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A three-phased circular electrode array for electro-osmotic microfluidic pumping

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Abstract

A circular micro-electrode array with three phases is designed and prototyped using PolyMUMPs process for AC electro-osmotic flow pumping. Finite element model of the micro electrode array has been developed using COMSOL Multiphysics™. Performance of the electrode array is simulated and a double peak velocity phenomenon is found for this design, which is confirmed by experimental testing. Using ethanol as testing medium, the two time-averaged peak flow velocities are approximate 320 μm/s at 7 Hz and 850 μm/s at 100 Hz. It is found that the simulated and experimental results agree well.

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Authors and Affiliations

  1. Department of Mechanical and Materials Engineering, Queen’s University, Kingston, ON, K7L 3N6, Canada

    Kongying Xie, Yongjun Lai & Xin Guo

  2. Department of Ophthalmology, Queen’s University, Kingston, ON, K7L 3N6, Canada

    Rob J. Campbell

  3. Hotel Dieu Hospital, Kingston, ON, K7L 5G2, Canada

    Rob J. Campbell

Authors
  1. Kongying Xie
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  2. Yongjun Lai
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  3. Xin Guo
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  4. Rob J. Campbell
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Correspondence to Yongjun Lai.

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Xie, K., Lai, Y., Guo, X. et al. A three-phased circular electrode array for electro-osmotic microfluidic pumping. Microsyst Technol 17, 367–372 (2011). https://doi.org/10.1007/s00542-010-1204-8

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  • DOI: https://doi.org/10.1007/s00542-010-1204-8

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