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Integral sliding mode control for nonlinear damped model of arch microbeams

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Abstract

In this paper, a second order integral sliding mode controller (SMC) and a two-dimensional integral sliding mode controller are designed for a nonlinear damped model of arch microbeam with two electrodes as a bistable system. The latest model of the arch microbeam is introduced in which the squeezed film damping effect is modeled through considering nonlinear terms. The actuating voltage is considered as the control effort of the system somehow expands as a combined static DC and harmonic AC voltage. The second order integral SMC and two-dimensional integral SMC are proposed as the robust controllers to stabilize the system in the presence of the uncertain parameter due to the damping coefficient. The controller formula, stability and convergence of the closed-loop system are derived and formulated for the arch microbeam. Simulation results and comparison of the proposed controllers are presented to demonstrate the performance of the designed control schemes for achieving set point tracking in the closed-loop system.

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Authors and Affiliations

  1. School of Mechanical Engineering, Shiraz University, Shiraz, Iran

    Arman Rajaei

  2. School of Mechanical Engineering, College of Engineering, University of Tehran, P.O.B. 11155-4563, Tehran, Iran

    Amin Vahidi-Moghaddam, Moosa Ayati & Mostafa Baghani

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  1. Arman Rajaei
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  2. Amin Vahidi-Moghaddam
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  3. Moosa Ayati
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  4. Mostafa Baghani
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Correspondence to Moosa Ayati.

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Rajaei, A., Vahidi-Moghaddam, A., Ayati, M. et al. Integral sliding mode control for nonlinear damped model of arch microbeams. Microsyst Technol 25, 57–68 (2019). https://doi.org/10.1007/s00542-018-3931-1

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  • DOI: https://doi.org/10.1007/s00542-018-3931-1

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