Abstract
Flow separation is a critical aerodynamic phenomenon impacting flight envelope of various flying objects. Its efficient detection and subsequent control are vital for enhanced manoeuvring, better fuel economy, superior flight controls, and even for the survival of small air vehicles such as MAVs and UAVs. Over the past 3 decades, MEMS technology has enabled a paradigm shift from macro-level conventional sensing techniques to micro-scale sensors. Critical aerodynamics phenomenon such as flow separation, boundary-layer transitioning, shock, local flow and vortex dynamics, etc. can now be captured with better spatial as well as temporal resolution. Analysis spectrum has also been stretched by compensating the limitations of conventional techniques. This review paper is focused on the use of MEMS technology in the field of flow separation detection. We first briefly introduce the flow separation phenomenon and the limitations of conventional sensing techniques. Then, the application of MEMS to flow separation detection will be discussed in detail with emphasis on the prominent research work and performance review of various MEMS sensors employed in recent past.
Similar content being viewed by others
Data availability
Data sharing is not applicable to this article as no new data were created or analyzed in this study.
References
Aleman MA, Saini A, Gopalarathnam A (2017) Airfoil flow-separation and stall detection using surface-mounted pitot tubes. In: 35th AIAA Appl. Aerodyn. Conf., pp 1–11. https://doi.org/10.2514/6.2017-3749
Anderson Jr. JD (1988) Introduction to flight, Third, Mcgraw-Hill College, 1988. https://www.goodreads.com/book/show/2715037-introduction-to-flight accessed 14 Jan 2021
Anderson Jr. JD (2021) Fundamentals of aerodynamics, Five, McGraw-Hill Education, 2010. https://www.amazon.com/Fundamentals-Aerodynamics-John-Anderson-Jr/dp/0073398101 accessed 14 Jan2021
Barlian AA, Park SJ, Mukundan V, Pruitt BL (2007) Design and characterization of microfabricated piezoresistive floating element-based shear stress sensors. Sens Actuat A Phys 134:77–87. https://doi.org/10.1016/j.sna.2006.04.035
Barth PW, Bernard SL, Angell JB (1985) Flexible circuit and sensor arrays fabricated by monolithic silicon technology. IEEE Trans Electron Dev 32:1202–1205. https://doi.org/10.1109/T-ED.1985.22101
Beebe DJ, Denton DD (1994) A flexible polyimide-based package for silicon sensors. Sens Actuat A Phys 44:57–64. https://doi.org/10.1016/0924-4247(93)00775-Y
Bekey GA (2005) Autonomous robots: from biological inspiration to implementation and control. MIT Press, Cambridge
Bellhouse BJ, Schultz DL (1966) Determination of mean and dynamic skin friction, separation and transition in low-speed flow with a thin-film heated element. J Fluid Mech 24:379–400. https://doi.org/10.1017/S0022112066000715
Bin-Lee G, Huang A, Ho CM, Jiang F, Grosjean C, Tai YC (2000) Sensing and control of aerodynamic separation by MEMS. J Mech 16:45–52. https://doi.org/10.1017/S1727719100001763
Buchner R, Sosna C, Maiwald M, Benecke W, Lang W (2006) A high-temperature thermopile fabrication process for thermal flow sensors. Sens Actuat A Phys 130–131:262–266. https://doi.org/10.1016/j.sna.2006.02.009
Buchner R, Froehner K, Sosna C, Benecke W, Lang W (2008) Toward flexible thermoelectric flow sensors: a new technological approach. J Microelectromech Syst 17:1114–1119. https://doi.org/10.1109/JMEMS.2008.926143
Buder U, Berns A, Obermeier E, Petz R, Nitsche W (2005) AeroMEMS wall hot-wire anemometer on polyimide foil for measurement of high frequency fluctuations. Proc IEEE Sens 2005:545–548. https://doi.org/10.1109/ICSENS.2005.1597756
