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Multiwalled carbon nanotube-polyimide nanocomposite for MEMS piezoresistive pressure sensor applications

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Abstract

Multiwalled carbon nanotube (MWCNT)-polyimide (PI) nanocomposite was prepared with different MWCNT concentrations and characterized for their piezoresistive response. The morphology and mechanical behavior of the nanocomposite was investigated by scanning electron microscopy and force–displacement spectroscopy respectively. The surface conductivity of the nanocomposite was determined by atomic force microscopy in current mode. Studies reveal that this nanocomposite will be useful for strain-sensing element in micro electro mechanical system (MEMS)/nano electro mechanical system (NEMS) based piezoresistive pressure sensor applications. The study shows that the nanocomposite with 2 % MWCNT content is a unique piezoresistive sensing element for MEMS/NEMS pressure sensor.

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Acknowledgments

The Director, CSIR-CEERI, Pilani, Dr. Chandra Shekhar and Head of SNST, NIT Calicut, Dr. C. B. Sobhan are thanked for their constant support and encouragement.

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Authors and Affiliations

  1. Nanomaterials and Device Research Laboratory, School of Nano Science and Technology, NIT Calicut, Calicut, Kerala, India

    Kulwant Singh & Soney Varghese

  2. Sensors and Nanotechnology Group, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan, India

    Kulwant Singh & Jamil Akhtar

Authors
  1. Kulwant Singh
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  2. Jamil Akhtar
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  3. Soney Varghese
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Correspondence to Kulwant Singh.

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Singh, K., Akhtar, J. & Varghese, S. Multiwalled carbon nanotube-polyimide nanocomposite for MEMS piezoresistive pressure sensor applications. Microsyst Technol 20, 2255–2259 (2014). https://doi.org/10.1007/s00542-013-1927-4

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  • DOI: https://doi.org/10.1007/s00542-013-1927-4

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