Abstract
The temperature dependence of the electrical properties of the Schottky barrier contact W/4H-SiC is studied in term of the Werner’s model assuming a Gaussian distribution of the barrier height to model the inhomogeneity of the Schottky interface. The Gaussian distribution is characterized by the parameters \(\overline{\phi }_{B}\) as a mean barrier height, ρ2, ρ3 as coefficients quantifying the barrier deformation and σs as a standard deviation. The effect of the series resistance Rs and its relation with the standard deviation σs is also reported. A vertical optimization process is used to extract simultaneously all the parameters cited above as function of temperature from the forward current–voltage (I-V) characteristics at temperatures ranging from 303 to 448 K. The temperature dependence of the characterized parameters of the W/4H-SiC Schottky structure enables us to quantify the inhomogeneity state of the Schottky barrier height prevailing at the MS interface in terms of those extracted parameters.
Similar content being viewed by others
References
S.M. Sze, Physics of Semiconductor Devices. (Wiley-Interscience, 1981), p. 135–175
P.L. Hanselaer, W.H. Laflere, R.L. Van Meirhaeghe, F. Cardon, J. Appl. Phys, 56, 2309–2314 (1984)
P.L. Hanselaer, W.H. Laflere, R.L. Van Meirhaeghe, F. Cardon, Appl. Phys. A, 39, 129–133 (1986)
E.H. Rhoderick, R.H. Williams, Metal Semiconductor Contacts, 2nd edn. (Clarendon, Oxford, 1988), pp. 11–24
R.T. Tung, Appl. Phys. Lett. 58(24), 2821–2823 (1991)
H. Jurgen, H. Werner, H. Guttler, J. Appl. Phys. 69(3), 1522–1533 (1991)
H. Herbert Guttler, J.H. Werner, Appl. Phys. lett, 56 N° 12 (1990)
S. Zhu, R.L. Van Meirhaeghe, C. Detavernier, G.-P. Ru, B.-Z. Li, F. Cardon, Solid State Commun. 112, 611–618 (1999)
G.M. Vanalme, L. Goubert, R.L. Van Meirhaeghe, F. Cardon, P.V. Daele, Semicond. Sci. Technol. 14, 871–877 (1999)
S. Forment, R.L. Van Meirhaeghe, A. De Vrieze, K. Strubbe, W.P. Gomes, Semicond. Sci. Technol. 16, 975–981 (2001)
İ. Taşçıoğlu, U. Aydemir, Ş. Altındal, J. Appl. Phys. 108, 064506-1–064506-7 (2010)
E. Omotoso, W.E. Meyer, F.D. Auret, A.T. Paradzah, M. Diale, S.M.M. Coelho, P.J. Janse van Rensburg, Mater. Sci. Semicond. Process 39, 112–118 (2015)
A. Di Bartolomeo, Phys. Rep. 606, 1–58 (2016)
B. Prasanna Lakshmi, M. Siva Pratap Reddy, A. Ashok Kumar, V. Rajagopal Reddy, Current Appl. Phys. 12, 765–772 (2012)
H.H. Güllü, M. Parlak, Energy Procedia 102, 110–120 (2016)
M. Sağlam, B. Güzeldir, J. Phys. Conference Series 707, 012013-1–012013-7 (2016)
S. Mahato, RSC Adv. 7, 47125–47131 (2017)
N.A. Al-Ahmadi, F.A. Ebrahim, H.A. Al-Jawhari, R.H. Mari, M. Henini, Mod. Electron. Mater. 3, 66–71 (2017)
A. Ashok Kumar, L. Dasaradha Rao, V. Rajagopal Reddy, C-J. Choi, Current Appl. Phys. 13(6), 1604–1610 (2013)
