Abstract
Microchannels are very important components of the micro-fluidic systems. A novel method for fabrication of microchannels is presented in this paper. The microstructures for fluidic application is constructed by UV or X-ray lithography in positive resist and closed in crosslinked negative resist. This process can be used to fabricate high precise, complex microchannels due to the high precise microstructures of positive photoresist and the complex three-dimensional lithography. The optical transparent microchannels are suitable for optical measurements of the fluid flow and the profile of microchannels.
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Liu, G., Tian, Y. & Zhang, X. Fabrication of microchannels in negative resist. Microsystem Technologies 9, 461–464 (2003). https://doi.org/10.1007/s00542-002-0258-7
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DOI: https://doi.org/10.1007/s00542-002-0258-7