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Immersion transmission ellipsometry (ITE): a new method for the precise determination of the 3D indicatrix of thin films

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Abstract

The new method of immersion transmission ellipsometry (ITE) [1] has been developed. It allows the highly accurate determination of the absolute three-dimensional (3D) refractive indices of anisotropic thin films. The method is combined with conventional ellipsometry in transmission and reflection, and the thickness determination of anisotropic films solely by optical methods also becomes more accurate. The method is applied to the determination of the 3D refractive indices of thin spin-coated films of an azobenzene-containing liquid-crystalline copolymer. The development of the anisotropy in these films by photo-orientation and subsequent annealing is demonstrated. Depending on the annealing temperature, oblate or prolate orders are generated.

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  1. Science Campus Golm, Fraunhofer Institute of Applied Polymer Research, Geiselbergstr. 69, 14476, Potsdam, Germany

    C.C. Jung & J. Stumpe

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  1. C.C. Jung
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  2. J. Stumpe
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Correspondence to C.C. Jung.

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PACS

07.60.Fs; 42.70.Gi; 78.66.Qn

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Jung, C., Stumpe, J. Immersion transmission ellipsometry (ITE): a new method for the precise determination of the 3D indicatrix of thin films. Appl. Phys. B 80, 231–238 (2005). https://doi.org/10.1007/s00340-004-1695-z

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  • DOI: https://doi.org/10.1007/s00340-004-1695-z

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