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Elaboration and characterization of a-SiC nanowires for CO2 sensor

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Abstract

This work presents the formation and characterization of amorphous silicon carbide nanowires (ASCNW) for an application as CO2 gas sensor. The preparation of the ASCNW structure required two stages, the first one consisted on the formation of Si nanowires on p-type silicon (p-Si) with low resistivity, by chemical etching assisted by a metal (Ag), where the second concerned the deposition of hydrogenated amorphous SiC thin films of on silicon nanowires (SNW), by RF magnetron sputtering, with varied thicknesses ranging between 2 and 60 nm. To study the structural and optical properties of ASCNW, different characterization techniques were used, such as scanning electron microscope (SEM) and photoluminescence (PL). The results show the formation of ASCNW with a high intensity of photoluminescence. In order to investigate the large specific surface area and great stability, the ASCNW-based structures were used as a detection device for gases, such as CO2. In light of the obtained results, it was found that the structure of the ASCNW presented an improved and extremely stable detection performance compared to previous results and could be promising for the construction of an efficient gas sensor device.

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References

  1. M.A. Jackson, I. Robins, Gas sensing for fire detection: measurements of CO, CO2, H2, O2, and smoke density in European standard fire tests. Fire Saf. J. 22, 181–205 (1994). https://doi.org/10.1016/0379-7112(94)90072-8

    Article  Google Scholar 

  2. G. Speranza, Carbon nanomaterials: synthesis functionalization and sensing applications. Nanomaterials 11, 967 (2021). https://doi.org/10.3390/nano11040967

    Article  Google Scholar 

  3. R.S. Pessoa, M.A. Fraga, L.V. Santos, M. Massi, H.S. Maciel, Nanostructured thin films based on TiO2 and/or SiC for use in photoelectrochemical cells: a review of the material characteristics, synthesis and recent applications. Mater. Sci. Semicond. Process. 29, 56–68 (2015). https://doi.org/10.1016/j.mssp.2014.05.053

    Article  Google Scholar 

  4. J.-X. Zhao, Y.-H. Ding, Can silicon carbide nanotubes sense carbon dioxide? J. Chem. Theory Comput. 5, 1099–1105 (2009). https://doi.org/10.1021/ct9000069

    Article  Google Scholar 

  5. L.A. Golovan, A.A. Sokolov, V.Y. Timoshenko, Increase in the lifetime of a photon and in the efficiency of Raman scattering and second-harmonic generation processes in porous silicon carbide. JETP Lett. 101, 793–797 (2015). https://doi.org/10.1134/S0021364015120085

    Article  ADS  Google Scholar 

  6. M.E. Kompan, I.G. Aksyanov, I. V. Kul’kova, , Luminescence spectra of hexagonal forms of silicon carbide in mosaic films grown by solid-state epitaxy. Phys. Solid State 51, 2469 (2009). https://doi.org/10.1134/S1063783409120075

    Article  Google Scholar 

  7. S.A. Kukushkin, A.V. Osipov, M.M. Rozhavskaya, Growth and structure of GaN layers on silicon carbide synthesized on a Si substrate by the substitution of atoms: a model of the formation of V-defects during the growth of GaN. Phys. Solid State 57, 1899–1907 (2015). https://doi.org/10.1134/S1063783415090218

    Article  ADS  Google Scholar 

  8. Z.S. Wu, S.Z. Deng, N.S. Xu, J. Chen, J. Zhou, Needle-shaped silicon carbide nanowires: synthesis and field electron emission properties. J. Chen. Appl. Phys. Lett. 80, 382 (2002). https://doi.org/10.1063/1.1476703

    Article  Google Scholar 

  9. M. Lu, A. Li, T. Wang, D. Wang, W. Qin, Synthesis of bamboo-like 3C-SiC nanowires by microwave assisted carbothermal reduction. J. Nanosci. Nanotechnol. 10, 2135 (2010). https://doi.org/10.1166/jnn.2010.2093

    Article  Google Scholar 

  10. H. Liu, G. She, L. Mu, W. Shi, Porous SiC nanowire arrays as stable photocatalyst for water splitting under UV irradiation. Mater. Res. Bull. 47, 917–920 (2012). https://doi.org/10.1016/j.materresbull.2011.12.046