Buder U, Petz R, Kittel M, Nitsche W, Obermeier E (2008) AeroMEMS polyimide based wall double hot-wire sensors for flow separation detection. Sens Actuat A Phys 142:130–137. https://doi.org/10.1016/j.sna.2007.04.058
Chandrasekharan V, Sells J, Meloy J, Arnold DP, Sheplak M (2011) A microscale differential capacitive direct wall-shear-stress sensor. J Microelectromech Syst 20:622–635. https://doi.org/10.1109/JMEMS.2011.2140356
Ch-Brucker WS, Spatz J (2005) Feasability study of wall shear stress imaging using microstructured surfaces with flexible micropillars. Exp Fluids 39:464–474
Chengyu J, Jinjun D, Binghe M, Weizheng Y (2012) Advanced flow measurement and active flow control of aircraft with MEMS. Eng Sci 10:26–32
Corke TC, Bowles PO, He C, Matlis EH (2011) Sensing and control of flow separation using plasma actuators. Philos Trans R Soc A Math Phys Eng Sci 369:1459–1475. https://doi.org/10.1098/rsta.2010.0356
Dickinson B, Singler J, Batten B (2008) The detection of unsteady flow separation with bioinspired hair cell sensors. In: 26th AIAA Aerodyn. Meas. Technol. Gr. Test. Conf., Seattle, WA, USA, p. AIAA-2008-3937
Dickinson B, McClain BS, Case L (2012a) The dynamic response of quasi-steady hair-like structures in oscillatory boundary layer flows. In: 6th AIAA Flow Control Conf., New Orleans, LA, USA, p AIAA-2012a-3048
Dickinson B, McClain S, Case L (2012b) Response of passive surface hairs in steady Falkner-Skan boundary layers. In: 6th AIAA Flow Control Conf., New Orleans, LA, USA
Dickinson BT, Singler JR, Batten BA (2012c) Mathematical modeling and simulation of biologically inspired hair receptor arrays in laminar unsteady flow separation. J Fluids Struct 29:1–17. https://doi.org/10.1016/j.jfluidstructs.2011.12.010
DiStasio N, Lehoux S, Khademhosseini A, Tabrizian M (2018) The multifaceted uses and therapeutic advantages of nanoparticles for atherosclerosis research. Materials (basel). https://doi.org/10.3390/ma11050754
Fernholz WD, Higuchi H, Janke G, Schober M, Wagner P (1996) New developments and applications of skin-friction measuring techniques. Meas Sci Technol 7:1396–1409
Francioso L, De Pascali C, Casino F, Siciliano P, Giorgi MG, Campilongo S, Ficarella A (2015) Embedded sensor/actuator system for aircraft active flow separation control. In: Proc. 2015 18th AISEM Annu. Conf. AISEM 2015. 3–6. https://doi.org/10.1109/AISEM.2015.7066783
Francioso L, De Pascali C, Pescini E, De Giorgi MG, Siciliano P (2016) Modeling, fabrication and plasma actuator coupling of flexible pressure sensors for flow separation detection and control in aeronautical applications. J Phys D Appl Phys 49:235201. https://doi.org/10.1088/0022-3727/49/23/235201
Gad-el-Hak M (1989) Flow Control. Appl Mech Rev 42:261–293
Gad-el-Hak M (2001) Flow control: the future. J Aircr 38:402–418. https://doi.org/10.2514/2.2796
Ghouila-Houri C, Gerbedoen JC, Claudel J, Gallas Q, Garnier E, Merlen A, Viard R, Talbi A, Pernod P (2016a) Wall shear stress and flow direction thermal MEMS sensor for separation detection and flow control applications. Procedia Eng 168:774–777. https://doi.org/10.1016/j.proeng.2016.11.278
Ghouila-Houri C, Claudel J, Gerbedoen JC, Gallas Q, Garnier E, Merlen A, Viard R, Talbi A, Pernod P (2016b) High temperature gradient micro-sensor for wall shear stress and flow direction measurements. Appl Phys Lett 109:1–6. https://doi.org/10.1063/1.4972402
Ghouila-Houri C, Gallas Q, Garnier E, Merlen A, Viard R, Talbi A, Pernod P (2017a) High temperature gradient calorimetric wall shear stress micro-sensor for flow separation detection. Sens Actuat A Phys 266:232–241. https://doi.org/10.1016/j.sna.2017.09.030
