Summary
In atomic force microscopy (AFM) high-performance and high precision control of the scanning-system is crucial. At high imaging speeds the dynamic behaviour of the scanner may cause imaging artefacts limiting the maximum imaging rate. This contribution discusses recent improvements for faster imaging by utilizing modern mechatronic and control engineering methods.
Zusammenfassung
Für die Rasterkraftmikroskopie (AFM) ist eine schnelle und hochpräzise Führung der AFM-Positioniereinheit und Messspitze ausschlaggebend. Besonders bei hohen Scangeschwindigkeiten führt die Dynamik der AFM-Positioniereinheit zu Abbildungsartefakten, wodurch die maximale Messgeschwindigkeit und Bildqualität eingeschränkt wird. In diesem Artikel werden moderne Ansätze diskutiert, welche zu einer signifikanten Steigerung der Messgeschwindigkeiten führen.
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Steininger, J., Kuiper, S., Ito, S. et al. Schnelle Rasterkraftmikroskopie durch moderne Regelungstechnik und mechatronische Systemintegration. Elektrotech. Inftech. 129, 28–33 (2012). https://doi.org/10.1007/s00502-012-0070-8
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DOI: https://doi.org/10.1007/s00502-012-0070-8