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The use of pulsed laser deposition to produce low-temperature barium titanate films on nickel tape and carbon fiber fabric

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Abstract

In order to explore the functionalization of wearable fabrics for power generation, barium titanate (BTO) was deposited on nickel tape and on carbon fiber fabric employing pulsed laser deposition (PLD) methods under conditions normally not considered ideal to produce optimum ferroelectric properties, namely, at temperatures as low as 100°C and under various oxygen partial pressures. The remnant charge polarization and film resistance properties were evaluated to determine the effect of the aforementioned deposition conditions. The P–V characterization indicates that the BTO films still retained ferroelectric properties down to 200°C, below which, the behavior was only paraelectric. Piezoelectric measurements were made with a resulting potential of 4 kV/m.

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Acknowledgments

We thank Dr. Dev Palmer, program manager of the U.S. Army Research Office for the financial support provided for this project. The cooperation of the staff at the MEMS Research Laboratory is also appreciated.

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Authors and Affiliations

  1. The University of Texas at San Antonio, One UTSA Circle, San Antonio, TX, 78249, USA

    G. Collins, D. Elam, R. Hackworth, R. Kotha, A. Ayon, A. Chabanov & C. L. Chen

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  1. G. Collins
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  2. D. Elam
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  3. R. Hackworth
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  4. R. Kotha
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  5. A. Ayon
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  6. A. Chabanov
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  7. C. L. Chen
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Correspondence to G. Collins.

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Collins, G., Elam, D., Hackworth, R. et al. The use of pulsed laser deposition to produce low-temperature barium titanate films on nickel tape and carbon fiber fabric. Microsyst Technol 17, 701–706 (2011). https://doi.org/10.1007/s00542-010-1157-y

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  • DOI: https://doi.org/10.1007/s00542-010-1157-y

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