Ghouila-Houri C, Gallas Q, Garnier E, Merlen A, Viard R, Talbi A, Pernod P (2017b) Wall shear stress calorimetric micro-sensor designed for flow separation detection and active flow control. Proceedings 1:376. https://doi.org/10.3390/proceedings1040376
Ghouila-Houri PPC, Viard R, Gallas Q, Garnier E, Talbi A (2018) High temperature gradient wall shear stress micro-sensors for flow separation control. In: AIAA Aviat. Forum, 2018 Flow Control Conf., Atlanta, Georgia
Goldstein S (1996) Fluid mechanics measurements, 2nd edn. Hemisphere, New York
Gould D, Sturm H, Lang W (2012) Thermoelectric flow sensor integrated into an inductively powered wireless system. IEEE Sens J 12:1891–1892. https://doi.org/10.1109/JSEN.2011.2179934
Haneef I, Coull JD, Ali SZ, Udrea F, Hodson HP (2008) Laminar to turbulent flow transition measurements using an array of SOI-CMOS MEMS wall shear stress sensors. Proc IEEE Sens. https://doi.org/10.1109/ICSENS.2008.4716382
Haritonidis JH (1989) The measurement of wall shear stress. Adv fluid mech meas. Springer, pp 229–261
Hejun H, Bogue R (2007) MEMS sensors: past, present and future. Sens Rev 27:7–13. https://doi.org/10.1108/02602280710729068
Higuchi H (1983) A miniature, directional surface-fence gage for three-dimensional turbulent boundary layer measurements. In: AIAA 16th Fluid Plasmsa Dyn. Conf
Higuchi H (1985) A miniature, directional surface-fence gage. AIAA J 23:1195–1196
Ho C-M, Tai Y-C (1996) REVIEW: MEMS and its applications for flow control. J Fluids Eng 118:437. https://doi.org/10.1115/1.2817778
Houri CG, Claudel J, Gerbedoen JC, Gallas Q, Garnier E, Viard R, Talbi A, Pernod P, Houri CG, Claudel J, Gerbedoen JC, Gallas Q, Garnier E (2016) Very high aspect ratio hot-wire based MEMS thermal sensor for near wall turbulent flow measurement with high sensitivity and low power consumption To cite this version: HAL Id: hal-01396294 turbulent flow measurement with high sensitivity and low power
Houri CG, Sindjui R, Gallas Q, Garnier E, Merlen A, Viard R, Talbi A, Pernod P (2017) Original MEMS wall shear stress sensors developed for separation detection and active flow control on a flap model Résumé: abstract
Huijsing JH, Van Oudheusden BW (1988) Integrated flow friction sensor. Sens Actuat 15:135–144
Jack Chen CL, Engel J, Chen N, Pandya S, Coombs S (2006) Artificial lateral line and hydrodynamic object tracking. In: 19th IEEE Int. Conf. MEMS, IEEE, pp 694–697
Jiang F, Tai Y-C, Gupta B, Goodman R, Tung S, Huang J-B, Ho C-M (1996) A surface-micromachined shear stress imager. In: Proc. Ninth Int. Work. Micro Electromechanical Syst, pp 110–115. https://doi.org/10.1109/MEMSYS.1996.493838
Jiang F, Bin Lee G, Tai YC, Ho CM (2000a) Flexible micromachine-based shear-stress sensor array and its application to separation-point detection. Sens Actuat A Phys. 79:194–203. https://doi.org/10.1016/S0924-4247(99)00277-0
Jiang F, Xu Y, Weng T, Han Z, Tai Y-C, Huang A, Ho C-M, Newbern S (2000b) Flexible shear stress sensor skin for aerodynamics applications. In: Proc. IEEE Thirteen. Annu. Int. Conf. Micro Electro Mech. Syst, pp 364–369. https://doi.org/10.1109/MEMSYS.2000.838544
Kalvesten E (1996) Pressure and wall shear stress sensors for turbulence measurements. Royal Institute of Technology, Stockholm
Kalvesten GSE, Vieider C, Lofdahl L (1995) Integrated pressure-flow sensor for correlation measurements in turbulent gas flows. In: 8th Int. Conf. Solid-State Sensors Actuators Eurosensors IX (Transducers’95), Stockholm, Sweden, pp. 428–431