    Article  Google Scholar 

  11. K. Zekentes, K. Rogdakis, SiC nanowires: material and devices. J. Phys. D Appl. Phys. 44, 133001 (2013). https://doi.org/10.1088/0022-3727/44/13/133001

    Article  ADS  Google Scholar 

  12. E.W. Wong, P.E. Sheeban, C.M. Lieber, Nanobeam mechanics: elasticity, strength, and toughness of nanorods and nanotubes. Science 277, 1971 (1997). https://doi.org/10.1126/science.277.5334.1971

    Article  Google Scholar 

  13. A.V. Pavlikov, N.V. Latukhin, V.I. Chepurnov, VYu. Timoshenko, Structural and optical properties of silicon-carbide nanowires produced by the high-temperature carbonization of silicon nanostructures. Semiconductors 51(3), 402–406 (2017). https://doi.org/10.1134/S106378261703023X

    Article  ADS  Google Scholar 

  14. S. Kaci, A. Keffous, S. Hakoum, A. Manseri, Hydrogen sensitivity of the sensors based on nanostructured lead sulfide thin films deposited on a-SiC: H and p-Si (100) substrates. Vacuum 116, 27–30 (2015). https://doi.org/10.1016/j.vacuum.2015.02.024

    Article  ADS  Google Scholar 

  15. A. Keffous, A. Cheriet, T. Hadjersi, Y. Boukennous, N. Gabouze, A. Boukezzata, Y. Belkacem, M. Kechouane, T. Kerdja, H. Menari, M. Berouaken, L. Talbi, Y. Ouadah, 40 Å Platinum–porous SiC gas sensor: investigation sensing properties of H2 gas. Phys. B 408, 193–197 (2013). https://doi.org/10.1016/j.physb.2012.09.036

    Article  ADS  Google Scholar 

  16. A. Keffous, N. Gabouze, A. Cheriet, Y. Belkacem, A. Boukezzata, Investigation of porous silicon carbide as a new material for environmental and optoelectronic applications. Appl. Surf. Sci. 256, 5629–5639 (2010). https://doi.org/10.1016/j.apsusc.2010.03.029

    Article  ADS  Google Scholar 

  17. M. Akbari-Saatlu, M. Procek, C. Mattsson, G. Thungström, H.-E. Nilsson, W. Xiong, B. Xu, Y. Li, H.H. Radamson, Silicon nanowires for gas sensing: a review. Nanomaterials 10, 2215 (2020). https://doi.org/10.3390/nano10112215

    Article  Google Scholar 

  18. J. Chen, J. Zhang, M. Wang, Y. Li, High-temperature hydrogen sensor based on platinum nanoparticle-decorated SiC nanowire device. Sens. Actuators B: Chem. 201, 402–406 (2014). https://doi.org/10.1016/j.snb.2014.04.068

    Article  Google Scholar 

  19. A. Boukezzata, H. Menari, S. Kaci, Al-Assisted photochemical etching of a-SiC thin films for NH3 sensor. Acta Phys. Polon. A 137, 454 (2020). https://doi.org/10.12693/APhysPolA.137.454

    Article  ADS  Google Scholar 

  20. N. Brahiti, T. Hadjersi, S. Amirouche, H. Menari, O. ElKechai, Photocatalytic degradation of cationic and anionic dyes in water using hydrogen-terminated silicon nanowires as catalyst. Int. J. Hydrog. Energy. 43, 11411–11421 (2018). https://doi.org/10.1016/j.ijhydene.2018.02.141

    Article  Google Scholar 

  21. E. Chen, G. Du, Y. Zhang, X. Qin, H. Lai, W. Shi, RF-PECVD deposition and optical properties of hydrogenated amorphous silicon carbide thin films. Ceram. Int. 40, 9791–9797 (2014). https://doi.org/10.1016/j.ceramint.2014.02.067

    Article  Google Scholar 

  22. R. Saleh, L. Munisa, W. Beyer, Infrared absorption in a-SiC: H alloy prepared by d.c. sputtering. Thin Solid Films 426, 117–123 (2003). https://doi.org/10.1016/S0040-6090(03)00003-8

