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Ablation morphology and characteristic analysis of anisotropic conductive film (ACF) using femtosecond lasers with NIR, Green, and DUV wavelengths for micro-LED display repair

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Abstract

Anisotropic conductive film (ACF) is an electrical and electronic material composed of conductive balls embedded in a polymer matrix. ACF plays a crucial role in connecting electrodes and chips in Micro-LEDs. It serves as the target material in the repair process, enhancing production yield. For the application of ACF in the Micro-LED display repair process, flawless selective micro-ablation is essential. However, little research related to ACF micro-ablation has been conducted so far. In this study, we investigated a detailed analysis of the ablation area and defects in ACF by using femtosecond lasers with three different wavelengths: 1026 nm (NIR), 513 nm (Green), and 257 nm (DUV) for selective micro-ablation. By conducting a comparative analysis of these wavelengths, we determined that the optimal ablation results were achieved using a 257 nm wavelength femtosecond laser. These results exhibited no-defect, uniform, reproducible, and symmetrical ablation characteristic, making it suitable for the Micro-LED display repair process. This research is expected to establish the foundation for micro-ablation in all applications where ACF is employed.

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Data Availability

The data that support the findings of this study are available from the corresponding author upon reasonable request.

References

  1. I. Mirza, N.M. Bulgakova, J. Tomáštík, V. Michálek, O. Haderka, L. Fekete, T. Mocek, Sci. Rep. 6, 39133 (2016)

    ADS  PubMed  PubMed Central  CAS  Google Scholar 

  2. N.N. Nedialkov, S.E. Imamova, P.A. Atanasov, J. Phys. D Appl. Phys. 37, 638 (2004)

    ADS  CAS  Google Scholar 

  3. D. Ashkenasi, G. Müller, A. Rosenfeld, R. Stoian, I.V. Hertel, N.M. Bulgakova, E.E.B. Campbell, Appl. Phys. A Mater. Sci. Process. 77, 223 (2003)

    ADS  CAS  Google Scholar 

  4. B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tünnermann, Appl. Phys. A 63, 109 (1996)

    ADS  Google Scholar 

  5. S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B.N. Chichkov, B. Wellegehausen, H. Welling, J. Opt. Soc. Am. B 14, 2716 (1997)

    ADS  CAS  Google Scholar 

  6. K. Sugioka, Y. Cheng, Appl. Phys. Rev. 1, 041303 (2014)

    ADS  Google Scholar 

  7. K. Sugioka, Y. Cheng, Lab Chip 12, 3576 (2012)

    PubMed  CAS  Google Scholar 

  8. P.P. Pronko, S.K. Dutta, J. Squier, J.V. Rudd, D. Du, G. Mourou, Opt. Commun. 114, 106 (1995)

    ADS  CAS  Google Scholar 

  9. K. Sugioka, Y. Cheng, Light Sci. Appl. 3, e149 (2014)

    ADS  CAS  Google Scholar 

  10. Y. Yamamuro, T. Shimoyama, and J. Yan, Int. J. of Precis. Eng. Manuf.- Green Tech. 9, 619 (2022).

  11. B. Kim, H. K. Nam, S. Watanabe, S. Park, Y. Kim, Y. J. Kim, K. Fushinobu, and S. W. Kim, Int. J. of Precis. Eng. Manuf.- Green Tech. 8, 771 (2021).

