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Determination of thermal conductivity of CVD diamond films via photoacoustic measurements

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Abstract.

A novel method of determination of polycrystalline diamond films’ thermoconductive properties using the photoacoustic effect is proposed. By this method, we studied the diamond films grown on silicon substrates using chemical vapor deposition technique. A value of thermal conductivity obtained for the films was less than half that for diamond single crystal. The decrease of thermal conductivity, as well as characteristic features of optical properties of the films, is explained by the presence of a large amount of intercrystallite boundaries and other structure defects and admixures detected using Raman and photoluminescent spectroscopies.

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Authors and Affiliations

  1. Physics Department of Moscow State University, 119899 Moscow, Russia, , , , , , RU

    A.N. Obraztsov & I.Yu. Pavlovsky

  2. General Physics Institute of Russian Academy of Sciences, 117942 Moscow, Russia, , , , , , RU

    V.G. Ralchenko

  3. Electrotechnical Laboratory, Tsukuba, lbaraki 305, Japan, , , , , , JP

    H. Okushi & H. Watanabe

Authors
  1. A.N. Obraztsov
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  2. I.Yu. Pavlovsky
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  3. V.G. Ralchenko
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  4. H. Okushi
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  5. H. Watanabe
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Additional information

Received: 22 October 1998 / Accepted: 27 January 1999 / Published online: 28 April 1999

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Obraztsov, A., Pavlovsky, I., Ralchenko, V. et al. Determination of thermal conductivity of CVD diamond films via photoacoustic measurements . Appl Phys A 68, 663–666 (1999). https://doi.org/10.1007/s003390050957

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  • DOI: https://doi.org/10.1007/s003390050957

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