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Aluminum-doped zinc oxide nanorods and methyl alcohol gas sensor application

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Abstract

In this paper, we mainly discuss about Al-doped zinc oxide (ZnO) nanorods (NRs) grown by hydrothermal method with low temperature. Glass substrate was grown 100 nm ZnO seed layer by RF magnetron Sputter. Add zinc nitrate hexahydrate [Zn(NO3)2·6H2O] and hexamethylenetetramine (HMT, C6H12N4), and add aluminum nitrate [Al(NO3)3·9H2O] for changing conductive properties of ZnO NRs to reach the purpose of doped. Then we used field electron emission scanning electron microscope observing the surface morphology; energy dispersive spectrometer analyze element content; X-ray diffractometer; photoluminescence analyze optical properties; transmission electron microscopy view the internal type and structure of the material. Finally observing the Al-doped ZnO NRs and pure ZnO NRs sensor under methyl alcohol surroundings. The results the Al-doped ZnO NRs sensor were found to be more sensitive than the pure ZnO NRs sensor under methyl alcohol surroundings.

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Acknowledgements

This work was supported by the Ministry of Science and Technology under contract numbers MOST 108-2622-E-150-010-CC3, MOST 107-2622-E-150-002-CC2, 106-2221-E-150-041-MY3, 106-2622-E-150-005-CC3, and 106-2622-E-150-017-CC2. We also acknowledge the assistance of the Common Laboratory for Micro/Nano Science and Technology of the National Formosa University for some of the measurement equipment used in this study, the Center for Micro/Nano Science and Technology of National Cheng Kung University for device characterization, and Mr. W. H. Lee, H. R. Dai, Y. L. Tsai for device fabrication and equipment support.

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Authors and Affiliations

  1. Institute of Microelectronics and Department of Electrical Engineering, National Cheng Kung University, Tainan, 70101, Taiwan

    Yi-Hsing Liu, Shoou-Jinn Chang & Lin-Tzu Lai

  2. Department of Electronic Engineering, National Formosa University, Yunlin, 632, Taiwan

    Yung-Ping Tu & Sheng-Joue Young

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  1. Yi-Hsing Liu
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  2. Shoou-Jinn Chang
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  3. Lin-Tzu Lai
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  4. Yung-Ping Tu
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  5. Sheng-Joue Young
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Correspondence to Sheng-Joue Young.

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Liu, YH., Chang, SJ., Lai, LT. et al. Aluminum-doped zinc oxide nanorods and methyl alcohol gas sensor application. Microsyst Technol 28, 377–382 (2022). https://doi.org/10.1007/s00542-020-04856-z

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