Abstract.
The recently discovered dynamical diffraction effect ‘neutron camel’ was used for residual stress measurements in a thick Si (111) crystal coated with a 2000 Å-thick Ni film. The observed asymmetry of the back-face rocking curve corresponds to the bending radius of ∼19 km and the tension force applied to the Ni film is ∼90 N/m. Relative deformation of the Si crystallographic cells in the vicinity of diffractive surfaces is |∂uz/∂z|≈1.6×10-6.
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Received: 18 July 2001 / Accepted: 24 October 2001
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ID="*"Corresponding author. (Fax: +1-630/252-4163, E-mail: magamalian@anl.gov) Present address: Argonne National Laboratory, IPNS, Bldg. 360, 9700 S. Cass Ave., Argonne, IL 60439, USA.
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Agamalian, M., Iolin, E., Kaiser, H. et al. A new dynamical diffraction-based technique of residual stress measurements in thin films . Appl Phys A 74 (Suppl 1), s1686–s1688 (2002). https://doi.org/10.1007/s003390101263
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DOI: https://doi.org/10.1007/s003390101263