Abstract
The objective of this paper is to propose a novel micro vibratory platform with 3 degrees of freedom, hence it can advance parts in any arbitrarily specified direction on the horizontal plane. Since the platform is driven by piezoelectric actuators, the part advancing can be in micro-scale. First, the structure and rigid-body design of the proposed platform are presented. Then, inverse kinematic analysis is performed to find the required inputs which are used to specify the voltages for driving the piezoelectric actuators. Furthermore, the approach of compliant design is presented, and then the rigid-body design is transformed to its corresponding compliant design. In addition, modal analysis is performed to find the best driving frequency. Finally, the feasibility of the proposed design is verified by conducting prototype testing. The experimental results show that the proposed micro vibrating conveyor can advance parts in the specified directions with reasonable accuracy.
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The supports of the Ministry of Science and Technology, Republic of China (Taiwan), under Grants MOST 107-2637-E-150-002 and MOST 108-2637-E-150-001 are gratefully acknowledged.
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Hsieh, WH., Adhitya On a novel micro vibratory platform with 3 DoFs. Microsyst Technol 28, 383–394 (2022). https://doi.org/10.1007/s00542-020-04860-3
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DOI: https://doi.org/10.1007/s00542-020-04860-3