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A micro monolithic integrated force-torque sensor with piezoelectric tuning mechanism

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Abstract

A novel micro force-torque sensor with tuning mechanism is presented in this paper. The sensor is designed and fabricated based on monolithic integrated method, including planar graphic manufacturing and lamination process. The sensing element is composed of cross-shaped double cantilever beams which will deform when loading force and Torque. The process of sensor is divided into two parts. The structure-circuit integration process is proposed to realize the planar structure of sensor, which integrates flexible printed circuit (FPC) in the graphic multi-layer materials. The assembly of force-torque sensor is realized by the design of foldable mirror structure with each component connected by flexible limited hinges, which can form and lock at 90°. By bring in piezoelectric (PZT) composite cantilever beams as tuning mechanism, the position of the sensor can be further tuned, so that the system precision can be significant improved. According to the result of calibration and experiments, the sensor prototype has a force sensitivity of 0.29 μm/mN, a torque sensitivity of 0.33 μm/μNm and a bandwidth of 481.44 Hz, the range of force and torque measurement is – 7~7 mN and – 14~14 μNm respectively. And the linear-adjustment sensitivity of PZT composite cantilever beam is 24.69 nm/V.

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Acknowledgements

This research is supported by the Supporting Foundation of the Ministry of Education (6141A02022607, 6141A02022627), the Pre-research Fund (1816311ZT005020, 301020803, 17070107), Shanghai Science and Technology Commission Project (19511104202), and Shanghai Professional technical service platform (19DZ2291103).

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Authors and Affiliations

  1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication Laboratory, Laboratory for Thin Film and Micro fabrication of the Ministry of Education, Shanghai Key Lab of Navigation, and Location-based Services, Department of Micro-Nano Electronics, School of electronic information and electrical engineering, Shanghai Jiao Tong University, Shanghai, 200240, China

    Ran Meng, Weiping Zhang, Sui Zhou, Chenyang Wang, Jiaxin Zhao & Wei Ge

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  1. Ran Meng
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  2. Weiping Zhang
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  3. Sui Zhou
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  4. Chenyang Wang
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  5. Jiaxin Zhao
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  6. Wei Ge
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Correspondence to Weiping Zhang.

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Meng, R., Zhang, W., Zhou, S. et al. A micro monolithic integrated force-torque sensor with piezoelectric tuning mechanism. Microsyst Technol 26, 2879–2886 (2020). https://doi.org/10.1007/s00542-020-04829-2

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  • DOI: https://doi.org/10.1007/s00542-020-04829-2

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