Abstract
We propose a two-dimensional (2-D) in-plane micro-needle array with shaft sidewalls aligned parallel to the vertical (111) crystalline plane of (110) silicon. Six types of needle tips with various shapes and tapered angles were fabricated so as to maintain the tip sharpness. Two layers of micro needles (upper and bottom needle arrays) for the 2-D array were realized using simultaneous etching from the front and back sides of (110) silicon. In addition, microfluidic components were embedded in the micro-needle chip to inject or extract biochemical samples. The length of the micro needles was easily extended to 2200 μm, and the insertion forces of the single and arrayed micro needles were evaluated by pricking chicken breast flesh. In case of a micro needle having a tapered angle of 10° and tip end width of 1 μm, the insertion force per needle was as low as 15 mN, which is lower than those reported in previous studies.
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References
Chen B, Wei J, Tay FEH, Wong YT, Iliescu C (2008) Silicon microneedle array with biodegradable tips for transdermal drug delivery. Microsyst Technol 14:1015–1019. doi:10.1007/s00542-007-0530-y
Choi SO, Kim YC, Lee JW, Park JH, Prausnitz MR, Allen MG (2012) Intracellular protein delivery and gene transfection by electroporation using a microneedle electrode array. Small 8(7):1081–1091. doi:10.1002/smll.201101747
Davis SP, Landis BJ, Adams ZH, Allen MG, Prausnitz MR (2004) Insertion of microneedles into skin: measurement and prediction of insertion force and needle fracture force. J Biomech 37(8):1155–1163. doi:10.1016/j.jbiomech.2003.12.010
Griss P, Stemme G (2002) Novel, side opened out-of-plane microneedles for microfluidic transdermal interfacing. IEEE MEMS 2002:467–470
Jeong DH, Kim JM, Noh DY, Kim KH, Lee JH (2011) Micromachined anti-scatter grid fabricated using crystalline wet etching of (110) silicon and metal electroplating for X-ray imaging. Nucl Instrum Meth A 652:846–849. doi:10.1016/j.nima.2010.08.116
Ji J, Tay FEH, Miao J, Iliescu C (2006) Microfabricated silicon microneedle array for transdermal drug delivery. J Phys: Conf Ser 34:1127–1131
Jin CY, Han MH, Lee SS, Choi YH (2009) Mass producible and biocompatible microneedle patch and functional verification of its usefulness for transdermal drug delivery. Biomed Microdevices 11(6):1195–1203. doi:10.1007/s10544-009-9337-1
Khanna P, Luongo K, Strom JA, Bhansali S (2010) Sharpening of hollow silicon microneedles to reduce skin penetration force. J Micromech Microeng 20:045011(8 pp) doi:10.1088/0960-1317/20/4/045011
Kim SH, Lee SH, Kim YK (2002) A high-aspect-ratio comb actuator using UV-LIGA surface micromachining and (110) silicon bulk micromachining. J Micromech Microeng 12:128–135. doi:10.1088/0960-1317/12/2/306
Kochhar JS, Quek TC, Soon WJ, Choi J, Zou S, Kang L (2013) Effect of microneedle geometry and supporting substrate on microneedle array penetration into skin. J Pharm Sci 102(11):4100–4108. doi:10.1002/jps.23724
Lee JH, Seo Y, Lim TS, Bishop PL, Papautsky I (2007) MEMS needle-type sensor array for in situ measurements of dissolved oxygen and redox potential. Environ Sci Technol 41(22):7857–7863
Lee HJ, Jeon HY, Park SJ, Lee HW, Bae S (2010) Micro needle array fabrication for drug delivery and drug delivery evaluation test using optical inspection module. ASR ICNB 2:100–104
Paik SJ, Byun S, Lim JM, Park Y, Lee A, Chung S, Chang J, Chun K, Cho D (2004) In-plane single-crystal-silicon microneedles for minimally invasive microfluid systems. Sens Actuator A-Phys 114:276–284. doi:10.1016/j.sna.2003.12.029
Prausnitz MR (2004) Microneedles for transdermal drug delivery. Adv Drug Deliver Rev 56:581–587. doi:10.1016/j.addr.2003.10.023
Sparks D, Hubbard T (2004) Micromachined needles and lancets with design adjustable bevel angles. J Micromech Microeng 14:1230–1233. doi:10.1088/0960-1317/14/8/016
Wang LF, Liu JQ, Yan XX, Yang B, Yang CS (2013) A MEMS-based pyramid micro-needle electrode for long-term EEG measurement. Microsyst Technol 19:269–276. doi:10.1007/s00542-012-1638-2
Yang M, Zahn JD (2004) Microneedle insertion force reduction using vibratory actuation. Biomed Microdevices 6(3):177–182
Yun SS, You SK, Lee JH (2006) Fabrication of vertical optical plane using DRIE and KOH crystalline etching of (110) silicon wafer. Sens Actuator A-Phys 128:387–394. doi:10.1016/j.sna.2006.02.015
Yun SS, An JY, Moon SH, Lee JH (2009) In-plane microneedle chip fabricated by crystalline wet etching of (110) silicon wafer. IEEE Transducers 2009:204–207
Zahn JD, Talbot NH, Liepmann D, Pisano AP (2000) Microfabricated polysilicon microneedles for minimally invasive biomedical devices. Biomed Microdevices 2(4):295–303
Zhang P, Dalton C, Jullien GA (2009) Design and fabrication of MEMS-based microneedle arrays for medical applications. Microsyst Technol 15:1073–1082. doi:10.1007/s00542-009-0883-5
Acknowledgments
This work was supported by a grant from the BioNano Health-Guard Research Center, funded by the Ministry of Science, ICT and Future Planning (MSIP) of Korea as the Global Frontier Project (Grant Number H-GUARD_ERND2013M3A6B2078957) and IMSE, GIST.
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Jung, M., Jeong, D., Yun, SS. et al. Fabrication of a 2-D in-plane micro needle array integrated with microfluidic components using crystalline wet etching of (110) silicon. Microsyst Technol 22, 2287–2294 (2016). https://doi.org/10.1007/s00542-015-2596-2
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DOI: https://doi.org/10.1007/s00542-015-2596-2