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A three phase serpentine micro electrode array for AC electroosmotic flow pumping

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Abstract

A new three-phase electrode array with a serpentine electrode is designed and prototyped using PolyMUMPs process for micro flow pumping. Numerical model of the micropump has been developed using COMSOL Multiphysics™. Experimental testing is conducted and time-averaged flow velocities from testing and simulation agree well. Peak time-averaged flow velocity of 270 μm/s is achieved at 30 Hz using ethanol.

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Acknowledgments

Thanks go to CNIB and National Science and Engineering Research Council of Canada (NSERC) for their support.

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Authors and Affiliations

  1. Department of Mechanical and Materials Engineering, Queen’s University, Kingston, ON, K7L3N6, Canada

    Kongying Xie, Yongjun Lai & Xin Guo

  2. Department of Ophthalmology, Queen’s University, Kingston, ON, K7L3N6, Canada

    Rob J. Campbell

  3. Hotel Dieu Hospital, Kingston, ON, K7L5G2, Canada

    Rob J. Campbell

Authors
  1. Kongying Xie
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  2. Yongjun Lai
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  3. Xin Guo
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  4. Rob J. Campbell
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Corresponding author

Correspondence to Yongjun Lai.

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Xie, K., Lai, Y., Guo, X. et al. A three phase serpentine micro electrode array for AC electroosmotic flow pumping. Microsyst Technol 16, 1825–1830 (2010). https://doi.org/10.1007/s00542-010-1106-9

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  • DOI: https://doi.org/10.1007/s00542-010-1106-9

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