Abstract
Fiber optic-based mechanical sensors, thanks to their reduced sensitivity to external electromagnetic fields, are promising in the development of biomechatronic systems able to work in demanding environments, such as MRI chambers. In this chapter we report on the working principle, design, and experimental characterization of a micro-opto-mechanical displacement sensor, which exploits the light modulation induced by the relative displacement of two overlapped micro-fabricated gratings. The gratings are obtained by photo patterning a Pt layer (45 nm thick), sputtered on a Pyrex substrate, into an array of stripes, 150 μm wide and with a 525 μm period. The calibration was carried out up to 525 μm displacement. The sensor showed high and constant sensitivity in the ranges from 30 to 140 μm and from 360 to 490 μm. The experimental data, together with the known advantages of fiber optic-based sensors, encourage further studies for the development of sensors exploiting the proposed measurement principle.
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References
P. Saccomandi, E. Schena, S. Silvestri. A novel target type low pressure-drop bidirectional optoelectronic air flow sensor for infant artificial ventilation: Measurement principle and static calibration. Rev. Sci. Instrum. 82 (2),024301 (2011).
E. Schena, P. Saccomandi, S. Silvestri. A high sensitivity fiber optic macro-bend based gas flow rate transducer for low flow rates: Theory, working principle, and static calibration. Rev. Sci. Instrum. 84 (2), 024301 (2013).
S. Silvestri, E. Schena. Micromachined flow sensors in biomedical applications. Micromachines, 3(2), 2012, pp. 225–243.
E. Schena, P. Saccomandi, M. Mastrapasqua, S. Silvestri. An optical fiber based flow transducer for infant ventilation: measurement principle and calibration. In: Medical Measurements and Applications Proceedings (MeMeA), 2011 IEEE International Workshop on. IEEE, 2011. p. 311–315.
M. Moscato, E. Schena, P. Saccomandi, M. Francomano, D. Accoto, S. Silvestri. A micromachined intensity-modulated fiber optic sensor for strain measurements: working principle and static calibration. In: IEEE International Conference on Engineering in Medicine and Biology Society Proceedings (EMBC), 2012, pp. 5790–5793.
N.L. Tagliamonte, F. Sergi, D. Accoto, G. Carpino, E. Guglielmelli. Double actuation architectures for rendering variable impedance in compliant robots: a review. Mechatronics, 22(8), 2012, pp. 1187–1203.
N.L. Tagliamonte, F. Sergi, G. Carpino, D. Accoto, E. Guglielmelli. Design of a variable impedance differential actuator for wearable robotics applications. In IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS), 2010, pp. 2639–2644.
F. Vitale, D. Accoto, L. Turchetti, S. Indini, M.C. Annesini, E. Guglielmelli. Low-temperature H2O2-powered actuators for biorobotics: Thermodynamic and kinetic analysis. In IEEE International Conference on Robotics and Automation (ICRA). 2010.
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Schena, E. et al. (2014). Design and Characterization of a Micro-opto-mechanical Displacement Sensor. In: Di Natale, C., Ferrari, V., Ponzoni, A., Sberveglieri, G., Ferrari, M. (eds) Sensors and Microsystems. Lecture Notes in Electrical Engineering, vol 268. Springer, Cham. https://doi.org/10.1007/978-3-319-00684-0_12
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DOI: https://doi.org/10.1007/978-3-319-00684-0_12
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