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Transducer properties of AFM microprobes conformally covered by ALE-deposited SnO2 thin films

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thin films. The study showed that by applying very thin film (30 nm SnO2 in this study) the transducer influences on force sensing can be neglected. However, even much thicker (470 nm SnO2) overlayers can be used if the coating influence on the optical and mechanical properties of the cantilever is sufficiently taken into account.

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Authors and Affiliations

  1. Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, FIN-02015 Espoo, Finland, , , , , , FI

    M. Utriainen & L. Niinistö

  2. Laboratory of Inorganic Chemistry, University of Helsinki, P.O. Box 55, FIN-00014 Helsinki, Finland, , , , , , FI

    R. Matero

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  1. M. Utriainen
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  2. L. Niinistö
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  3. R. Matero
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Received: 3 August 1998 / Accepted: 3 November 1998

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Utriainen, M., Niinistö, L. & Matero, R. Transducer properties of AFM microprobes conformally covered by ALE-deposited SnO2 thin films . Appl Phys A 68, 339–342 (1999). https://doi.org/10.1007/s003390050899

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  • DOI: https://doi.org/10.1007/s003390050899

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