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A size-dependent model to study nonlinear static behavior of piezoelectric cantilever microbeams with damage

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Abstract

Based on the modified couple stress theory and von Kármán nonlinear theory, a size-dependent nonlinear mathematical model for an electrostatically actuated microbeam with a piezoelectric layer bonded to the top surface is formulated by the Hamilton’s principle. In the developed model, the static behavior of the microbeam is discussed by using numerical methods. The results show that the size effect is significant when the microbeam thickness is comparable to the material length scale parameter. The effect of geometric nonlinearity on the pull-in voltage mainly depends on the initial gap. By applying a small negative voltage to the piezoelectric layer, the pull-in voltage may effectively reduce. To attain accurate analysis for the static behaviors of microscale beam devices, the damage has to be considered.

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Acknowledgements

This work is supported by the National Natural Science Foundation of China (Grant No. 11272270).

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Authors and Affiliations

  1. College of Civil Engineering, Fuzhou University, Fuzhou, 350116, China

    Yufang Zheng & Tao Chen

  2. Department of Civil Engineering and Architecture, Xiamen University of Technology, Xiamen, 361024, China

    Changping Chen

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  1. Yufang Zheng
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  2. Tao Chen
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  3. Changping Chen
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Correspondence to Changping Chen.

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Zheng, Y., Chen, T. & Chen, C. A size-dependent model to study nonlinear static behavior of piezoelectric cantilever microbeams with damage. Microsyst Technol 23, 4679–4686 (2017). https://doi.org/10.1007/s00542-016-3246-z

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  • DOI: https://doi.org/10.1007/s00542-016-3246-z

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