Krijnen GJ et al (2006) Mems based hair flow-sensors as model systems for acoustic percetion studies. Nanotechnology 17:S84–S89
Kuo JTW, Yu L, Meng E (2012) Micromachined thermal flow sensors—a review. Micromachines 3:550–573. https://doi.org/10.3390/mi3030550
Lee C, Hong G, Ha QP, Mallinson SG (2003) A piezoelectrically actuated micro synthetic jet for active flow control. Sens Actuat A Phys 108:168–174. https://doi.org/10.1016/S0924-4247(03)00267-X
Leu TS, Yu JM, Miau JJ, Chen SJ (2016) MEMS flexible thermal flow sensors for measurement of unsteady flow above a pitching wind turbine blade. Exp Therm Fluid Sci 77:167–178. https://doi.org/10.1016/j.expthermflusci.2016.04.018
Liepmann HW, Skinner GT (1954) Shearing-stress measurements by use of a heated element, NACA Tech. Note No. 3268 NACA. Washington, DC, USAhttps://doi.org/10.1063/1.1715007
Lin Q, Jiang F, Wang XQ, Xu Y, Han Z, Tai YC, Lew J, Ho CM (2004) Experiments and simulations of MEMS thermal sensors for wall shear-stress measurements in aerodynamic control applications. J Micromech Microeng 14:1640–1649. https://doi.org/10.1088/0960-1317/14/12/007
Lissaman P (1983) Low Reynolds number airfoils. Annu Rev Fluid Mech 15:223–239
Liu C (2007) Micromachined biomemetic artificial haircell sensors. Bioinspir Biomim 2:S1162–S1169
Liu C, Huang JB, Zhu Z, Jiang F, Tung S, Tai YC, Ho CM (1999a) A micromachined flow shear-stress sensor based on thermal transfer principles. J Microelectromech Syst 8:90–98. https://doi.org/10.1109/84.749408
Liu C, Huang J, Zhu AZ, Jiang F, Tung S, Tai Y, Ho C (1999b) A micromachined flow shear stress sensor based on thermal transfer principles. 1. Introduction. J Microelectromechan Syst 8:1–24
Liu K, Yuan W, Deng J, Ma B, Jiang C (2007) Detecting boundary-layer separation point with a micro shear stress sensor array. Sens Actuat A Phys 139:31–35. https://doi.org/10.1016/j.sna.2006.11.008
Liu P, Zhu R, Que R (2009) A flexible flow sensor system and its characteristics for fluid mechanics measurements. Sensors 9:9533–9543. https://doi.org/10.3390/s91209533
Lofdahl GSL, Kalvesten E, Hadzianagnostakis T (1996) An integrated silicon based wall pressure-shear stress sensor for measurements in turbulent flows. In: Am. Soc. Mech. Eng. Dyn. Syst. Control Div. DSC, pp 245–251
Löfdahl L, Gad-el-Hak M (1999) MEMS-based pressure and shear stress sensors for turbulent flows. Meas Sci Technol 10:665–686. https://doi.org/10.1088/0957-0233/10/8/302
Ludwieg H (1950) Instrument for measuring the wall shearing stress of turbulent boundary layers, NACA Tech. Memo. No. 1284 NACA. Washington, DC, USA. https://doi.org/10.1097/00152192-198911000-00004
Ma BH, Ma CY (2016) A MEMS surface fence for wall shear stress measurement with high sensitivity. Microsyst Technol 22:239–246. https://doi.org/10.1007/s00542-015-2450-6
Magar KT, Reich GW, Rickey M, Smyers B, Beblo R (2016) Aerodynamic parameter prediction on an airfoil with flap via artificial hair sensors and feedforward neural network, https://doi.org/10.2514/6.2016-1540
Maines BH, Davis MB, Bender E, Baker WM, Boespflug MP (2018) Flow separation control computational model for optimization of future naval air vehicles. AIAA Aerosp Sci Meet. https://doi.org/10.2514/6.2018-0560
Mangalam T, Moes A (2004) Real-time unsteady loads measurements using hot-film sensors. In: 22nd Appl. Aerodyn. Conf. Exhib
Mangalam P, Mangalam A, Flick S (2008) Unsteady aerodynamic observable for gust alleviation and flutter suppression. In: 26th AIAA Appl. Aerodyn. Conf