  12. H. M. Lee, J. H. Choi, and S. J. Moon, Int. J. of Precis. Eng. Manuf.- Green Tech. 8, 375 (2021).

  13. Y.G. Shin, J. Choi, S.H. Cho, Appl. Phys. A 129, 534 (2023)

    ADS  CAS  Google Scholar 

  14. Y.G. Shin, S.Y. Ji, J. Choi, S.H. Cho, Appl. Phys. A 128, 828 (2022)

    CAS  Google Scholar 

  15. S.M. Chang, J.H. Jou, A. Hsieh, T.H. Chen, C.Y. Chang, Y.H. Wang, C.M. Huang, Microelectron. Reliab. 41, 2001 (2001)

    Google Scholar 

  16. K. Ishibashi, J. Kimura, IEEE Trans. Components Packag. Manuf. Technol. Part B 19, 752 (1996)

    CAS  Google Scholar 

  17. M.J. Yim, J.S. Hwang, J.G. Kim, J.Y. Ahn, H.J. Kim, W. Kwon, K.W. Paik, J. Electron. Mater. 33, 76 (2004)

    ADS  CAS  Google Scholar 

  18. S. Kim, Y. Kim, Curr. Appl. Phys. 13, S14 (2013)

    ADS  Google Scholar 

  19. Y. Huang, E.L. Hsiang, M.Y. Deng, S.T. Wu, Light Sci. Appl. 9, 105 (2020)

    ADS  PubMed Central  CAS  Google Scholar 

  20. T. Wu, C.W. Sher, Y. Lin, C.F. Lee, S. Liang, Y. Lu, S.W.H. Chen, W. Guo, H.C. Kuo, Z. Chen, Appl. Sci. 8, 1557 (2018)

    Google Scholar 

  21. Y. Huang, G. Tan, F. Gou, M.C. Li, S.L. Lee, S.T. Wu, J. Soc. Inf. Disp. 27, 387 (2019)

    Google Scholar 

  22. L.A. Harvilchuck, P.I. Presunka, J.H. Cconstable, IEEE Trans. Electron. Packag. Manuf. 23, 277 (2000)

    Google Scholar 

  23. J. Choi, S.H. Cho, Int. J. Precis. Eng. Manuf. 24, 1975 (2023)

    Google Scholar 

  24. J. Choi, K. Cho, S. Ji, W. Chang, S. Chang, S. Cho, J. Laser Micro Nanoeng. 18, 3 (2023)

    Google Scholar 

  25. Y. Shin, W. Choi, J. Choi, S. Cho, J. Micro Nano-Manuf. 9, 041002 (2021)

    CAS  Google Scholar 

  26. Y.G. Shin, J. Choi, S.H. Cho, Int. J. Precis. Eng. Manuf. 24, 547 (2023)

    Google Scholar 

  27. J. Bonse, S. Höhm, S.V. Kirner, A. Rosenfeld, J. Krüger, IEEE, J. Sel. Top. Quantum Electron. 23, 900615 (2017)

    Google Scholar 

  28. M. Huang, F. Zhao, Y. Cheng, N. Xu, Z. Xu, ACS Nano 3, 4062 (2009)

    PubMed  CAS  Google Scholar 

  29. J. Bonse, A. Rosenfeld, J. Krüger, J. Appl. Phys. 106, 104910 (2009)

    ADS  Google Scholar 

  30. J.M. Fernández-Prada, C. Florian, F. Caballero-Lucas, J.L. Morenza, P. Serra, Appl. Surf. Sci. 278, 185 (2013)

    ADS  Google Scholar 

  31. Y. Assaf, A.M. Kietzig, Mater. Today Commun. 14, 169 (2018)

    CAS  Google Scholar 

  32. S. Baudach, J. Bonse, J. Krüger, W. Kautek, Appl. Surf. Sci. 154, 555 (2000)

    ADS  Google Scholar 

  33. C. De Marco, S.M. Eaton, R. Suriano, S. Turri, M. Levi, R. Ramponi, G. Cerullo, R. Osellame, A.C.S. Appl, Mater. Interfaces. 2, 2377 (2010)

