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Crystallization kinetics of amorphous aluminum–tungsten thin films

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W18 to Al62W38 compounds ranged from 800 K to 920 K. The activation energy for the crystallization and the Avrami exponent were determined. The results indicated that the crystallization mechanism in films with higher tungsten content was a diffusion-controlled process, whereas in films with the composition similar to the stoichiometric compound (Al4W), the interface-controlled crystallization probably occurred.

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Received: 30 March 1998/Accepted: 9 September 1998

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Car, T., Radić, N., Ivkov, J. et al. Crystallization kinetics of amorphous aluminum–tungsten thin films . Appl Phys A 68, 69–73 (1999). https://doi.org/10.1007/s003390050855

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  • DOI: https://doi.org/10.1007/s003390050855

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