Mangalam M, Moore A, Berg G, Blaylock D, Rumsey M (2010) Real-time aerodynamic observable for wind turbine applications. In: 51st AIAA/ASME/ASCE/AHS/ASC Struct. Struct. Dyn. Mater. Conf
Mansoor M, Haneef I, Akhtar S, De Luca A, Udrea F (2015) Silicon diode temperature sensors—a review of applications. Sens Actuat A Phys. https://doi.org/10.1016/j.sna.2015.04.022
Maschmann MR, Dickinson BT, Ehlert GJ, Baur JW (2012) Force sensitive carbon nanotube arrays for biologically inspired airflow sensing. Adv Mater 21:94–124
Maschmann MR, Ehlert GJ, Dickinson BT, Phillips DM, Ray CW, Reich GW, Baur JW (2014) Bioinspired carbon nanotube fuzzy fiber hair sensor for air-flow detection. Adv Mater Technol. https://doi.org/10.1002/adma.201305285
Maschmann MR, Ehlert GJ, Dickinson BT, Ray CW, Reich GW, Baur JW (2014) Bioinspired carbon nanotube fuzzy fiber hair sensor for air-flow detection. Adv Mater 24:3220–3234
McClain S, Case L, Brown C (2013) A flap-based gust generation system for hair sensor investigations. In: 51st AIAA Aerosp. Sci. Meet. Incl. New Horizons Forum Aerosp. Expo., Grapevine, TX, USA, p. AIAA-2013-1131
McGary PD, Tan L, Zou J, Stadler BJH, Downey PR (2006) Magnetic nanowires for acoustic sensors. J Appl Phys 99
Miao M, Ho J (2006) Effect of flexure on aerodynamic propulsive efficiency of flapping flexible airfoil. J Fluids Struct 22:401–419
Miau J-J, Tu JK, Chou JH, Lee GB (2006) Sensing flow separation on a circular cylinder by micro-electrical-mechanical-system thermal-film sensors. AIAA J 44:2224–2230. https://doi.org/10.2514/1.17408
Miau JJ, Fang CH, Chen MC, Wang CT, Lai YH (2014) Discrete transition of flow over a circular cylinder at precritical Reynolds numbers. AIAA J 52:2576–2586. https://doi.org/10.2514/1.J052909
Miau JJ, Leu TS, Yu JM, Tu JK, Wang CT, Lebiga V, Mironov D, Pak A, Zinovyev V, Chung KM (2015) Mems thermal film sensors for unsteady flow measurement. Sens Actuat, A Phys 235:1–13. https://doi.org/10.1016/j.sna.2015.09.030
Mohamed A, Watkins S, Clothier R, Abdulrahim M, Massey K, Sabatini R (2014a) Progress in aerospace sciences fixed-wing MAV attitude stability in atmospheric turbulence—part 2: investigating biologically-inspired sensors. Prog Aerosp Sci. https://doi.org/10.1016/j.paerosci.2014.06.002
Mohamed A, Massey K, Watkins S, Clothier R (2014b) The attitude control of fixed-wing MAVS in turbulent environments. Prog Aerosp Sci 66:37–48. https://doi.org/10.1016/j.paerosci.2013.12.003
Mohamed A, Clothier R, Watkins S, Sabatini R, M, (2014c) Abdulrahim, progress in aerospace sciences fixed-wing MAV attitude stability in atmospheric turbulence, part 1: suitability of conventional sensors. Prog Aerosp Sci. https://doi.org/10.1016/j.paerosci.2014.06.001
Mueller J, DeLaurier T (2005) Aerodynamics of small vehicles. Annu Rev Fluid Mech 35:89–111
Naughton JW, Sheplak M (2002) Modern developments in shear-stress measurement. Prog Aerosp Sci 38:515–570. https://doi.org/10.1016/S0376-0421(02)00031-3
Noeth N, Keller SS, Boisen A, Knowledge P, Guide P, Kilinc N, Cakmak O, Kosemen A, Ermek E, Ozturk S, Yerli Y, Ozturk ZZ, Urey H, Zhang S, Lou L, Lee C, Fiorillo AS, Critello CD, Pullano AS, Yoo YK, Chae MS, Kang JY, Kim TS, Hwang KS, Lee JH, Palshikar A, Sharma NN, Vashist SK, Azom C, Lavrik NV, Sepaniak MJ, Datskos PG, Lang HP, Hegner M, Gerber C, Chen N, Tucker C, Engel JM, Yang Y, Pandya S, Liu C, Juliet VA (2007) Multifunctionalized cantilever systems for electronic nose applications. Anal Chem 5:1–15. https://doi.org/10.5121/ijnsa.2013.5210
Padmanabhan A (1997) Siliucon micomachined sensors and sensor arrays for shear stress measurements in aerodynamic flows. MIT, Cambridge
