Abstract
In this study, Zinc Oxide (ZnO) microrods were prepared on chemically etched macroporous silicon (mPS) substrates by chemical bath deposition (CBD) technique. Effect of CBD growth times (1, 3, and 5 h) on the physical, structural, elemental, and optical properties were analyzed using field emission scanning electron microscopy (FESEM), energy-dispersive X-ray (EDX), X-ray diffraction (XRD), Raman spectroscopy, and Ultraviolet–visible (UV–Vis) spectroscopy. The electrochemical etching process results a deep porous layer thickness of 66.91 µm and large macroporous size of 6.64 µm. Morphological analysis reveals the increasing size as well as the density of ZnO microrods on the mPS substrates, proportional to the growth times. The elemental analysis by EDX detected the presence of silicon and oxygen in mPS and the presence of silicon, zinc, and oxygen in ZnO on mPS without other impurities. XRD revealed the polycrystalline ZnO wurtzite hexagonal structures with intense peak at (002). Raman scattering analysis provides observation on broadening and shifting of Raman spectra at 302 and 520 cm−1 of mPS and the presence of E2 (High) mode by ZnO on mPS at a longer CBD growth time of 5 h. UV–Vis spectra revealed that the bandgap of the structures was found at 2.90 eV for mPS, and at (3.10, 3.12, and 3.15 eV) for ZnO on mPS, which is lower than the standard value of 3.37 eV for bulk ZnO. The incorporation of ZnO microrods on the mPS in this work was unique as the structure was unevenly grown on the inter-connected base substrate and could find a potential application as optoelectronic device.
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Acknowledgements
This work acknowledges support from the RUI grant under Universiti Sains Malaysia, 1001/PFIZIK/8011092, and the authors indebted to the staff of Nano-Optoelectronics Research and Technology Lab and Solid-State Lab, School of Physics, Universiti Sains Malaysia
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All co-authors have seen and agreed with the contents of the manuscript. N Rosli prepared the sample and characterized the measurements. N Rosli and MM Halim drafted the manuscript. MM Halim and MR Hashim revised the manuscript. All authors analyzed the results and prepared the final manuscript.
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Rosli, N., Halim, M.M. & Hashim, M.R. Effect of CBD growth times on the ZnO microrods prepared on macroporous silicon. Appl. Phys. A 127, 712 (2021). https://doi.org/10.1007/s00339-021-04865-3
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DOI: https://doi.org/10.1007/s00339-021-04865-3