Abstract
Femtosecond laser ablation is a promising method for producing polymeric microfluidic devices: it is a high precision processing technology resulting from an efficient energy deposition, while simultaneously minimizing heat conduction and thermal damage to the surrounding material. This work reports on the characterization of microchannels and waveguides fabricated by femtosecond laser technology in methacrylate-based polymers, precisely in thermoplastic poly(methyl methacrylate) (PMMA) and in a new material based on a high efficiency UV-curing process of methacrylic monomers bearing hydrophilic polyethylene glycol chains, namely tetraethylene glycol dimethacrylate and poly(ethylene glycol) methacrylate (PEG-MA). Microchannels in PMMA and PEG-MA, fabricated by parallel multi-scans, have sharp edges and low roughness, as investigated by Environmental Scanning Electron Microscopy and laser profilometer. Surface and physico-chemical properties after fs-laser processing were further studied by contact angle measurements and Attenuated Total Reflectance FTIR spectroscopy. Moreover, preliminary tests showed the refractive index of fs-laser PEG-MA exposed zones is different with respect to that of the surrounding polymer, suggesting that PEG-MA can be a good candidate to manufacture microfluidic devices containing integrated optic elements.
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References
Abgrall P, Gué AM (2007) Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem—a review. J Micromech Microeng 17:R15–R49
Bi HY, Meng S, Li Y, Guo K, Chen YP, Kong JL, Yang PY, Zhong W, Liu BH (2006) Deposition of PEG onto PMMA microchannel surface to minimize nonspecific adsorption. Lab Chip 6:769–775
Cassie ABD, Baxter S (1944) Wettability of porous surfaces. Trans Faraday Soc 40:546–551
Chen H, Yuan L, Song W, Wu Z, Li D (2008) Biocompatible polymer materials: role of protein-surface interactions. Progr Polym Sci 33:1059–1087
De Marco C, Eaton SM, Suriano R, Turri S, Levi M, Ramponi R, Cerullo G, Osellame R (2010) Surface properties of femtosecond laser ablated PMMA. ACS Appl Mater Interface 2:2377–2384
Gattass RR, Mazur E (2008) Femtosecond laser micromachining in transparent materials. Nat Photonics 2:219–225
Gomez D, Tekniker F, Goenaga I, Lizuain I, Ozaita M (2005) Femtosecond laser ablation for microfluidics. Opt Eng 44:051105
Lee JS, Ryu J, Park CB (2009) High-throughput analysis of Alzheimer’s beta-amyloid aggregation using a microfluidic self-assembly of monomersf. Anal Chem 81:2751–2759
Malek CGK (2006a) Laser processing for bio-microfluidics applications (part I). Anal Bioanal Chem 385:1351–1361
Malek CGK (2006b) Laser processing for bio-microfluidics applications (part II). Anal Bioanal Chem 385:1362–1369
Ming CH (1994) Polymer surface modification and characterization. Hanser Garden Publications, Cincinnatti
Obeid PJ, Christopoulos TK, Crabtree HJ, Backhouse CJ (2003) Microfabricated device for DNA and RNA amplification by continuous-flow polymerase chain reaction and reverse transcription-polymerase chain reaction with cycle number selection. Anal Chem 75:288–295
Schafer D, Gibson EA, Salim EA, Palmer AE, Jimenez R, Squier J (2009) Microfluidic cell counter with embedded optical fibers fabricated by femtosecond laser ablation and anodic bonding. Opt Express 17:6068–6073
Soper SA, Ford SM, Qi S, McCarley RL, Kelly K, Murphy MC (2000) Polymeric microelectromechanical systems. Anal Chem 72:642a–651a
Sowa S, Watanabe W, Tamaki T, Nishii J, Itoh K (2006) Symmetric waveguides in poly(methyl methacrylate) fabricated by femtosecond laser pulses. Opt Express 14:291–297
Sugino H, Ozaki K, Shirasaki Y, Arakawa T, Shoji S, Funatsu T (2009) On-chip microfluidic sorting with fluorescence spectrum detection and multiway separation. Lab Chip 9:1254–1260
Suriano R, Kuznetsov A, Eaton SM, Kiyan R, Cerullo G, Osellame R, Chichkov B, Levi M, Turri S (2011) Femtosecond laser ablation of polymeric substrates for the fabrication of microfluidic channels. Appl Surf Sci 257:6243–6250
Tachi T, Kaji N, Tokeshi M, Baba Y (2009) Simultaneous separation, metering, and dilution of plasma from human whole blood in a microfluidic system. Anal Chem 81:3194–3198
Turri S, Levi M, Emilitri E, Suriano R, Bongiovanni R (2010) Direct photopolymerisation of PEG-methacrylate oligomers for an easy prototyping of microfluidic structures. Macromol Chem Phys 211:879–887
Watanabe W, Sowa S, Tamaki T, Itoh K, Nishii J (2006) Three-dimensional waveguides fabricated in poly (methyl methacrylate) by a femtosecond laser. Jpn J Appl Phys 45:L765–L767
Wenzel RN (1949) Surface roughness and contact angle. J Phys Chem 53:1466–1467
Whitesides GM (2006) The origins and the future of microfluidics. Nature 442:368–373
Yung CW, Fiering J, Mueller AJ, Ingber DE (2009) Micromagnetic-microfluidic blood cleansing device. Lab Chip 9:1171–1177
Acknowledgments
This work was supported by the European Commission, FP7 Project Contract No. ICT-2007-224205 (microFLUID-micro-Fabrication of polymeric Lab-on-a-chip by Ultrafast lasers with Integrated optical Detection). We thank Dario Picenoni for the ESEM measurements.
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C. De Marco and R. Suriano contributed equally to this work.
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De Marco, C., Suriano, R., Levi, M. et al. Femtosecond laser fabrication and characterization of microchannels and waveguides in methacrylate-based polymers. Microsyst Technol 18, 183–190 (2012). https://doi.org/10.1007/s00542-011-1347-2
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DOI: https://doi.org/10.1007/s00542-011-1347-2