Padmanabhan A, Goldberg HD, Breuer KS, Schmidt MA (1995) A silicon micrbmac ned floating-element shear-stress sensor tical position sensing by photodiodes, 436–439
Panta A, Mohamed A, Marino M, Watkins S, Fisher A (2018) Unconventional control solutions for small fixed wing unmanned aircraft. Prog Aerosp Sci 102:122–135. https://doi.org/10.1016/j.paerosci.2018.07.005
Papen T, Steffes H (2002) A micro surface fence probe for the application in flow reversal areas. Sens Actuat A Phys. 97:264–270
Patel V (1965) Calibration of the Preston tube and limitations on its use in pressure gradients. J Fluid Mech 23:185–208
Phillips DM, Ray CW, Hagen BJ, Su W, Baur JW, Reich GW (2015) Detection of flow separation and stagnation points using artificial hair sensors. Smart Mater Struct. https://doi.org/10.1088/0964-1726/24/11/115026
Que R, Zhu R (2012) Aircraft aerodynamic parameter detection using micro hot-film flow sensor array and BP neural network identification. Sensors (switzerland) 12:10920–10929. https://doi.org/10.3390/s120810920
Ramaprian BR (1985) The use of flush-mounted hot-film gauges tomeasure skin friction in unsteady boundary layers. J Fluid Mech 161:139–159. https://doi.org/10.1017/S0022112085002853
Reich GW, Rickey MR, Beblo RV, Smyers BM (2018) SMASIS2015-8890 aerodynamic characteristics prediction via artificial hair sensor, p 1–9
Robin Murphy RC, Robin R (2000) Introduction to AI robotics. The MIT Press, Massachusetts Institute of Technology
Rojratsirikul I, Wang P, Gursul Z (2010) Effect of pre-strain and excess length on unsteady fluid–structure interactions of membrane airfoils. J Fluids Struct 26:359–376
Sámano R, Viana J, Ferreira N, Loureiro J, Cintra J, Rocha A, Tovar E (2018) Active flow control using dense wireless sensor and actuator networks. Microprocess Microsyst 61:279–295. https://doi.org/10.1016/j.micpro.2018.05.012
Sarlo R, Najem JS, Leo DJ (2016) Flow field sensing with bio-inspired artificial hair cell arrays. Sens Actuat B Chem 236:805–814. https://doi.org/10.1016/j.snb.2016.05.091
Schober M, Obermeier E, Pirskawetz S, Fernholz HH (2004) A MEMS skin-friction sensor for time resolved measurements in separated flows. Exp Fluids 36:593–599. https://doi.org/10.1007/s00348-003-0728-4
Segawa T, Suzuki D, Fujino T, Jukes T, Matsunuma T (2016) Feedback control of flow separation using plasma actuator and FBG sensor. Int J Aerosp Eng. https://doi.org/10.1155/2016/8648919
Seo D, Kwon S, Bae N, Kim Y (2013) MEMS wall shear stress sensor for real time onboard monitoring of flow separation over a wing surface. In: 51st AIAA Aerosp. Sci. Meet. Incl. New Horizons Forum Aerosp. Expo, pp 1–8. https://doi.org/10.2514/6.2013-625
Seo D, Kim Y, Kwon S (2014) Micro shear-stress sensor for separation detection during flight of unmanned aerial vehicles using a strain gauge. IEEE Sens J 14:1012–1019. https://doi.org/10.1109/JSEN.2013.2292338
Shajii J, Ng KY, Schmidt MA (1992) A floating-element shear stress sensor using wafer-bonding technology. J Microelectromech Syst 1:89–94. https://doi.org/10.1109/84.157363
Sheplak M, Cattafesta L, Nishida T, McGinley CB (2004) MEMS shear stress sensors: promise and progress. In: 24th AIAA Aerodynamic Meas, Tech. Gr. Test. Conf. AIAA. 1–13
Shyy D, Berg W, Ljungqvist M (1999) Flapping and flexible wings for biological and microvehicles. Prog Aerosp Sci 35:455–506
Sinha SK (2001) Flow separation control with micro exural. J Aircr 38:496–503
Slinker KA, Kondash C, Dickinson BT, Baur JW (2016) CNT-based artificial hair sensors for predictable boundary layer air flow sensing. Adv Mater Technol. https://doi.org/10.1002/admt.201600176