A. Kumar, S. Arafin, M. Christian Amann, R. Singh, Nanoscale Res. Lett. 8, 1–7 (2013)
S.M. Lim, H.-W. Yeon, G.-B. Lee, M.-G. Jin, S.-Y. Lee, J. Jo, M. Kim, Y.-C. Joo, Sci. Rep. 9, 1–9 (2019)
A.A.M. Farag, I.S. Yahia, Synth. Met. 161, 32–39 (2011)
A. Akkaya, L. Esmer, T. Karaaslan, H. Çetin, E. Ayyıldız, Mater. Sci. Semicond. Process 28, 127–134 (2014)
L. Huang, D. Wang, Jap. J. Appl. Phys. 54 (2015)
A. Gümüş, Ş. Altındal, Mater. Sci. Semicond. Process 28, 66–71 (2014)
N. Tugluoglu, O. Faruk Yuksel, H. Safak, S. Karadeniz, Phys. Status Solidi A 209, 2313–2316 (2012)
A.N. Bestas¸, S. Yazıcı, F. Aktas¸, B. Abay, Appl. Surf. Sci. 318, 280–284 (2014)
P.R. Sekhar Reddy, V. Janardhanam, H.-K. Lee, K.-H. Shim, S.-N. Lee, V.R. Reddy, C.-J. Choi, J. Elec. Materi 49, 297–305 (2020)
N. Basman, S.F. Varol, J. Electron. Mater. 48, 7874–7881 (2019)
A.B. Renz, V.A. Shah, O.J. Vavasour, Y. Bonyadi, F. Li, T. Dai, G. W. C. Baker, S. Hindmarsh, Y. Han, M. Walker, Y. Sharma, Y. Liu, B. Raghothamachar, M. Dudley, P.A. Mawby, P.M. Gammon, J. Appl. Phys. 127, 025704-1–025704-9 (2020)
J.-H. Shin, J. Park, S.Y. Jang, T. Jang, K.S. Kim, Appl. Phys.Lett. 102, 243505-1–243505-4 (2013)
P.M. Gammon, A. Perez-Tomas, V.A. Shah, O. Vavasour, E. Donchev, J.S. Pang, M. Myronov, C.A. Fisher, M.R. Jennings, D.R. Leadley, P.A. Mawby, J. Appl. Phys. 114, 223704-1–223704-11 (2013)
M. Mamor, J. Phys.: Condens. Matter. 21, 335802-1–335802-12 (2009)
M.J. Bozack, Phys. stat. sol. (b) 2002, 549–580 (1997)
S. Toumi, A. Ferhat-Hamida, L. Boussouar, A. Sellai, Z. Ouennoughi, H. Ryssel, Microelectron. Eng. 86, 303–309 (2009)
J. Osvald, E. Dobrocka, Semicond. Sci. Technol. 11, 1198–1202 (1996)
W.H. Press, S.A. Teukolsky, W.T. Vetterling, B.P. Flannery, Numerical Recipes in Fortran 77, The art of Scientific Computing, (Combridge University Press 1986–1992), p. 372–376
A.N. Saxena, Surf. Sci. 13, 151–171 (1969)
B. Sahin, H. Cetin, E. Ayyildiz, Solid State Commun. 135, 490–495 (2005)
A. Turut, M. Saglam, H. Efeoglu, N. Yalcln, M. Ylldlrlm, B. Abay, Physica B, 205, 41–50 (1995)
C. Raynaud, K. Isoird, M. Lazar, C. M. Johnson, N. Wright, J. Appl. Phys. 91, N°12 (2002)
Acknowledgements
One of the authors S. Toumi would like to thank Pr T. Guerfi for his assistance in the correction of the present paper and for numerous fruitful discussions.
Author information
Authors and Affiliations
Corresponding author
Ethics declarations
Conflict of interest
The authors declare that they have no conflict of interest.
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Toumi, S., Ouennoughi, Z. & Weiss, R. Temperature analysis of the Gaussian distribution modeling the barrier height inhomogeneity in the Tungsten/4H-SiC Schottky diode. Appl. Phys. A 127, 661 (2021). https://doi.org/10.1007/s00339-021-04787-0
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s00339-021-04787-0