Abstract
In a chemi-resistive gas sensor, the sensing properties are essentially improved through surface functionalization. In the present work, silicon nanowalls (SiNWs) were carved on silicon wafers by metal-assisted chemical etching technique. Over the SiNWs, platinum (Pt) and palladium (Pd) nanoparticles were deposited through a fluoride-free galvanic displacement deposition technique. The surface-decorated SiNWs were then evaluated for their sensing behaviour towards hydrogen (H2) gas. The morphological investigation revealed vertically aligned SiNW architecture with Pt and Pd nanoparticles sprinkled over the wall-tips. The crystallographic analysis indicated that the SiNWs has the original single-crystalline nature of the silicon wafer even after surface modification. Comparison of H2 gas sensing efficacies indicates an ~ 8 and ~ 4-fold corresponding increase in Pd and Pt functionalized SiNWs, at 200 °C, with respect to pristine SiNWs. A plausible sensing mechanism is suggested with a suitable parallel resistance model. The combinatorial effect of single-crystalline SiNWs and catalytic properties of Pt and Pd resulted in enhanced sensing characteristics. Moreover, the economically scalable aptitude of the fabrication technique makes them suitable for real-time and facile industrial applications.
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Acknowledgements
The authors thank DAE, Government of India for the research support. The authors also thank to Lakshmanan Chelladurai and Reshma P Radhakrishnan of IGCAR for gas sensing and Sruthi Mohan of IGCAR for GIXRD measurements. UGC-DAE CSR, Kalpakkam Node is also kindly acknowledged. Raghavan Nadar Viswanath thanks Vinayaka Mission Research Foundation, Chennai 603 104 for the support and encouragement.
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Behera, A.K., Viswanath, R.N., Manovah David, T. et al. Hydrogen sensing behaviour of platinum and palladium functionalized silicon nanowalls. Appl. Phys. A 127, 40 (2021). https://doi.org/10.1007/s00339-020-04154-5
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DOI: https://doi.org/10.1007/s00339-020-04154-5