Abstract
This paper presents a method of applying surface sputtering process in order to improve the displacement of an electrothermal V-shaped actuator (EVA) fabricated by the traditional SOI-MEMS technology. After sputtering, the measured resistance as well as resistivity of silicon EVA is approximately 1.55 times lower than non-sputtering. The displacements of both calculation and simulation in case of applying sputtering and non-sputtering were also compared. The results showed that the displacement of the sputtering V-shaped actuator is two times larger than non-sputtering at the same driving voltage of 16 V (both of calculation and simulation). The experimental results explained that the driving voltage of sputtering-specimen reduces about 40 and 48.4% at the same displacement (corresponding to 8 and 22 µm) in comparison with non-sputtering counterpart.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Andersen KN, Carlson K, Petersen DH, Molhave K, Eichhorn V, Fatikow S, Bøggild P (2008) Electrothermal microgrippers for pick-and-place operations. Microelectron Eng 85:1128–1130
Espinosa HD, Zhu Y, Moldovan N (2007) Design and operation of a MEMS-based material testing system for nanomechanical characterization. J Microelectromech Syst 16(5):1219–1231
Fogel O, Winter S, Benjamin E, Krylov S, Kotler Z, Zalevsky Z (2018) 3D printing of functional metallic microstructures and its implementation in electrothermal actuators. Addit Manuf 21:307–311
Hoang KT, Nguyen DT, Pham PH (2020) Impact of design parameters on working stability of the electrothermal V-shaped actuator. Microsyst Technol 26:1479–1487
Hu T, Zhao Y, Li X, Zhao Y, Bai Y (2017) Integration design of MEMS electro-thermal safety-and-arming devices. Microsyst Technol 23(4):953–958
Lott CD, McLain TW, Harb JN, Howell LL (2002) Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator. Sens Actuators A Phys 101(1–2):239–250
Luo JK, Flewitt AJ, Spearing SM, Fleck NA, Milne WI (2005) Comparison of microtweezers based on three lateral thermal actuator configurations. J Micromech Microeng 15:1294–1302
Maloney JM, Schreiber DS, Devoe DL (2004) Large-force electrothermal linear micromotors. J Micromech Microeng 14(2):226–234
Nguyen DT, Hoang KT, Pham PH (2020) Heat transfer model and critical driving frequency of electrothermal V-shaped actuators. In: Advances in engineering research and application, ICERA 2019, lecture notes in networks and systems, vol 104, pp 394–405
Shan T, Qi X, Cui L, Zhou X (2017) Thermal behavior modeling and characteristics analysis of electrothermal microactuators. Microsyst Technol 23(7):2629–2640
Zhang Z, Yu Y, Liu X, Zhang X (2015) A comparison model of V- and Z-shaped electrothermal microactuators. In: 2015 IEEE international conference on mechatronics and automation (ICMA), Beijing, pp 1025–1030
Zhang Z, Zhang W, Wu Q, Yu Y, Liu X, Zhang X (2017a) Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators. J Micromech Microeng 27(1):015023
Zhang Z, Yu Y, Liu X, Zhang X (2017b) Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators. Microsyst Technol 23(8):3775–3789
Acknowledgements
This research is funded by Vietnam National Foundation for Science and Technology Development (NAFOSTED) under Grant number “107.01-2019.05”.
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Nguyen, D.T., Hoang, K.T. & Pham, P.H. Larger displacement of silicon electrothermal V-shaped actuator using surface sputtering process. Microsyst Technol 27, 1985–1991 (2021). https://doi.org/10.1007/s00542-020-04985-5
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-020-04985-5