1 Erratum to: Microsyst Technol (2008) 14:1263–1267 DOI 10.1007/s00542-007-0521-z

Unfortunately, an error occured in the author affiliations.

The correct affiliations are given below.

C.-H. Lin · F.-Y. Chang · S.-H. Chang

Mechanical and System Laboratories, Industrial Technology Research Institute, Hsinchu, Taiwan 310, Republic of China

H. Yang (✉) · M.-T. Yen

Institute of Precision Engineering, National Chung Hsing University, Taichung, Taiwan 402, Republic of China

e-mail: hsiharng@nchu.edu.tw