Abstract
This paper mentions a detail calculation of the equivalent dynamic parameters in differential equations of motion of the electrothermal V-shaped actuator. A heat transfer model for a thin beam (including the dependence of material properties on the temperature) is applied in order to solve more exactly temperature distribution and displacement of V-shaped beam system. Comparing the values of displacement in both calculation and simulation confirmed a higher accuracy of proposed equations. Moreover, a related formula between the minimum conversion stiffness and driving voltage amplitude is analyzed and examined to avoid the buckling phenomenon may occur in V-shaped beam system while working at a high voltage.
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This research is funded by Vietnam National Foundation for Science and Technology Development (NAFOSTED) under grant number: “107.01-2019.05”.
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Hoang, K.T., Nguyen, D.T. & Pham, P.H. Impact of design parameters on working stability of the electrothermal V-shaped actuator. Microsyst Technol 26, 1479–1487 (2020). https://doi.org/10.1007/s00542-019-04682-y
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DOI: https://doi.org/10.1007/s00542-019-04682-y