Abstract
Generally, a group of sub-micron or nanometer sized optical phase shifters or modulators are used in an optical phased array (OPA) based scanner so as to selectively perturb wavefronts of outgoing laser beams. Similar to the concept of light propagation through a prism, an array of phase shifters is responsible for linearly delaying or advancing the propagating light waves. Optical phased array (OPA) systems have become an emerging technology for many applications due to the compact designs that eliminate the need for robust physical moving parts, leading to their fast response, high reliability, and low power requirements. Micromirror based OPA systems are fundamentally different than the conventional micromirror arrays that were being developed for numerous applications such as spectroscopy, digital light processing projectors, laser communication, and confocal microscopy. Those micromirror arrays provide significantly different motion types, actuation strokes, and operating speeds, due to the distinct task requirements by their target applications. Most of the previously designed conventional micromirror arrays are not suitable for high-speed laser beam steering at wide field of view due to either the large mirror sizes or the large array pitch sizes. MEMS based OPA systems generally demand narrow and tightly spaced suspended microstructures with high-aspect-ratio in lateral dimensions, rendering some significant challenges in the system design, fabrication, and integration. In addition, the scanners are required to generate hundreds to thousands of scan points along a far-field scan line which results in a large number of phase shifters in the arrays and high complexity in control.
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References
McManamon, P., et al. (2009). A review of phased array steering for narrow-band electrooptical systems. Proceedings of the IEEE, 97(6), 1078–1096.
McManamon, P. (2005). An overview of optical phased array technology and status. Liquid Crystals: Optics and Applications, 5947, 152–161.
Miller, S., Chang, Y., Phare, C., Shin, M., Zadka, M., Roberts, S., Stern, B., Ji, X., Mohanty, A., Gordillo, O., Dave, U., & Lipson, M. (2020). Large-scale optical phased array using a low-power multi-pass silicon photonic platform. Optica, 7, 3–6.
Davis, S., Farca, G., Rommel, S., Martin, A., & Anderson, M. (2008). Analog, non-mechanical beam-steerer with 80-degree field of regard. In Proceedings of SPIE acquisition, tracking, pointing, and laser systems technologies (vol. 6971).
Poulton, C., Byrd, M., Timurdogan, E., Russo, P., Vermeulen, D. & Watts, M. R. (2018). Optical phased arrays for integrated beam steering. In 2018 IEEE 15th international conference on group IV photonics (GFP), Cancun.
Poulton, C., Yaccobi, A., Su, Z., Byrd, M., & Watts, M. (2016). Optical phased array with small spot size, high steering range and grouped cascaded phase shifters. In Advanced photonics 2016, optical society of America, paper IW1B.2.
Han, X., et al. (2021). Solid-state photonics-based lidar with large beam-steering angle by seamlessly merging two orthogonally polarized beams. IEEE Journal of Selected Topics in Quantum Electronics, 27(1), 1–8.
Yoo, B., Megens, M., Chan, T., Sun, T., Yang, W., Chang-Hasnain, C., Horsley, D., & Wu, M. (2013). Optical phased array using high contrast gratings for two-dimensional beamforming and beam-steering. Optics Express, 21, 12238–12248.
Wang, Y., & Wu, M. (2017). Micromirror based optical phased array for wide-angle beam steering. In IEEE 30th international conference on micro electromechanical systems (MEMS), January 2017.
Liang, Wu., et al. (2016). Steering performance of oblique arriving beam backward propagating through one-dimensional liquid crystal optical phased array. Optical Engineering, 55(11), 116115.
Sun, J., et al. (2014). Large-scale silicon photonic circuits for optical phased arrays. IEEE Journal of Selected Topics in Quantum Electron., 20(4), 264–278.
Yaacobi, A. (2015). Integrated optical phased arrays for lidar applications. Ph. D. Thesis, Massachusetts Institute of Technology, Department of Materials Science and Engineering.
Acoleyen, K., et al. (2010). Two-dimensional optical phased array antenna on silicon-on-insulator. Optical Express, 18(13), 13655–13660.
Wang, Y., & Wu, M. (2017). Optical micro electrical mechanical phased array, optical MEMS, nanophotonics, and their applications. CRC Press.
Martin, A., et al. (2018). Photonic integrated circuit-based FMCW coherent LiDAR. Journal of Lightwave Technology, 36(19), 4640–4645.
