduction of sidewall inclination and blast lag of powder blasted channels. Sensors and Actuators a-Physical 102(1-2):157–164
Matsumura T, Muramatsu T, Fueki S (2011) Abrasive water jet machining of glass with stagnation effect. CIRP Ann Manuf Technol 60(1):355–358
Acknowledgments
The authors gratefully acknowledge Mr. Chen for his help in providing the instrument-aided measurement.
Funding
This work was financially supported by the National Natural Science Foundation of China (No. 51675268 and 51805252) and China Postdoctoral Science Foundation (No. 2019 M651822).
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Hu, Y., Dai, Q., Huang, W. et al. Accuracy of the pattern transfer from the metal mask to the workpiece surface during multiphase jet machining. Int J Adv Manuf Technol 106, 1355–1364 (2020). https://doi.org/10.1007/s00170-019-04607-z
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DOI: https://doi.org/10.1007/s00170-019-04607-z