    Article  ADS  Google Scholar 

  23. T. Friessnegg, M. Boudreau, P. Mascher, A. Knights, P.J. Simpson, W. Puff, Defect structure of carbon rich a-SiC: H films and the influence of gas and heat treatments. J. Appl. Phys. 84, 786 (1998). https://doi.org/10.1063/1.368138

    Article  ADS  Google Scholar 

  24. G.D. Mea, F. Demichelis, C.F. Pirri, P. Rava, V. Rigato, T. Stapinski, E. Tresso, Influence of hydrogen on the evolution of structural properties of amorphous silicon carbide. J. Non-Crystalline Solids 137, 95–98 (1991). https://doi.org/10.1016/S0022-3093(05)80065-1

    Article  ADS  Google Scholar 

  25. A. Boukezzata, A. Keffous, N. Gabouze, A. Manseri, B. Mahmoudi, S. Kaci, L. Guerbous, H. Menari, S. Bouanik, Y. Belkacem, Elaboration of porous thin hydrogenated amorphous silicon carbide films for optoelectronic device. J. Nanoelectron. Optoelectron. 14, 321–327 (2019). https://doi.org/10.1166/jno.2019.2526

    Article  Google Scholar 

  26. J.E. Spanier, A.C. West, I.P. Herman, Electrochemical impedance spectroscopy of 6H-SiC in aqueous hydrofluoric acid. J. Electrochem. Soc. 148, C663–C667 (2001). https://doi.org/10.1149/1.1396652

    Article  Google Scholar 

  27. A. Boukezzata, A. Keffous, G. Nezzal, N. Gabouze, M. Kechouane, K. Zaafane, A. Hammouda, P. Simon, H. Menari, Investigation properties of Au–porous a-Si0.70C0.30 as humidity sensor. Sens. Actuators B 176, 1183–1190 (2013). https://doi.org/10.1016/j.snb.2012.10.082

    Article  Google Scholar 

  28. A. Boukezzata, G. Nezzal, L. Guerbous, A. Keffous, N. Gabouze, Y. Belkacem, A. Manseri, A. Brighet, M. Kechouane, H. Menari, Comparative study of porous amorphous a-Si1−xCx films and a-Si1−xCx membranes on structural and luminescence properties. J. Lumin. 131, 1184–1188 (2011). https://doi.org/10.1016/j.jlumin.2011.02.029

    Article  Google Scholar 

  29. A.M. Ouadfel, A. Keffous, A. Kheloufi, A. Cheriet, C. Yaddaden, N. Gabouze, M. Kechouane, Y. Belkacem, A. Boukezzata, S. Kaci, L. Talbi, Y. Ouadah, I. Bozetine, B. Rezgui, L. Guerbous, H. Menari, B. Mahmoudi, I. Menous, Silicon carbide thin films with different processing growth as an alternative for energetic application. Opt. Mater. 65, 117–123 (2017). https://doi.org/10.1016/j.optmat.2016.09.027

    Article  ADS  Google Scholar 

  30. S. Naama, T. Hadjersi, A. Keffous, G. Nezzal, CO2 gas sensor based on silicon nanowires modified with metal nanoparticles. Mater. Sci. Semicond. Process. 38, 367–372 (2015). https://doi.org/10.1016/j.mssp.2015.01.027

    Article  Google Scholar 

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Acknowledgements

This work was completed thanks to the National Funds of Research, DGRSDT/MESRS (Algeria).

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Authors and Affiliations

  1. CMSI Division, Research Center On Semiconductor Technology for Energetic, CRTSE, 2 B Frantz Fanon, PB 140, 7M, Algiers, Algeria

    A. Boukezzata, S. Bouanik, A. Manseri, H. Cheraga, S. Kaci & H. Menari

  2. Process Engineering Faculty, University of Science and Technology Houari Boumediene (USTHB), Bab ezzouar, Algiers, Algeria

    A. Kebaili & A. Bouhamed

  3. Algiers Nuclear Research Center (CRNA), 2 Bd Frantz Fanon, BP 399, Algiers, Algeria

    L. Guerbous

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  1. A. Boukezzata
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Boukezzata, A., Kebaili, A., Bouhamed, A. et al. Elaboration and characterization of a-SiC nanowires for CO2 sensor. Appl. Phys. A 127, 775 (2021). https://doi.org/10.1007/s00339-021-04912-z

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