Sterbing-D’Angelo CF, Chadha S, Chiu M, Falk C, Xian B, Barcelo W, Zook J, Moss JM (2011) Bat wing sensors support flight control. Proc Natl Acad Sci USA 108:27
Sturm H, Lang W (2013) Membrane-based thermal flow sensors on flexible substrates. Sens Actuat A Phys 195:113–122. https://doi.org/10.1016/j.sna.2013.03.004
Sturm H, Dumstorff G, Busche P, Westermann D, Lang W (2012) Boundary layer separation and reattachment detection on airfoils by thermal flow sensors. Sensors (switzerland) 12:14292–14306. https://doi.org/10.3390/s121114292
Su W, Reich GW (2016) Artificial hair sensor designs for flow measurement of UAVs with different scales, 9803-98031Whttps://doi.org/10.1117/12.2219188
Sun B, Ma B, Yan Y, Jiang C, Yuan W, Xue X, Liu G, Fang Y (2017) A flexible hot-film shear stress sensor array and its application to airfoil separation detection. IEEE Sensors. https://doi.org/10.1109/ICSENS.2017.8234140
Tai Y (1997) Aerodynamic control of a delta-wing using, sensors and actuators, pp 21–26
Tokutake H (2007) Flow control with pitching motion of UAV using MEMS flow sensors, pp 1–15
Tung S, Maines B, Jiang F, Tsao T (2004) Development of a MEMS-based control system for compressible flow separation. J Microelectromech Syst 13:91–99. https://doi.org/10.1109/JMEMS.2003.823228
Vahid Qaradaghi SP, Mahdavi M, Ramezany A (2016) MEMS resonant sensors for real-time thin film shear stress monitoring. In: IEEE Conf. Proc
Van Oudheusden B (1992) Silicon thermal flow. Sens Sens Actuat A Phys 30:5–26
Wang Y (2006) On exploring application of MEMS in aerodynamic flow control. In: Proc. CANEUS2006, Toulouse, France, 2006, pp. 1–5
Weiss J, Schwaab Q, Boucetta Y, Giani A, Guigue C, Combette P, Charlot B (2017) Simulation and testing of a MEMS calorimetric shear-stress sensor. Sens Actuat A Phys 253:210–217. https://doi.org/10.1016/j.sna.2016.11.018
Winter KG (1977) An outline of the techniques available for the measurement of skin friction in turbulent boundary layers. Prog Aeronaut Sci 18:1–57
Xiang D, Yang Y, Xu Y, Li Y (2010) MEMS-based shear-stress sensor for skin-friction measurements. In: IEEE Conf. Proc., pp. 1–6
Xiong Yu JB, Tao J (2010) A bio-inspired flow sensor. Smart Struct. Mater. 2010:764618
Xu Y, Jiang F, Newbern S, Huang A, Ho CM, Tai YC (2003a) Flexible shear-stress sensor skin and its application to unmanned aerial vehicles. Sens Actuat A Phys 105:321–329. https://doi.org/10.1016/S0924-4247(03)00230-9
Xu Y, Chong Y, Huang A, Ho C-M (2003b) IC-integrated flexible shear-stress sensor skin. J Microelectromech Syst 12:740–747
Yu J-M, Leu T-S, Miau J-J, Chen S-J (2016) MEMS flexible thermal flow sensor for measurement of boundary layer separation. Mod Phys Lett B 30:1650177. https://doi.org/10.1142/S0217984916501773
Zhu R, Liu P, Liu XD, Zhang FX, Zhou ZY (2009) A low-cost flexible hot-film sensor system for flow sensing and its application to aircraft. In: Proc. IEEE Int. Conf. Micro Electro Mech. Syst, pp 527–530. https://doi.org/10.1109/MEMSYS.2009.4805435
Zhu R, Que R, Liu P (2017) Flexible micro flow sensor for micro aerial vehicles. Front Mech Eng 12:539–545. https://doi.org/10.1007/s11465-017-0427-0
Zikmund P, Macík M, Dvořák P, Míkovec Z (2018) Bio-inspired aircraft control. Aircr Eng Aerosp Technol 90:983–991. https://doi.org/10.1108/AEAT-01-2017-0020
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Abbas, Z., Mansoor, M., Habib, M. et al. Review: MEMS sensors for flow separation detection. Microsyst Technol 29, 1253–1280 (2023). https://doi.org/10.1007/s00542-023-05513-x
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-023-05513-x