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Monomode channel waveguide in KTiOPO4 crystal produced by Rb+ ion exchange combined with Si+ ion implantation

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Abstract

A novel ion exchanged channel KTiOPO4 waveguide formation technique is introduced, which can avoid a metal mask being dissolved in an ion exchanged molten salt. Rb+ ion exchange (340°C, 30 min) was first applied to a KTP sample to produce a planar waveguide substrate, and then Si+ ion implantation (3.0 MeV and 1.5 MeV with doses of 1×1015 ions/cm2 and 6×1014 ions/cm2, respectively) was carried out to construct channel stripes on the planar waveguide surface that has been deposited by a specially designed photoresist mask. The two-dimensional cross sectional refractive index profile of the channel waveguide was reconstructed by considering the shape of the channel waveguide as well as the index distribution of the planar waveguide.

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Authors and Affiliations

  1. Department of Physics, Jining University, Qufu, 273155, China

    L.-L. Wang

  2. School of Physics, Shandong University, Jinan, 250100, China

    K.-M. Wang

  3. Institute of Automation, Shandong Academy of Sciences, Jinan, 250100, China

    X.-Z. Liu

  4. School of Chemistry and Chemical Engineering, Shandong University, Jinan, 250100, China

    Q.-M. Lu

Authors
  1. L.-L. Wang
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  2. K.-M. Wang
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  3. X.-Z. Liu
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  4. Q.-M. Lu
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Correspondence to L.-L. Wang.

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Wang, LL., Wang, KM., Liu, XZ. et al. Monomode channel waveguide in KTiOPO4 crystal produced by Rb+ ion exchange combined with Si+ ion implantation. Appl. Phys. B 99, 203–207 (2010). https://doi.org/10.1007/s00340-010-3935-8

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  • DOI: https://doi.org/10.1007/s00340-010-3935-8

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