Chung, S., Abediasl, H., & Hashemi, H. (2017). 15.4 A 1024-element scalable optical phased array in 0.18 µm SOI CMOS. In 2017 IEEE international solid-state circuits conference (ISSCC), San Francisco, CA (pp. 262–263).
Heck, M. (2017). Highly integrated optical phased arrays: Photonic integrated circuits for optical beam shaping and beam steering. Nanophotonics, 6(1), 93–107.
Wang, D., Watkins, C., & Xie, H. (2020). MEMS mirrors for LiDAR: A review. Micromachines, 11, 456.
Wu, M. C. (2014). DARPA SWEEPER final technical report, award number: HR0011-10-2-0002, National Technical Reports Library.
Chan, T., Megens, M., Yoo, B., Wyras, J., Chang-Hasnain, C., Wu, M., & Horsley, D. (2013). Optical beam steering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control. Optics Express, 21, 2807–2815.
Megens, M., Yoo, B., & Wu, M. (2014). High contrast grating MEMS optical phase shifters for two-dimensional free space beam steering. Proceedings of SPIE, 8995(1–8), 89950Q.
Wang, Y., Yu, K., & Wu, M. (2016). MEMS optical phased array for LIDAR. In 21st micro-optics conference (MOC’16), Berkeley, California, USA, Oct. 12–14, 2016.
Wang, X., Wang, B., Bos, P., Anderson, J. & McManamon, P. (2004). 2-D liquid crystal optical phased array. In 2004 IEEE aerospace conference proceedings (IEEE Cat. No.04TH8720), Big Sky, MT, USA (vol. 2, pp. 905–913).
Sun, J., Timurdogan, E., Yaacobi, A., Hosseini, E., & Watts, M. (2013). Large-scale nano-photonic phased array. Nature, 493, 195–199.
Wang, Y., Zhou, G., Zhang, X., Kwon, K., Blanche, P., Triesault, N., Yu, K., & Wu, M. (2019). 2D broadband beam-steering with large-scale MEMS optical phased array. Optica, 6, 557–562.
Zappe, H. (2010). Fundamentals of micro-optics. Cambridge University Press.
Solgaard, O., & Microsystems, P. (2009). Photonic Microsystems: micro and nanotechnology applied to optical devices and system. Springer.
Mohammad, T., He, S., & Mrad, R. B. (2021). A MEMS optical phased array based on pitch tunable silicon micromirrors for LiDAR scanners. Journal of Microelectromechanical Systems, 30(5), 712–724.
Lobontiu, N., & Garcia, E. (2005). Mechanics of microelectromechanical systems. Springer.
Cowen, A., Hardy, B., Mahadevan, R., & Wilcenski, S. (2011). PolyMUMPs design handbook. MEMSCAP Inc.
Kubby, J. (2011). A guide to hands-on MEMS design and prototyping. Cambridge University Press.
Wang, Y., & Wu, M. (2017). Micromirror based optical phased array for wide-angle beam steering. In 2017 IEEE 30th international conference on micro electromechanical systems (MEMS), Las Vegas, NV, USA, 2017 (pp. 897–900).
Zhou, G., & Lee, C. (2017). Optical MEMS, nanophotonics, and their applications. CRC Press.
Tormen, M., et al. (2006). Deformable MEMS grating for wide tunability and high operating speed. Journal of Optics A: Pure and Applied Optics, 8, S337.
Shih, W., Kim, S., & Barbastathis, G. (2006). High-resolution electrostatic analog tunable grating with a single-mask fabrication process. Journal of Microelectromechanical Systems, 15(4), 763–769.
Muttikulangara, S., Baranski, M., Rehman, S., Hu, L., & Miao, J. (2017). MEMS tunable diffraction grating for space borne imaging spectroscopic applications. Sensors, 17(2372), 1–13.
Wang, Y., Kanamori, Y., & Hane, K. (2009). Pitch-variable blazed grating consisting of freestanding silicon beams. Optics Express, 17(6), 4419–4426.
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Mohammad, T. Micromirror Arrays as Optical Phase Modulators for Free-Space Beam Steering. Sens Imaging 24, 26 (2023). https://doi.org/10.1007/s11220-023-00433-6
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DOI: https://doi.org/10.1007/s11220-023-00433-6