    Google Scholar 

  34. L.F. Nassier, M.H. Shinen, Mater. Today Proc. 60, 1660 (2022)

    CAS  Google Scholar 

  35. K. Yin, C. Wang, X. Dong, Y. Song, Appl. Phys. A 122, 764 (2016)

    ADS  Google Scholar 

  36. F. Zhang, X. Dong, K. Yin, Y. Song, Y. Tian, C. Wang, J. Duan, Opt. Laser Technol. 100, 256 (2018)

    ADS  CAS  Google Scholar 

  37. R. K. Bedi, D. Pathak, Deepak, and D. Kaur, (Z. Kristallogr. Suppl. 27, 2008), p.177–183

  38. D. Pathak, S. Kumar, S. Andotra, J. Thomas, N. Kaur, P. Kumar, V. Kumar, Eur. Phys. J. Appl. Phys. 95, 10201 (2021)

    ADS  CAS  Google Scholar 

  39. http://www.hnshightech.com/

  40. J.M. Liu, R. Yen, H. Kurz, N. Bloembergen, Appl. Phys. Lett. 39, 755 (1981)

    ADS  CAS  Google Scholar 

  41. J.M. Liu, Opt. Lett. 7, 196 (1982)

    ADS  PubMed  CAS  Google Scholar 

  42. D. Bäuerle, M. Himmelbauer, E. Arenholz, J. Photochem. Photobiol. A Chem. 106, 27 (1997)

    Google Scholar 

  43. D. Pham, L. Tonge, J. Cao, J. Wright, M. Papiernik, E. Harvey, D. Nicolau, Smart Mater. Struct. 11, 668 (2002)

    ADS  CAS  Google Scholar 

  44. A.Y. Malyshev, N.M. Bityurin, Quantum. Elec. 35, 825 (2005)

    ADS  CAS  Google Scholar 

  45. C. Cheng, X. Xu, Phys. Rev. B 72, 165415 (2005)

    ADS  Google Scholar 

  46. J.P. Colombier, P. Combis, R. Stoian, E. Audouard, Phys. Rev. B 75, 104105 (2007)

    ADS  Google Scholar 

  47. F. Korte, S. Nolte, B.N. Chichkov, T. Bauer, G. Kamlage, T. Wagner, C. Fallnich, H. Welling, Appl. Phys. A Mater. Sci. Process. 69, S7 (1999)

    ADS  CAS  Google Scholar 

  48. Y. Gan, J.K. Chen, J. Appl. Phys. 108, 103102 (2010)

    ADS  Google Scholar 

  49. T. Masubuchi, H. Furutani, H. Fukumura, H. Masuhara, ChemPhysChem 1, 137 (2000)

    PubMed  CAS  Google Scholar 

  50. T. Masubuchi, H. Furutani, H. Fukumura, H. Masuhara, J. Phys. Chem. B 105, 2518 (2001)

    CAS  Google Scholar 

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Authors and Affiliations

  1. Department of Nano-Mechatronics, Korea University of Science and Technology, Daejeon, South Korea

    Junha Choi, Kwangwoo Cho & Sung-Hak Cho

  2. Department of Nano-Manufacturing Technology, Nano-Convergence Manufacturing Systems Research Division, Korea Institute of Machinery and Material, Daejeon, South Korea

    Junha Choi, Kwangwoo Cho & Sung-Hak Cho

  3. AYIN Technology, Suwon, South Korea

    Kwangwoo Cho

Authors
  1. Junha Choi
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  2. Kwangwoo Cho
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  3. Sung-Hak Cho
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Contributions

Junha Choi and Sung-Hak Cho conceived of the presented idea. Junha Choi developed the theory and performed the experiments. Junha Choi and Sung-Hak Cho verified the analytical methods. Kwangwoo Cho and Sung-Hak Cho encouraged Junha Choi to investigate the research and supervised the findings of this work. All authors discussed the results and contributed to the final manuscript.

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Correspondence to Sung-Hak Cho.

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Choi, J., Cho, K. & Cho, SH. Ablation morphology and characteristic analysis of anisotropic conductive film (ACF) using femtosecond lasers with NIR, Green, and DUV wavelengths for micro-LED display repair. Appl. Phys. A 130, 140 (2024). https://doi.org/10.1007/s00339-024-07287-z

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